JPWO2023058226A1 - - Google Patents

Info

Publication number
JPWO2023058226A1
JPWO2023058226A1 JP2023552658A JP2023552658A JPWO2023058226A1 JP WO2023058226 A1 JPWO2023058226 A1 JP WO2023058226A1 JP 2023552658 A JP2023552658 A JP 2023552658A JP 2023552658 A JP2023552658 A JP 2023552658A JP WO2023058226 A1 JPWO2023058226 A1 JP WO2023058226A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023552658A
Other languages
Japanese (ja)
Other versions
JP7638560B2 (ja
JPWO2023058226A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023058226A1 publication Critical patent/JPWO2023058226A1/ja
Publication of JPWO2023058226A5 publication Critical patent/JPWO2023058226A5/ja
Priority to JP2025020657A priority Critical patent/JP7853732B2/ja
Application granted granted Critical
Publication of JP7638560B2 publication Critical patent/JP7638560B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP2023552658A 2021-10-08 2021-10-08 反射体スキャナ Active JP7638560B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025020657A JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/037356 WO2023058226A1 (ja) 2021-10-08 2021-10-08 反射体スキャナ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025020657A Division JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Publications (3)

Publication Number Publication Date
JPWO2023058226A1 true JPWO2023058226A1 (https=) 2023-04-13
JPWO2023058226A5 JPWO2023058226A5 (https=) 2024-04-30
JP7638560B2 JP7638560B2 (ja) 2025-03-04

Family

ID=85804067

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023552658A Active JP7638560B2 (ja) 2021-10-08 2021-10-08 反射体スキャナ
JP2025020657A Active JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025020657A Active JP7853732B2 (ja) 2021-10-08 2025-02-12 反射体スキャナ

Country Status (6)

Country Link
US (1) US12601907B2 (https=)
EP (1) EP4382215A4 (https=)
JP (2) JP7638560B2 (https=)
KR (1) KR102941778B1 (https=)
CN (1) CN117999132A (https=)
WO (1) WO2023058226A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
JP6726356B2 (ja) * 2017-03-13 2020-07-22 パイオニア株式会社 駆動装置および距離測定装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672635A (ja) 1992-08-28 1994-03-15 Teijin Ltd 自動玉揚方法
US6859325B2 (en) * 2001-06-20 2005-02-22 Sony Corporation Objective lens device, optical pickup device, and optical information recording and/or reproduction device
JP4164421B2 (ja) * 2002-08-26 2008-10-15 キヤノン株式会社 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法
US6924915B2 (en) * 2002-08-26 2005-08-02 Canon Kabushiki Kaisha Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
JP2005165276A (ja) * 2003-11-10 2005-06-23 Olympus Corp 光偏向器
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
JP5007648B2 (ja) * 2007-10-12 2012-08-22 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2010107666A (ja) * 2008-10-29 2010-05-13 Osaka Univ 光スキャナ
DE102010064218A1 (de) * 2010-12-27 2012-06-28 Robert Bosch Gmbh Magnetisch antreibbarer Mikrospiegel
WO2013168273A1 (ja) * 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
JP6075062B2 (ja) * 2012-12-27 2017-02-08 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
KR101894375B1 (ko) * 2016-07-13 2018-09-04 이화여자대학교 산학협력단 스캐닝 마이크로 미러
JP2018081155A (ja) * 2016-11-14 2018-05-24 純 鈴木 駆動装置
JP2020027044A (ja) * 2018-08-13 2020-02-20 パイオニア株式会社 走査装置、走査装置の制御方法、プログラム及び記録媒体並びに測距装置
US12601907B2 (en) 2021-10-08 2026-04-14 Yitoa Micro Technology Corporation Reflector scanner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354283A (ja) * 2003-05-30 2004-12-16 Miyota Kk 表面検査用画像装置の照明ユニットとその制御方法。
JP6726356B2 (ja) * 2017-03-13 2020-07-22 パイオニア株式会社 駆動装置および距離測定装置

Also Published As

Publication number Publication date
JP2025076486A (ja) 2025-05-15
US20240353675A1 (en) 2024-10-24
EP4382215A4 (en) 2025-05-28
JP7638560B2 (ja) 2025-03-04
KR102941778B1 (ko) 2026-03-19
CN117999132A (zh) 2024-05-07
US12601907B2 (en) 2026-04-14
KR20240046229A (ko) 2024-04-08
WO2023058226A1 (ja) 2023-04-13
JP7853732B2 (ja) 2026-04-30
EP4382215A1 (en) 2024-06-12

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