JPH01101407A - 線幅測定方法 - Google Patents
線幅測定方法Info
- Publication number
- JPH01101407A JPH01101407A JP26057387A JP26057387A JPH01101407A JP H01101407 A JPH01101407 A JP H01101407A JP 26057387 A JP26057387 A JP 26057387A JP 26057387 A JP26057387 A JP 26057387A JP H01101407 A JPH01101407 A JP H01101407A
- Authority
- JP
- Japan
- Prior art keywords
- edge
- profile
- measurement
- edges
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 32
- 238000005259 measurement Methods 0.000 claims abstract description 60
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 230000000630 rising effect Effects 0.000 claims description 19
- 238000000691 measurement method Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 7
- 238000012545 processing Methods 0.000 description 20
- 230000000007 visual effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000003708 edge detection Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- BZUDVELGTZDOIG-UHFFFAOYSA-N 2-ethyl-n,n-bis(2-ethylhexyl)hexan-1-amine Chemical compound CCCCC(CC)CN(CC(CC)CCCC)CC(CC)CCCC BZUDVELGTZDOIG-UHFFFAOYSA-N 0.000 description 1
- 101100325756 Arabidopsis thaliana BAM5 gene Proteins 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 101150046378 RAM1 gene Proteins 0.000 description 1
- 101100476489 Rattus norvegicus Slc20a2 gene Proteins 0.000 description 1
- 101100385969 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CYC8 gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26057387A JPH01101407A (ja) | 1987-10-15 | 1987-10-15 | 線幅測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26057387A JPH01101407A (ja) | 1987-10-15 | 1987-10-15 | 線幅測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01101407A true JPH01101407A (ja) | 1989-04-19 |
| JPH0555801B2 JPH0555801B2 (en:Method) | 1993-08-18 |
Family
ID=17349827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26057387A Granted JPH01101407A (ja) | 1987-10-15 | 1987-10-15 | 線幅測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01101407A (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006170869A (ja) * | 2004-12-17 | 2006-06-29 | Hitachi Kokusai Electric Inc | 測定装置の校正方法 |
| JP2006194593A (ja) * | 2005-01-11 | 2006-07-27 | Hitachi Kokusai Electric Inc | 線幅測定方法 |
| JP2009109446A (ja) * | 2007-11-01 | 2009-05-21 | Dainippon Screen Mfg Co Ltd | 塗布装置および塗布方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61182390A (ja) * | 1985-02-08 | 1986-08-15 | Hitachi Ltd | パタ−ン検出装置 |
-
1987
- 1987-10-15 JP JP26057387A patent/JPH01101407A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61182390A (ja) * | 1985-02-08 | 1986-08-15 | Hitachi Ltd | パタ−ン検出装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006170869A (ja) * | 2004-12-17 | 2006-06-29 | Hitachi Kokusai Electric Inc | 測定装置の校正方法 |
| JP2006194593A (ja) * | 2005-01-11 | 2006-07-27 | Hitachi Kokusai Electric Inc | 線幅測定方法 |
| JP2009109446A (ja) * | 2007-11-01 | 2009-05-21 | Dainippon Screen Mfg Co Ltd | 塗布装置および塗布方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0555801B2 (en:Method) | 1993-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5228490B2 (ja) | 画像解析によって欠陥検査を行う欠陥検査装置 | |
| US6920249B2 (en) | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate | |
| CN100580435C (zh) | 监控制程变异的系统与方法 | |
| EP0483362B1 (en) | System for measuring length of sheet | |
| JP2004177139A (ja) | 検査条件データ作成支援プログラム及び検査装置及び検査条件データ作成方法 | |
| JPH02257007A (ja) | コンタクトレンズ外周欠け検査装置 | |
| JPH01101407A (ja) | 線幅測定方法 | |
| US20050151760A1 (en) | Method of inspecting a flat panel display | |
| WO2022142162A1 (zh) | 一种弧面光泽均匀性检测方法 | |
| JP4038161B2 (ja) | 金属板材の表面欠陥の原因推定装置および原因推定プログラムならびに原因推定方法 | |
| JP3151790B2 (ja) | 溶接開先・ビードの中心位置検出方法及び装置 | |
| JPH04184205A (ja) | 測長装置 | |
| JPS6347642A (ja) | 表面探傷における欠陥種類弁別方法 | |
| US6396944B1 (en) | Inspection method for Levenson PSM mask | |
| JP2003166941A (ja) | 膜厚むら検査装置、膜厚むら検査方法および膜厚むら検査プログラム | |
| JP3017839B2 (ja) | 欠陥検査方法及び検査装置 | |
| JP3020429B2 (ja) | 表面歪み算出方法 | |
| JPH04160304A (ja) | 板幅方向反り検出装置 | |
| JPH11135583A (ja) | チップのパターン検査装置および方法 | |
| JPH06281429A (ja) | 形鋼材の寸法測定装置 | |
| CN217900753U (zh) | 一种冲击试样缺口投影仪的测量装置 | |
| JPH0238957A (ja) | 表面欠陥検査装置 | |
| JPH0573585B2 (en:Method) | ||
| JP2971026B2 (ja) | 画像処理装置及び画像処理方法 | |
| JPH0238952A (ja) | 表面欠陥検査装置 |