DE112020004669T5 - Optikvorrichtung - Google Patents

Optikvorrichtung Download PDF

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Publication number
DE112020004669T5
DE112020004669T5 DE112020004669.9T DE112020004669T DE112020004669T5 DE 112020004669 T5 DE112020004669 T5 DE 112020004669T5 DE 112020004669 T DE112020004669 T DE 112020004669T DE 112020004669 T5 DE112020004669 T5 DE 112020004669T5
Authority
DE
Germany
Prior art keywords
movable portion
heater
controller
heating
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112020004669.9T
Other languages
German (de)
English (en)
Inventor
Shinya IWASHINA
Shigeyuki Nakamura
Naoto Sakurai
Yuki MORINAGA
Daiki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE112020004669T5 publication Critical patent/DE112020004669T5/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems ; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE112020004669.9T 2019-09-30 2020-09-09 Optikvorrichtung Pending DE112020004669T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019178842A JP7481821B2 (ja) 2019-09-30 2019-09-30 光学デバイス
JP2019-178842 2019-09-30
PCT/JP2020/034183 WO2021065399A1 (ja) 2019-09-30 2020-09-09 光学デバイス

Publications (1)

Publication Number Publication Date
DE112020004669T5 true DE112020004669T5 (de) 2022-06-15

Family

ID=75270662

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112020004669.9T Pending DE112020004669T5 (de) 2019-09-30 2020-09-09 Optikvorrichtung

Country Status (6)

Country Link
US (1) US20220342206A1 (https=)
JP (1) JP7481821B2 (https=)
CN (1) CN114450618B (https=)
DE (1) DE112020004669T5 (https=)
TW (1) TWI867052B (https=)
WO (1) WO2021065399A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023132555A1 (de) * 2023-11-22 2025-05-22 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zur Herstellung eines mikroelektromechanischen Spiegels, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015036782A (ja) 2013-08-14 2015-02-23 レーザーテック株式会社 ミラー駆動装置、及び、ミラー駆動方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4172627B2 (ja) 2002-08-01 2008-10-29 株式会社リコー 振動ミラー、光書込装置及び画像形成装置
TWI274184B (en) * 2002-10-16 2007-02-21 Nikon Corp Optical element, thin-film structural body, optical switch, and optical element manufacturing method
DE102008013098B4 (de) * 2007-04-02 2012-02-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches System mit Temperaturstabilisierung
US10551613B2 (en) * 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
EP2703872A4 (en) * 2011-04-26 2014-08-20 Toyota Motor Co Ltd MIRROR DEVICE
US9651775B2 (en) * 2012-12-20 2017-05-16 Intel Corporation MEMS device
JP6459392B2 (ja) * 2014-10-28 2019-01-30 ミツミ電機株式会社 光走査装置
JP6560897B2 (ja) * 2015-05-20 2019-08-14 スタンレー電気株式会社 圧電膜の積層体とその製造方法及び光スキャナ
JP2018081176A (ja) * 2016-11-15 2018-05-24 株式会社デンソー Ｍｅｍｓデバイス
JP6585147B2 (ja) 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
JP7459580B2 (ja) * 2020-03-16 2024-04-02 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015036782A (ja) 2013-08-14 2015-02-23 レーザーテック株式会社 ミラー駆動装置、及び、ミラー駆動方法

Also Published As

Publication number Publication date
US20220342206A1 (en) 2022-10-27
CN114450618A (zh) 2022-05-06
JP2021056368A (ja) 2021-04-08
JP7481821B2 (ja) 2024-05-13
WO2021065399A1 (ja) 2021-04-08
TW202127095A (zh) 2021-07-16
TWI867052B (zh) 2024-12-21
CN114450618B (zh) 2024-03-08

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