JP7596234B2 - 光透過性積層体の検査方法および検査装置 - Google Patents

光透過性積層体の検査方法および検査装置 Download PDF

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JP7596234B2
JP7596234B2 JP2021136809A JP2021136809A JP7596234B2 JP 7596234 B2 JP7596234 B2 JP 7596234B2 JP 2021136809 A JP2021136809 A JP 2021136809A JP 2021136809 A JP2021136809 A JP 2021136809A JP 7596234 B2 JP7596234 B2 JP 7596234B2
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light
transmitting laminate
laminate
transmitting
lower grip
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JP2023031371A5 (enExample
JP2023031371A (ja
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浩次 自然
裕司 山下
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Nitto Denko Corp
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Nitto Denko Corp
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Priority to JP2021136809A priority Critical patent/JP7596234B2/ja
Priority to PCT/JP2022/025044 priority patent/WO2023026660A1/ja
Priority to CN202280057312.9A priority patent/CN117836612A/zh
Priority to KR1020247005419A priority patent/KR20240047381A/ko
Priority to TW111127766A priority patent/TW202309512A/zh
Publication of JP2023031371A publication Critical patent/JP2023031371A/ja
Publication of JP2023031371A5 publication Critical patent/JP2023031371A5/ja
Priority to JP2024206213A priority patent/JP2025019281A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2021136809A 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置 Active JP7596234B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2021136809A JP7596234B2 (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置
CN202280057312.9A CN117836612A (zh) 2021-08-25 2022-06-23 透光性层叠体的检查方法及检查装置
KR1020247005419A KR20240047381A (ko) 2021-08-25 2022-06-23 광 투과성 적층체의 검사 방법 및 검사 장치
PCT/JP2022/025044 WO2023026660A1 (ja) 2021-08-25 2022-06-23 光透過性積層体の検査方法および検査装置
TW111127766A TW202309512A (zh) 2021-08-25 2022-07-25 光透射性積層體之檢查方法及檢查裝置
JP2024206213A JP2025019281A (ja) 2021-08-25 2024-11-27 光透過性積層体の検査方法および検査装置

Applications Claiming Priority (1)

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JP2021136809A JP7596234B2 (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置

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JP2024206213A Division JP2025019281A (ja) 2021-08-25 2024-11-27 光透過性積層体の検査方法および検査装置

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JP2023031371A JP2023031371A (ja) 2023-03-09
JP2023031371A5 JP2023031371A5 (enExample) 2024-08-20
JP7596234B2 true JP7596234B2 (ja) 2024-12-09

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JP2021136809A Active JP7596234B2 (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置
JP2024206213A Pending JP2025019281A (ja) 2021-08-25 2024-11-27 光透過性積層体の検査方法および検査装置

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JP2024206213A Pending JP2025019281A (ja) 2021-08-25 2024-11-27 光透過性積層体の検査方法および検査装置

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JP (2) JP7596234B2 (enExample)
KR (1) KR20240047381A (enExample)
CN (1) CN117836612A (enExample)
TW (1) TW202309512A (enExample)
WO (1) WO2023026660A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119375253A (zh) * 2024-12-30 2025-01-28 华翌智能装备(杭州)有限公司 一种基于aoi视觉检查的电路板自动检测装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264259A (ja) 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2002055058A (ja) 2000-08-11 2002-02-20 Ajinomoto Faruma Kk 可撓性プラスチック容器の異物検査装置
JP2002506526A (ja) 1997-06-23 2002-02-26 ネーデルランドセ・オルガニザテイエ・フール・テゲパスト−ナトウールベテンシヤツペリーク・オンデルツエク・テイエヌオー 欠陥に関して品物を検査するための方法および装置
JP2002122550A (ja) 2000-08-11 2002-04-26 Ajinomoto Faruma Kk 可撓性プラスチック容器の異物検査装置及びその異物検査方法
JP2005134573A (ja) 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
JP2006284559A (ja) 2005-03-31 2006-10-19 Ever Techno Co Ltd 偏光フィルム検査装置及び方法
JP2012002676A (ja) 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2018509752A (ja) 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06174650A (ja) * 1992-12-01 1994-06-24 Sony Corp 表示パネル外観検査装置
JP2004077261A (ja) * 2002-08-16 2004-03-11 Horiba Ltd 液晶パネルの異物検査装置および異物検査方法
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置
JP2007163315A (ja) * 2005-12-14 2007-06-28 Tokuyama Corp 透明材料中の欠陥の形状及び位置の計測方法
JP2014119255A (ja) * 2012-12-13 2014-06-30 Mitsubishi Electric Corp 光学フィルムの検査装置および光学フィルムの検査方法
CN110998298B (zh) * 2017-08-24 2023-01-06 日本电气硝子株式会社 板状玻璃的制造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002506526A (ja) 1997-06-23 2002-02-26 ネーデルランドセ・オルガニザテイエ・フール・テゲパスト−ナトウールベテンシヤツペリーク・オンデルツエク・テイエヌオー 欠陥に関して品物を検査するための方法および装置
JP2001264259A (ja) 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2002055058A (ja) 2000-08-11 2002-02-20 Ajinomoto Faruma Kk 可撓性プラスチック容器の異物検査装置
JP2002122550A (ja) 2000-08-11 2002-04-26 Ajinomoto Faruma Kk 可撓性プラスチック容器の異物検査装置及びその異物検査方法
JP2005134573A (ja) 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
JP2006284559A (ja) 2005-03-31 2006-10-19 Ever Techno Co Ltd 偏光フィルム検査装置及び方法
JP2012002676A (ja) 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2018509752A (ja) 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査

Also Published As

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CN117836612A (zh) 2024-04-05
JP2025019281A (ja) 2025-02-06
KR20240047381A (ko) 2024-04-12
WO2023026660A1 (ja) 2023-03-02
TW202309512A (zh) 2023-03-01
JP2023031371A (ja) 2023-03-09

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