JP7499627B2 - レーザ装置 - Google Patents

レーザ装置 Download PDF

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Publication number
JP7499627B2
JP7499627B2 JP2020116378A JP2020116378A JP7499627B2 JP 7499627 B2 JP7499627 B2 JP 7499627B2 JP 2020116378 A JP2020116378 A JP 2020116378A JP 2020116378 A JP2020116378 A JP 2020116378A JP 7499627 B2 JP7499627 B2 JP 7499627B2
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Japan
Prior art keywords
chamber
supported
resonator
optical
location
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Active
Application number
JP2020116378A
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English (en)
Japanese (ja)
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JP2022014176A (ja
Inventor
譲一 河村
研太 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2020116378A priority Critical patent/JP7499627B2/ja
Priority to KR1020210078436A priority patent/KR20220005392A/ko
Priority to TW110122576A priority patent/TWI834977B/zh
Priority to CN202110706451.7A priority patent/CN113904204B/zh
Publication of JP2022014176A publication Critical patent/JP2022014176A/ja
Application granted granted Critical
Publication of JP7499627B2 publication Critical patent/JP7499627B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H01S3/027—Constructional details of solid state lasers, e.g. housings or mountings comprising a special atmosphere inside the housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP2020116378A 2020-07-06 2020-07-06 レーザ装置 Active JP7499627B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020116378A JP7499627B2 (ja) 2020-07-06 2020-07-06 レーザ装置
KR1020210078436A KR20220005392A (ko) 2020-07-06 2021-06-17 레이저장치
TW110122576A TWI834977B (zh) 2020-07-06 2021-06-21 雷射裝置
CN202110706451.7A CN113904204B (zh) 2020-07-06 2021-06-24 激光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020116378A JP7499627B2 (ja) 2020-07-06 2020-07-06 レーザ装置

Publications (2)

Publication Number Publication Date
JP2022014176A JP2022014176A (ja) 2022-01-19
JP7499627B2 true JP7499627B2 (ja) 2024-06-14

Family

ID=79187507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020116378A Active JP7499627B2 (ja) 2020-07-06 2020-07-06 レーザ装置

Country Status (4)

Country Link
JP (1) JP7499627B2 (ko)
KR (1) KR20220005392A (ko)
CN (1) CN113904204B (ko)
TW (1) TWI834977B (ko)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004105200A1 (ja) 2003-05-20 2004-12-02 Mitsubishi Denki Kabushiki Kaisha レーザ発振器
JP2006295226A (ja) 2006-08-01 2006-10-26 Matsushita Electric Ind Co Ltd レーザ発振装置
US20070263692A1 (en) 2004-03-24 2007-11-15 Norbert Taufenbach Gas Slab Laser
WO2008136073A1 (ja) 2007-04-20 2008-11-13 Mitsubishi Electric Corporation レーザ発振器
JP2013048202A (ja) 2011-03-30 2013-03-07 Gigaphoton Inc レーザシステム
JP2013051381A (ja) 2011-08-31 2013-03-14 Nidek Co Ltd エキシマレーザ装置
JP2018073926A (ja) 2016-10-27 2018-05-10 ビアメカニクス株式会社 レーザ発振器
JP2019134122A (ja) 2018-02-02 2019-08-08 住友重機械工業株式会社 レーザ発振器
JP2020096139A (ja) 2018-12-14 2020-06-18 住友重機械工業株式会社 ガスレーザ装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02105478A (ja) 1988-10-14 1990-04-18 Toshiba Corp レーザ発振器
JPH07111351A (ja) * 1993-10-12 1995-04-25 Toshiba Corp レーザー発振器
JP3768455B2 (ja) * 2002-04-11 2006-04-19 三菱電機株式会社 直交励起型レーザ発振器
JP3665039B2 (ja) * 2002-04-24 2005-06-29 三菱電機株式会社 直交励起型レーザ発振器

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004105200A1 (ja) 2003-05-20 2004-12-02 Mitsubishi Denki Kabushiki Kaisha レーザ発振器
US20070263692A1 (en) 2004-03-24 2007-11-15 Norbert Taufenbach Gas Slab Laser
JP2006295226A (ja) 2006-08-01 2006-10-26 Matsushita Electric Ind Co Ltd レーザ発振装置
WO2008136073A1 (ja) 2007-04-20 2008-11-13 Mitsubishi Electric Corporation レーザ発振器
JP2013048202A (ja) 2011-03-30 2013-03-07 Gigaphoton Inc レーザシステム
JP2013051381A (ja) 2011-08-31 2013-03-14 Nidek Co Ltd エキシマレーザ装置
JP2018073926A (ja) 2016-10-27 2018-05-10 ビアメカニクス株式会社 レーザ発振器
JP2019134122A (ja) 2018-02-02 2019-08-08 住友重機械工業株式会社 レーザ発振器
JP2020096139A (ja) 2018-12-14 2020-06-18 住友重機械工業株式会社 ガスレーザ装置

Also Published As

Publication number Publication date
JP2022014176A (ja) 2022-01-19
TWI834977B (zh) 2024-03-11
CN113904204B (zh) 2024-05-28
CN113904204A (zh) 2022-01-07
TW202209772A (zh) 2022-03-01
KR20220005392A (ko) 2022-01-13

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