JP7638560B2 - 反射体スキャナ - Google Patents

反射体スキャナ Download PDF

Info

Publication number
JP7638560B2
JP7638560B2 JP2023552658A JP2023552658A JP7638560B2 JP 7638560 B2 JP7638560 B2 JP 7638560B2 JP 2023552658 A JP2023552658 A JP 2023552658A JP 2023552658 A JP2023552658 A JP 2023552658A JP 7638560 B2 JP7638560 B2 JP 7638560B2
Authority
JP
Japan
Prior art keywords
frame
axis
pair
coil
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023552658A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023058226A1 (https=
JPWO2023058226A5 (https=
Inventor
三朗 伊藤
行雄 中澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YITOA MICRO TECHNOLOGY CORPORATION
Original Assignee
YITOA MICRO TECHNOLOGY CORPORATION
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YITOA MICRO TECHNOLOGY CORPORATION filed Critical YITOA MICRO TECHNOLOGY CORPORATION
Publication of JPWO2023058226A1 publication Critical patent/JPWO2023058226A1/ja
Publication of JPWO2023058226A5 publication Critical patent/JPWO2023058226A5/ja
Priority to JP2025020657A priority Critical patent/JP7853732B2/ja
Application granted granted Critical
Publication of JP7638560B2 publication Critical patent/JP7638560B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP2023552658A 2021-10-08 2021-10-08 反射体スキャナ Active JP7638560B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025020657A JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/037356 WO2023058226A1 (ja) 2021-10-08 2021-10-08 反射体スキャナ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025020657A Division JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Publications (3)

Publication Number Publication Date
JPWO2023058226A1 JPWO2023058226A1 (https=) 2023-04-13
JPWO2023058226A5 JPWO2023058226A5 (https=) 2024-04-30
JP7638560B2 true JP7638560B2 (ja) 2025-03-04

Family

ID=85804067

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023552658A Active JP7638560B2 (ja) 2021-10-08 2021-10-08 反射体スキャナ
JP2025020657A Active JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025020657A Active JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Country Status (6)

Country Link
US (1) US12601907B2 (https=)
EP (1) EP4382215A4 (https=)
JP (2) JP7638560B2 (https=)
KR (1) KR102941778B1 (https=)
CN (1) CN117999132A (https=)
WO (1) WO2023058226A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354283A (ja) 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
JP6726356B2 (ja) 2017-03-13 2020-07-22 パイオニア株式会社 駆動装置および距離測定装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672635A (ja) 1992-08-28 1994-03-15 Teijin Ltd 自動玉揚方法
US6859325B2 (en) * 2001-06-20 2005-02-22 Sony Corporation Objective lens device, optical pickup device, and optical information recording and/or reproduction device
JP4164421B2 (ja) * 2002-08-26 2008-10-15 キヤノン株式会社 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法
US6924915B2 (en) * 2002-08-26 2005-08-02 Canon Kabushiki Kaisha Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
JP2005165276A (ja) * 2003-11-10 2005-06-23 Olympus Corp 光偏向器
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
JP5007648B2 (ja) * 2007-10-12 2012-08-22 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2010107666A (ja) * 2008-10-29 2010-05-13 Osaka Univ 光スキャナ
DE102010064218A1 (de) * 2010-12-27 2012-06-28 Robert Bosch Gmbh Magnetisch antreibbarer Mikrospiegel
WO2013168273A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
JP6075062B2 (ja) * 2012-12-27 2017-02-08 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
KR101894375B1 (ko) * 2016-07-13 2018-09-04 이화여자대학교 산학협력단 스캐닝 마이크로 미러
JP2018081155A (ja) * 2016-11-14 2018-05-24 純 鈴木 駆動装置
JP2020027044A (ja) * 2018-08-13 2020-02-20 パイオニア株式会社 走査装置、走査装置の制御方法、プログラム及び記録媒体並びに測距装置
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354283A (ja) 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
JP6726356B2 (ja) 2017-03-13 2020-07-22 パイオニア株式会社 駆動装置および距離測定装置

Also Published As

Publication number Publication date
JP2025076486A (ja) 2025-05-15
JPWO2023058226A1 (https=) 2023-04-13
US20240353675A1 (en) 2024-10-24
EP4382215A4 (en) 2025-05-28
KR102941778B1 (ko) 2026-03-19
CN117999132A (zh) 2024-05-07
US12601907B2 (en) 2026-04-14
KR20240046229A (ko) 2024-04-08
WO2023058226A1 (ja) 2023-04-13
JP7853732B2 (ja) 2026-04-30
EP4382215A1 (en) 2024-06-12

Similar Documents

Publication Publication Date Title
JP4928301B2 (ja) 揺動体装置、その駆動方法、光偏向器、及び光偏向器を用いた画像表示装置
US7012737B2 (en) Two-dimensional optical deflector with minimized crosstalk
JP2009104102A (ja) ミラーから分離されたアクチュエータを備えたｍｅｍｓスキャナ
JP2005173411A (ja) 光偏向器
KR20090031104A (ko) 2축 구동 전자기 스캐너
JP2025076486A (ja) 反射体スキャナ
WO2013111265A1 (ja) アクチュエータ
JPWO2019087919A1 (ja) 光学反射素子
JP7221180B2 (ja) 光学デバイス
JP2019530019A (ja) マイクロミラー装置およびマイクロミラー装置の操作方法
JP2003195204A (ja) 光偏向器及び光偏向器アレイ
JP2021033087A (ja) ミラースキャナ
JP2016095519A (ja) アクチュエータ
JP2004237400A (ja) プレーナー型アクチュエータ
JP4475421B2 (ja) マイクロミラー、及び、マイクロミラーデバイス
WO2013168273A1 (ja) 駆動装置
JP7044498B2 (ja) アクチュエータ
JP2013034301A (ja) プレーナ型電磁アクチュエータ
JPWO2023058226A5 (https=)
KR100789574B1 (ko) 스캐닝 마이크로미러
JP7516651B2 (ja) アクチュエーター
JP7546752B2 (ja) アクチュエーター
KR20080067064A (ko) 스캐닝 마이크로미러
JP2007252124A (ja) 電磁アクチュエータ
WO2022180736A1 (ja) アクチュエーター

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240205

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240205

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240820

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20241126

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241205

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20250114

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20250212

R150 Certificate of patent or registration of utility model

Ref document number: 7638560

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150