JP7706659B2 - 光学ラインセンサ - Google Patents

光学ラインセンサ Download PDF

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Publication number
JP7706659B2
JP7706659B2 JP2024526247A JP2024526247A JP7706659B2 JP 7706659 B2 JP7706659 B2 JP 7706659B2 JP 2024526247 A JP2024526247 A JP 2024526247A JP 2024526247 A JP2024526247 A JP 2024526247A JP 7706659 B2 JP7706659 B2 JP 7706659B2
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Japan
Prior art keywords
light
light receiving
scanning direction
lens
receiving element
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Japanese (ja)
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JPWO2023238480A5 (https=
JPWO2023238480A1 (https=
Inventor
龍太 渡邊
修 岩崎
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Vienex Corp
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Vienex Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/024—Details of scanning heads ; Means for illuminating the original
    • H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H04N1/053—Detection, control or error compensation of scanning velocity or position in main scanning direction, e.g. synchronisation of line start or picture elements in a line
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/86—Investigating moving sheets
    • G01N2021/8609—Optical head specially adapted
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/86—Investigating moving sheets
    • G01N2021/8609—Optical head specially adapted
    • G01N2021/8627—Optical head specially adapted with an illuminator over the whole width
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Mathematical Physics (AREA)
  • Facsimile Heads (AREA)
  • Image Input (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2024526247A 2022-06-08 2023-03-27 光学ラインセンサ Active JP7706659B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022093007 2022-06-08
JP2022093007 2022-06-08
PCT/JP2023/012244 WO2023238480A1 (ja) 2022-06-08 2023-03-27 光学ラインセンサ

Publications (3)

Publication Number Publication Date
JPWO2023238480A1 JPWO2023238480A1 (https=) 2023-12-14
JPWO2023238480A5 JPWO2023238480A5 (https=) 2024-11-05
JP7706659B2 true JP7706659B2 (ja) 2025-07-11

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ID=89118044

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JP2024526247A Active JP7706659B2 (ja) 2022-06-08 2023-03-27 光学ラインセンサ

Country Status (6)

Country Link
US (1) US20250354938A1 (https=)
EP (1) EP4538684A4 (https=)
JP (1) JP7706659B2 (https=)
KR (1) KR20250005338A (https=)
CN (1) CN119301439A (https=)
WO (1) WO2023238480A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115629076B (zh) * 2022-09-27 2025-02-18 威海华菱光电股份有限公司 一种阵列式图像检测装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001242090A (ja) 2000-02-28 2001-09-07 Nkk Corp 表面検査装置
JP2003106936A (ja) 2001-09-27 2003-04-09 Japan Science & Technology Corp センサヘッド、これを具備した輝度分布測定装置、外観検査装置及び表示ムラ検査評価装置
JP2010107249A (ja) 2008-10-28 2010-05-13 Saki Corp:Kk 被検査体の検査装置
JP2010164717A (ja) 2009-01-14 2010-07-29 Oki Data Corp レンズアレイ、レンズユニット、ｌｅｄヘッド、露光装置、画像形成装置および読取装置
US20110038038A1 (en) 2009-08-17 2011-02-17 Sony Corporation Lens array imaging optics for a line sensor module
JP2019120540A (ja) 2017-12-28 2019-07-22 タカノ株式会社 欠陥検査装置、及び、欠陥検査装置の製造方法
WO2020059426A1 (ja) 2018-09-21 2020-03-26 東レ株式会社 シート状物の欠点検査用照明、シート状物の欠点検査装置、およびシート状物の欠点検査方法
WO2022004232A1 (ja) 2020-06-30 2022-01-06 株式会社ヴィーネックス 異物・欠陥検査装置、異物・欠陥検査における画像生成装置、及び異物・欠陥検査方法
WO2022034736A1 (ja) 2020-08-11 2022-02-17 株式会社ヴィーネックス 異物・欠陥検査装置、異物・欠陥検査における画像生成装置、及び異物・欠陥検査方法
WO2022130736A1 (ja) 2020-12-15 2022-06-23 株式会社ヴィーネックス 光学ラインセンサ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0514600A (ja) 1991-06-28 1993-01-22 Kyocera Corp 原稿読み取り装置
JP2009206842A (ja) * 2008-02-28 2009-09-10 Panasonic Corp 画像読取装置
JP4913089B2 (ja) 2008-03-31 2012-04-11 三菱電機株式会社 画像読取装置
JP4809859B2 (ja) 2008-03-31 2011-11-09 三菱電機株式会社 画像読取装置
DE202015004739U1 (de) 2015-07-02 2016-10-05 Schwan-Stabilo Cosmetics Gmbh & Co. Kg Schoner für einen Stift
JP6058091B2 (ja) * 2015-08-05 2017-01-11 三菱電機株式会社 画像読取装置
JP6733406B2 (ja) 2016-07-29 2020-07-29 コニカミノルタ株式会社 画像読取装置
JP6708045B2 (ja) 2016-08-01 2020-06-10 コニカミノルタ株式会社 画像読取モジュール、画像読取装置および画像形成装置
KR20180019334A (ko) 2016-08-16 2018-02-26 주식회사 엔케이 액화가스 저장탱크
JP6870395B2 (ja) 2017-03-13 2021-05-12 コニカミノルタ株式会社 画像読取装置
JP6690068B1 (ja) * 2018-05-23 2020-04-28 三菱電機株式会社 受光ユニット

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001242090A (ja) 2000-02-28 2001-09-07 Nkk Corp 表面検査装置
JP2003106936A (ja) 2001-09-27 2003-04-09 Japan Science & Technology Corp センサヘッド、これを具備した輝度分布測定装置、外観検査装置及び表示ムラ検査評価装置
JP2010107249A (ja) 2008-10-28 2010-05-13 Saki Corp:Kk 被検査体の検査装置
JP2010164717A (ja) 2009-01-14 2010-07-29 Oki Data Corp レンズアレイ、レンズユニット、ｌｅｄヘッド、露光装置、画像形成装置および読取装置
US20110038038A1 (en) 2009-08-17 2011-02-17 Sony Corporation Lens array imaging optics for a line sensor module
JP2019120540A (ja) 2017-12-28 2019-07-22 タカノ株式会社 欠陥検査装置、及び、欠陥検査装置の製造方法
WO2020059426A1 (ja) 2018-09-21 2020-03-26 東レ株式会社 シート状物の欠点検査用照明、シート状物の欠点検査装置、およびシート状物の欠点検査方法
WO2022004232A1 (ja) 2020-06-30 2022-01-06 株式会社ヴィーネックス 異物・欠陥検査装置、異物・欠陥検査における画像生成装置、及び異物・欠陥検査方法
WO2022034736A1 (ja) 2020-08-11 2022-02-17 株式会社ヴィーネックス 異物・欠陥検査装置、異物・欠陥検査における画像生成装置、及び異物・欠陥検査方法
WO2022130736A1 (ja) 2020-12-15 2022-06-23 株式会社ヴィーネックス 光学ラインセンサ

Also Published As

Publication number Publication date
EP4538684A1 (en) 2025-04-16
KR20250005338A (ko) 2025-01-09
CN119301439A (zh) 2025-01-10
WO2023238480A1 (ja) 2023-12-14
US20250354938A1 (en) 2025-11-20
JPWO2023238480A1 (https=) 2023-12-14
EP4538684A4 (en) 2025-09-03

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