JPH0555801B2 - - Google Patents

Info

Publication number
JPH0555801B2
JPH0555801B2 JP62260573A JP26057387A JPH0555801B2 JP H0555801 B2 JPH0555801 B2 JP H0555801B2 JP 62260573 A JP62260573 A JP 62260573A JP 26057387 A JP26057387 A JP 26057387A JP H0555801 B2 JPH0555801 B2 JP H0555801B2
Authority
JP
Japan
Prior art keywords
edge
edges
measurement
profile
image signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62260573A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01101407A (ja
Inventor
Seiichiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP26057387A priority Critical patent/JPH01101407A/ja
Publication of JPH01101407A publication Critical patent/JPH01101407A/ja
Publication of JPH0555801B2 publication Critical patent/JPH0555801B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP26057387A 1987-10-15 1987-10-15 線幅測定方法 Granted JPH01101407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26057387A JPH01101407A (ja) 1987-10-15 1987-10-15 線幅測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26057387A JPH01101407A (ja) 1987-10-15 1987-10-15 線幅測定方法

Publications (2)

Publication Number Publication Date
JPH01101407A JPH01101407A (ja) 1989-04-19
JPH0555801B2 true JPH0555801B2 (en:Method) 1993-08-18

Family

ID=17349827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26057387A Granted JPH01101407A (ja) 1987-10-15 1987-10-15 線幅測定方法

Country Status (1)

Country Link
JP (1) JPH01101407A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4657700B2 (ja) * 2004-12-17 2011-03-23 株式会社日立国際電気 測定装置の校正方法
JP4663334B2 (ja) * 2005-01-11 2011-04-06 株式会社日立国際電気 線幅測定方法
JP4922130B2 (ja) * 2007-11-01 2012-04-25 大日本スクリーン製造株式会社 塗布装置および塗布方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182390A (ja) * 1985-02-08 1986-08-15 Hitachi Ltd パタ−ン検出装置

Also Published As

Publication number Publication date
JPH01101407A (ja) 1989-04-19

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