DE69528157T2 - Zweitorige elektromagnetische anregung für eine doppelend-stimmgabel - Google Patents
Zweitorige elektromagnetische anregung für eine doppelend-stimmgabelInfo
- Publication number
- DE69528157T2 DE69528157T2 DE69528157T DE69528157T DE69528157T2 DE 69528157 T2 DE69528157 T2 DE 69528157T2 DE 69528157 T DE69528157 T DE 69528157T DE 69528157 T DE69528157 T DE 69528157T DE 69528157 T2 DE69528157 T2 DE 69528157T2
- Authority
- DE
- Germany
- Prior art keywords
- double
- tuning fork
- electromagnetic excitation
- door electromagnetic
- end tuning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08198228 US5501103B1 (en) | 1994-02-15 | 1994-02-15 | Two-port electromagnetic drive for a double-ended tuning fork |
PCT/US1995/002030 WO1995022062A1 (en) | 1994-02-15 | 1995-02-14 | Two-port electromagnetic drive for a double-ended tuning fork |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69528157D1 DE69528157D1 (de) | 2002-10-17 |
DE69528157T2 true DE69528157T2 (de) | 2003-04-17 |
Family
ID=22732521
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69528157T Expired - Lifetime DE69528157T2 (de) | 1994-02-15 | 1995-02-14 | Zweitorige elektromagnetische anregung für eine doppelend-stimmgabel |
DE0745224T Pending DE745224T1 (de) | 1994-02-15 | 1995-02-14 | Zweitorige elektromagnetische anregung für eine poppelend-stimmgabel |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE0745224T Pending DE745224T1 (de) | 1994-02-15 | 1995-02-14 | Zweitorige elektromagnetische anregung für eine poppelend-stimmgabel |
Country Status (5)
Country | Link |
---|---|
US (1) | US5501103B1 (de) |
EP (1) | EP0745224B1 (de) |
JP (1) | JPH09508973A (de) |
DE (2) | DE69528157T2 (de) |
WO (1) | WO1995022062A1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5739431A (en) * | 1996-06-13 | 1998-04-14 | Alliedsignal, Inc. | Miniature magnetometer-accelerometer |
US5962784A (en) * | 1997-05-27 | 1999-10-05 | Alliedsignal Inc. | Micromachined rate and acceleration sensor |
US6161440A (en) | 1997-08-14 | 2000-12-19 | Alliedsignal Inc. | Low metalization creep sensor |
US5948982A (en) * | 1998-02-23 | 1999-09-07 | Alliedsignal Inc. | Vibrating beam accelerometers and methods of forming vibrating beam accelerometers |
US6735854B1 (en) * | 1998-07-27 | 2004-05-18 | Honeywell International, Inc. | Method for forming an electro-mechanical device |
EP1596743B1 (de) * | 2003-02-20 | 2008-04-09 | Covidien AG | Bewegungsnachweisgerät zur kontrolle des elektrochirurgischen ausgangs |
DE10318069A1 (de) * | 2003-04-17 | 2004-11-11 | Endress + Hauser Gmbh + Co. Kg | Drucksensor nach dem Resonatorprinzip und Verfahren zu dessen Betrieb |
US6938334B2 (en) * | 2003-10-31 | 2005-09-06 | Honeywell International, Inc. | Vibrating beam accelerometer two-wafer fabrication process |
JP4779423B2 (ja) * | 2005-04-26 | 2011-09-28 | パナソニック株式会社 | 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ |
US7069790B1 (en) * | 2005-05-17 | 2006-07-04 | Honeywell International Inc. | Systems and methods for measuring relative thermal expansion coefficient of low thermal coefficient of expansion materials |
FR2887989B1 (fr) * | 2005-07-04 | 2007-09-07 | Sagem Defense Securite | Capteur inertiel a courant perturbateur reduit par branches de compensation |
US8689426B2 (en) | 2008-12-17 | 2014-04-08 | Sand 9, Inc. | Method of manufacturing a resonating structure |
FR2941533B1 (fr) * | 2009-01-23 | 2011-03-11 | Commissariat Energie Atomique | Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte. |
US8661899B2 (en) | 2010-03-01 | 2014-03-04 | Sand9, Inc. | Microelectromechanical gyroscopes and related apparatus and methods |
WO2011133682A1 (en) | 2010-04-20 | 2011-10-27 | Guiti Zolfagharkhani | Microelectromechanical gyroscopes and related apparatus and methods |
GB201009062D0 (en) * | 2010-05-28 | 2010-07-14 | Cambridge Entpr Ltd | MEMS inertial sensor and method of inertial sensing |
US9075077B2 (en) * | 2010-09-20 | 2015-07-07 | Analog Devices, Inc. | Resonant sensing using extensional modes of a plate |
JPWO2013089079A1 (ja) * | 2011-12-12 | 2015-04-27 | 株式会社村田製作所 | 加速度センサ |
US10429405B2 (en) * | 2012-02-03 | 2019-10-01 | Honeywell International Inc. | Vibrating beam accelerometer |
US10732195B2 (en) * | 2018-01-26 | 2020-08-04 | Honeywell International Inc. | Vibrating beam accelerometer |
US10859596B2 (en) | 2018-07-20 | 2020-12-08 | Honeywell International Inc. | Mechanically-isolated in-plane pendulous vibrating beam accelerometer |
US11119115B2 (en) | 2018-08-27 | 2021-09-14 | Honeywell International Inc. | Vibrating beam accelerometer |
US11119116B2 (en) | 2019-04-01 | 2021-09-14 | Honeywell International Inc. | Accelerometer for determining an acceleration based on modulated optical signals |
US11079227B2 (en) | 2019-04-01 | 2021-08-03 | Honeywell International Inc. | Accelerometer system enclosing gas |
US10705112B1 (en) | 2019-04-22 | 2020-07-07 | Honeywell International Inc. | Noise rejection for optomechanical devices |
US10956768B2 (en) | 2019-04-22 | 2021-03-23 | Honeywell International Inc. | Feedback cooling and detection for optomechanical devices |
US11119114B2 (en) | 2019-07-17 | 2021-09-14 | Honeywell International Inc. | Anchor structure for securing optomechanical structure |
US11408911B2 (en) | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
US11408912B2 (en) | 2019-08-13 | 2022-08-09 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
US11372019B2 (en) | 2019-08-13 | 2022-06-28 | Honeywell International Inc. | Optomechanical resonator stabilization for optomechanical devices |
US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
US11703521B2 (en) * | 2020-12-04 | 2023-07-18 | Honeywell International Inc. | MEMS vibrating beam accelerometer with built-in test actuators |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2845008A1 (de) * | 1978-10-16 | 1980-04-30 | Philips Patentverwaltung | Beschleunigungsaufnehmer |
US4535638A (en) * | 1983-10-03 | 1985-08-20 | Quartztronics, Inc. | Resonator transducer system with temperature compensation |
US4851080A (en) * | 1987-06-29 | 1989-07-25 | Massachusetts Institute Of Technology | Resonant accelerometer |
US4912990A (en) * | 1989-02-27 | 1990-04-03 | Sundstrand Data Control, Inc. | Magnetically driven vibrating beam force transducer |
US5113698A (en) * | 1990-02-26 | 1992-05-19 | Sundstrand Data Control, Inc. | Vibrating beam transducer drive system |
WO1991017416A1 (en) * | 1990-03-01 | 1991-11-14 | Panex Corporation | Non-quartz resonating transducer |
DE456029T1 (de) * | 1990-05-10 | 1992-06-11 | Yokogawa Electric Corp., Musashino, Tokio/Tokyo, Jp | Druckaufnehmer mit schwingendem element. |
US5233874A (en) * | 1991-08-19 | 1993-08-10 | General Motors Corporation | Active microaccelerometer |
GB9124575D0 (en) * | 1991-11-20 | 1992-01-08 | Gec Avery Technology | Vibrating beam sensor |
-
1994
- 1994-02-15 US US08198228 patent/US5501103B1/en not_active Expired - Lifetime
-
1995
- 1995-02-14 JP JP7521436A patent/JPH09508973A/ja active Pending
- 1995-02-14 DE DE69528157T patent/DE69528157T2/de not_active Expired - Lifetime
- 1995-02-14 WO PCT/US1995/002030 patent/WO1995022062A1/en active IP Right Grant
- 1995-02-14 DE DE0745224T patent/DE745224T1/de active Pending
- 1995-02-14 EP EP95911789A patent/EP0745224B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5501103A (en) | 1996-03-26 |
DE745224T1 (de) | 1997-10-09 |
JPH09508973A (ja) | 1997-09-09 |
DE69528157D1 (de) | 2002-10-17 |
EP0745224B1 (de) | 2002-09-11 |
WO1995022062A1 (en) | 1995-08-17 |
EP0745224A1 (de) | 1996-12-04 |
US5501103B1 (en) | 1998-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |