CN117999132A - 反射体扫描器 - Google Patents

反射体扫描器 Download PDF

Info

Publication number
CN117999132A
CN117999132A CN202180102156.9A CN202180102156A CN117999132A CN 117999132 A CN117999132 A CN 117999132A CN 202180102156 A CN202180102156 A CN 202180102156A CN 117999132 A CN117999132 A CN 117999132A
Authority
CN
China
Prior art keywords
frame
axis
coil
magnets
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180102156.9A
Other languages
English (en)
Chinese (zh)
Inventor
伊藤三朗
中泽行雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yingtang Micro Technology Co ltd
Original Assignee
Yingtang Micro Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yingtang Micro Technology Co ltd filed Critical Yingtang Micro Technology Co ltd
Publication of CN117999132A publication Critical patent/CN117999132A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
CN202180102156.9A 2021-10-08 2021-10-08 反射体扫描器 Pending CN117999132A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/037356 WO2023058226A1 (ja) 2021-10-08 2021-10-08 反射体スキャナ

Publications (1)

Publication Number Publication Date
CN117999132A true CN117999132A (zh) 2024-05-07

Family

ID=85804067

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180102156.9A Pending CN117999132A (zh) 2021-10-08 2021-10-08 反射体扫描器

Country Status (6)

Country Link
US (1) US12601907B2 (https=)
EP (1) EP4382215A4 (https=)
JP (2) JP7638560B2 (https=)
KR (1) KR102941778B1 (https=)
CN (1) CN117999132A (https=)
WO (1) WO2023058226A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122955A (ja) * 2006-11-01 2008-05-29 Samsung Electro Mech Co Ltd 電磁気マイクロアクチュエータ
CN103282819A (zh) * 2010-12-27 2013-09-04 罗伯特·博世有限公司 可磁驱动的微镜
US20140185117A1 (en) * 2012-12-27 2014-07-03 Seiko Epson Corporation Actuator, optical scanner, and image formation apparatus
EP3598622A1 (en) * 2017-03-13 2020-01-22 Pioneer Corporation Drive device and distance measuring device
JP2020027044A (ja) * 2018-08-13 2020-02-20 パイオニア株式会社 走査装置、走査装置の制御方法、プログラム及び記録媒体並びに測距装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672635A (ja) 1992-08-28 1994-03-15 Teijin Ltd 自動玉揚方法
US6859325B2 (en) * 2001-06-20 2005-02-22 Sony Corporation Objective lens device, optical pickup device, and optical information recording and/or reproduction device
JP4164421B2 (ja) * 2002-08-26 2008-10-15 キヤノン株式会社 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法
US6924915B2 (en) * 2002-08-26 2005-08-02 Canon Kabushiki Kaisha Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
JP2005165276A (ja) * 2003-11-10 2005-06-23 Olympus Corp 光偏向器
JP5007648B2 (ja) * 2007-10-12 2012-08-22 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2010107666A (ja) * 2008-10-29 2010-05-13 Osaka Univ 光スキャナ
WO2013168273A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
KR101894375B1 (ko) * 2016-07-13 2018-09-04 이화여자대학교 산학협력단 스캐닝 마이크로 미러
JP2018081155A (ja) * 2016-11-14 2018-05-24 純 鈴木 駆動装置
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122955A (ja) * 2006-11-01 2008-05-29 Samsung Electro Mech Co Ltd 電磁気マイクロアクチュエータ
CN103282819A (zh) * 2010-12-27 2013-09-04 罗伯特·博世有限公司 可磁驱动的微镜
US20140185117A1 (en) * 2012-12-27 2014-07-03 Seiko Epson Corporation Actuator, optical scanner, and image formation apparatus
EP3598622A1 (en) * 2017-03-13 2020-01-22 Pioneer Corporation Drive device and distance measuring device
JP2020027044A (ja) * 2018-08-13 2020-02-20 パイオニア株式会社 走査装置、走査装置の制御方法、プログラム及び記録媒体並びに測距装置

Also Published As

Publication number Publication date
JP2025076486A (ja) 2025-05-15
JPWO2023058226A1 (https=) 2023-04-13
US20240353675A1 (en) 2024-10-24
EP4382215A4 (en) 2025-05-28
JP7638560B2 (ja) 2025-03-04
KR102941778B1 (ko) 2026-03-19
US12601907B2 (en) 2026-04-14
KR20240046229A (ko) 2024-04-08
WO2023058226A1 (ja) 2023-04-13
JP7853732B2 (ja) 2026-04-30
EP4382215A1 (en) 2024-06-12

Similar Documents

Publication Publication Date Title
US7012737B2 (en) Two-dimensional optical deflector with minimized crosstalk
JP4928301B2 (ja) 揺動体装置、その駆動方法、光偏向器、及び光偏向器を用いた画像表示装置
US7224507B2 (en) Optical deflector
JP5860066B2 (ja) アクチュエータ
US20050122604A1 (en) Optical deflector
JP2009104102A (ja) ミラーから分離されたアクチュエータを備えたｍｅｍｓスキャナ
JP7853732B2 (ja) 反射体スキャナ
JP6094105B2 (ja) アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ
KR100941798B1 (ko) 스캐닝 마이크로미러
JP7221180B2 (ja) 光学デバイス
WO2013065126A1 (ja) アクチュエータ
KR20060124079A (ko) 스캐닝 마이크로미러 및 전자력 구동 2축 스캐닝마이크로미러 디바이스
JP2016095519A (ja) アクチュエータ
JP2007014130A (ja) プレーナ型電磁アクチュエータ
US7372620B2 (en) Micromirror and micromirror device
JP2006072251A (ja) プレーナ型アクチュエータ
JP2019056935A (ja) アクチュエータ
KR100789574B1 (ko) 스캐닝 마이크로미러
US12013492B2 (en) MEMS scanner for detecting rotational angle of mirror
JP4963864B2 (ja) 電磁アクチュエータ
KR20080067064A (ko) 스캐닝 마이크로미러
JP7516651B2 (ja) アクチュエーター
KR20070121082A (ko) 스캐닝 마이크로미러
JP2007252124A (ja) 電磁アクチュエータ
JPH07274465A (ja) 光ビーム走査装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination