KR102941778B1 - 반사체 스캐너 - Google Patents

반사체 스캐너

Info

Publication number
KR102941778B1
KR102941778B1 KR1020247008128A KR20247008128A KR102941778B1 KR 102941778 B1 KR102941778 B1 KR 102941778B1 KR 1020247008128 A KR1020247008128 A KR 1020247008128A KR 20247008128 A KR20247008128 A KR 20247008128A KR 102941778 B1 KR102941778 B1 KR 102941778B1
Authority
KR
South Korea
Prior art keywords
frame
axis
coil
pair
bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020247008128A
Other languages
English (en)
Korean (ko)
Other versions
KR20240046229A (ko
Inventor
사부로 이토
유키오 나카자와
Original Assignee
이토아 마이크로 테크놀로지 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이토아 마이크로 테크놀로지 가부시키가이샤 filed Critical 이토아 마이크로 테크놀로지 가부시키가이샤
Publication of KR20240046229A publication Critical patent/KR20240046229A/ko
Application granted granted Critical
Publication of KR102941778B1 publication Critical patent/KR102941778B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
KR1020247008128A 2021-10-08 2021-10-08 반사체 스캐너 Active KR102941778B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/037356 WO2023058226A1 (ja) 2021-10-08 2021-10-08 反射体スキャナ

Publications (2)

Publication Number Publication Date
KR20240046229A KR20240046229A (ko) 2024-04-08
KR102941778B1 true KR102941778B1 (ko) 2026-03-19

Family

ID=85804067

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247008128A Active KR102941778B1 (ko) 2021-10-08 2021-10-08 반사체 스캐너

Country Status (6)

Country Link
US (1) US12601907B2 (https=)
EP (1) EP4382215A4 (https=)
JP (2) JP7638560B2 (https=)
KR (1) KR102941778B1 (https=)
CN (1) CN117999132A (https=)
WO (1) WO2023058226A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
US20050024750A1 (en) * 2001-06-20 2005-02-03 Norihiro Kato Objective lens driving device, optical pickup device, and optical information recording and/or reproduction device
JP2010107666A (ja) * 2008-10-29 2010-05-13 Osaka Univ 光スキャナ
JP6726356B2 (ja) * 2017-03-13 2020-07-22 パイオニア株式会社 駆動装置および距離測定装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672635A (ja) 1992-08-28 1994-03-15 Teijin Ltd 自動玉揚方法
JP4164421B2 (ja) * 2002-08-26 2008-10-15 キヤノン株式会社 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法
US6924915B2 (en) * 2002-08-26 2005-08-02 Canon Kabushiki Kaisha Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
JP2005165276A (ja) * 2003-11-10 2005-06-23 Olympus Corp 光偏向器
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
JP5007648B2 (ja) * 2007-10-12 2012-08-22 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
DE102010064218A1 (de) * 2010-12-27 2012-06-28 Robert Bosch Gmbh Magnetisch antreibbarer Mikrospiegel
WO2013168273A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
JP6075062B2 (ja) * 2012-12-27 2017-02-08 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
KR101894375B1 (ko) * 2016-07-13 2018-09-04 이화여자대학교 산학협력단 스캐닝 마이크로 미러
JP2018081155A (ja) * 2016-11-14 2018-05-24 純 鈴木 駆動装置
JP2020027044A (ja) * 2018-08-13 2020-02-20 パイオニア株式会社 走査装置、走査装置の制御方法、プログラム及び記録媒体並びに測距装置
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050024750A1 (en) * 2001-06-20 2005-02-03 Norihiro Kato Objective lens driving device, optical pickup device, and optical information recording and/or reproduction device
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
JP2010107666A (ja) * 2008-10-29 2010-05-13 Osaka Univ 光スキャナ
JP6726356B2 (ja) * 2017-03-13 2020-07-22 パイオニア株式会社 駆動装置および距離測定装置

Also Published As

Publication number Publication date
JP2025076486A (ja) 2025-05-15
JPWO2023058226A1 (https=) 2023-04-13
US20240353675A1 (en) 2024-10-24
EP4382215A4 (en) 2025-05-28
JP7638560B2 (ja) 2025-03-04
CN117999132A (zh) 2024-05-07
US12601907B2 (en) 2026-04-14
KR20240046229A (ko) 2024-04-08
WO2023058226A1 (ja) 2023-04-13
JP7853732B2 (ja) 2026-04-30
EP4382215A1 (en) 2024-06-12

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