CN117836612A - 透光性层叠体的检查方法及检查装置 - Google Patents

透光性层叠体的检查方法及检查装置 Download PDF

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Publication number
CN117836612A
CN117836612A CN202280057312.9A CN202280057312A CN117836612A CN 117836612 A CN117836612 A CN 117836612A CN 202280057312 A CN202280057312 A CN 202280057312A CN 117836612 A CN117836612 A CN 117836612A
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CN
China
Prior art keywords
light
transmitting laminate
laminate
transmitting
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280057312.9A
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English (en)
Chinese (zh)
Inventor
自然浩次
山下裕司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of CN117836612A publication Critical patent/CN117836612A/zh
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8861Determining coordinates of flaws

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN202280057312.9A 2021-08-25 2022-06-23 透光性层叠体的检查方法及检查装置 Pending CN117836612A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021136809A JP7596234B2 (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置
JP2021-136809 2021-08-25
PCT/JP2022/025044 WO2023026660A1 (ja) 2021-08-25 2022-06-23 光透過性積層体の検査方法および検査装置

Publications (1)

Publication Number Publication Date
CN117836612A true CN117836612A (zh) 2024-04-05

Family

ID=85322709

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280057312.9A Pending CN117836612A (zh) 2021-08-25 2022-06-23 透光性层叠体的检查方法及检查装置

Country Status (5)

Country Link
JP (2) JP7596234B2 (enExample)
KR (1) KR20240047381A (enExample)
CN (1) CN117836612A (enExample)
TW (1) TW202309512A (enExample)
WO (1) WO2023026660A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119375253A (zh) * 2024-12-30 2025-01-28 华翌智能装备(杭州)有限公司 一种基于aoi视觉检查的电路板自动检测装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06174650A (ja) * 1992-12-01 1994-06-24 Sony Corp 表示パネル外観検査装置
NL1006378C2 (nl) 1997-06-23 1998-12-24 Tno Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.
JP2001264259A (ja) 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP4670090B2 (ja) 2000-08-11 2011-04-13 味の素株式会社 可撓性プラスチック容器の異物検査装置及びその異物検査方法
JP4560916B2 (ja) 2000-08-11 2010-10-13 味の素株式会社 可撓性プラスチック容器の異物検査装置
JP2004077261A (ja) * 2002-08-16 2004-03-11 Horiba Ltd 液晶パネルの異物検査装置および異物検査方法
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置
JP2005134573A (ja) 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
KR100789659B1 (ko) 2005-03-31 2007-12-31 에버테크노 주식회사 편광필름 검사장치 및 방법
JP2007163315A (ja) * 2005-12-14 2007-06-28 Tokuyama Corp 透明材料中の欠陥の形状及び位置の計測方法
JP2012002676A (ja) 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2014119255A (ja) * 2012-12-13 2014-06-30 Mitsubishi Electric Corp 光学フィルムの検査装置および光学フィルムの検査方法
US9816940B2 (en) 2015-01-21 2017-11-14 Kla-Tencor Corporation Wafer inspection with focus volumetric method
CN110998298B (zh) * 2017-08-24 2023-01-06 日本电气硝子株式会社 板状玻璃的制造方法

Also Published As

Publication number Publication date
JP2025019281A (ja) 2025-02-06
KR20240047381A (ko) 2024-04-12
JP7596234B2 (ja) 2024-12-09
WO2023026660A1 (ja) 2023-03-02
TW202309512A (zh) 2023-03-01
JP2023031371A (ja) 2023-03-09

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