JP7481821B2 - 光学デバイス - Google Patents

光学デバイス Download PDF

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Publication number
JP7481821B2
JP7481821B2 JP2019178842A JP2019178842A JP7481821B2 JP 7481821 B2 JP7481821 B2 JP 7481821B2 JP 2019178842 A JP2019178842 A JP 2019178842A JP 2019178842 A JP2019178842 A JP 2019178842A JP 7481821 B2 JP7481821 B2 JP 7481821B2
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Japan
Prior art keywords
heating
unit
movable
movable part
optical device
Prior art date
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JP2019178842A
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English (en)
Japanese (ja)
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JP2021056368A (ja
JP2021056368A5 (https=
Inventor
進也 岩科
重幸 中村
直人 櫻井
勇樹 森永
大幾 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2019178842A priority Critical patent/JP7481821B2/ja
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to CN202080068254.0A priority patent/CN114450618B/zh
Priority to US17/763,285 priority patent/US20220342206A1/en
Priority to DE112020004669.9T priority patent/DE112020004669T5/de
Priority to PCT/JP2020/034183 priority patent/WO2021065399A1/ja
Priority to TW109132879A priority patent/TWI867052B/zh
Publication of JP2021056368A publication Critical patent/JP2021056368A/ja
Publication of JP2021056368A5 publication Critical patent/JP2021056368A5/ja
Application granted granted Critical
Publication of JP7481821B2 publication Critical patent/JP7481821B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems ; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2019178842A 2019-09-30 2019-09-30 光学デバイス Active JP7481821B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス
US17/763,285 US20220342206A1 (en) 2019-09-30 2020-09-09 Optical device
DE112020004669.9T DE112020004669T5 (de) 2019-09-30 2020-09-09 Optikvorrichtung
PCT/JP2020/034183 WO2021065399A1 (ja) 2019-09-30 2020-09-09 光学デバイス
CN202080068254.0A CN114450618B (zh) 2019-09-30 2020-09-09 光学装置
TW109132879A TWI867052B (zh) 2019-09-30 2020-09-23 光學裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス

Publications (3)

Publication Number Publication Date
JP2021056368A JP2021056368A (ja) 2021-04-08
JP2021056368A5 JP2021056368A5 (https=) 2022-10-05
JP7481821B2 true JP7481821B2 (ja) 2024-05-13

Family

ID=75270662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019178842A Active JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス

Country Status (6)

Country Link
US (1) US20220342206A1 (https=)
JP (1) JP7481821B2 (https=)
CN (1) CN114450618B (https=)
DE (1) DE112020004669T5 (https=)
TW (1) TWI867052B (https=)
WO (1) WO2021065399A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023132555A1 (de) * 2023-11-22 2025-05-22 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069731A (ja) 2002-08-01 2004-03-04 Ricoh Co Ltd 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
WO2019107312A1 (ja) 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI274184B (en) * 2002-10-16 2007-02-21 Nikon Corp Optical element, thin-film structural body, optical switch, and optical element manufacturing method
DE102008013098B4 (de) * 2007-04-02 2012-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches System mit Temperaturstabilisierung
US10551613B2 (en) * 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
EP2703872A4 (en) * 2011-04-26 2014-08-20 Toyota Motor Co Ltd MIRROR DEVICE
US9651775B2 (en) * 2012-12-20 2017-05-16 Intel Corporation MEMS device
JP2015036782A (ja) 2013-08-14 2015-02-23 レーザーテック株式会社 ミラー駆動装置、及び、ミラー駆動方法
JP6459392B2 (ja) * 2014-10-28 2019-01-30 ミツミ電機株式会社 光走査装置
JP6560897B2 (ja) * 2015-05-20 2019-08-14 スタンレー電気株式会社 圧電膜の積層体とその製造方法及び光スキャナ
JP2018081176A (ja) * 2016-11-15 2018-05-24 株式会社デンソー Ｍｅｍｓデバイス
JP7459580B2 (ja) * 2020-03-16 2024-04-02 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069731A (ja) 2002-08-01 2004-03-04 Ricoh Co Ltd 振動ミラー、振動ミラーの振れ角制御方法、光書込装置及び画像形成装置
WO2019107312A1 (ja) 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置

Also Published As

Publication number Publication date
US20220342206A1 (en) 2022-10-27
CN114450618A (zh) 2022-05-06
JP2021056368A (ja) 2021-04-08
WO2021065399A1 (ja) 2021-04-08
DE112020004669T5 (de) 2022-06-15
TW202127095A (zh) 2021-07-16
TWI867052B (zh) 2024-12-21
CN114450618B (zh) 2024-03-08

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