JP7472918B2 - 弾性波デバイスおよびそれを備えたラダー型フィルタ - Google Patents

弾性波デバイスおよびそれを備えたラダー型フィルタ Download PDF

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Publication number
JP7472918B2
JP7472918B2 JP2021574153A JP2021574153A JP7472918B2 JP 7472918 B2 JP7472918 B2 JP 7472918B2 JP 2021574153 A JP2021574153 A JP 2021574153A JP 2021574153 A JP2021574153 A JP 2021574153A JP 7472918 B2 JP7472918 B2 JP 7472918B2
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Prior art keywords
resonator
reflector
electrode
stopband
value
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Japanese (ja)
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JPWO2021153736A5 (https=
JPWO2021153736A1 (https=
Inventor
健太郎 中村
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56Monolithic crystal filters
    • H03H9/566Electric coupling means therefor
    • H03H9/568Electric coupling means therefor consisting of a ladder configuration
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02574Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02637Details concerning reflective or coupling arrays
    • H03H9/02685Grating lines having particular arrangements
    • H03H9/02771Reflector banks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02842Means for compensation or elimination of undesirable effects of reflections
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02992Details of bus bars, contact pads or other electrical connections for finger electrodes
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • H03H9/14541Multilayer finger or busbar electrode
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • H03H9/14547Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6483Ladder SAW filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2021574153A 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ Active JP7472918B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020015067 2020-01-31
JP2020015067 2020-01-31
PCT/JP2021/003252 WO2021153736A1 (ja) 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ

Publications (3)

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JPWO2021153736A1 JPWO2021153736A1 (https=) 2021-08-05
JPWO2021153736A5 JPWO2021153736A5 (https=) 2022-09-02
JP7472918B2 true JP7472918B2 (ja) 2024-04-23

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JP2021574153A Active JP7472918B2 (ja) 2020-01-31 2021-01-29 弾性波デバイスおよびそれを備えたラダー型フィルタ

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Country Link
US (1) US12255632B2 (https=)
JP (1) JP7472918B2 (https=)
KR (2) KR102787918B1 (https=)
CN (1) CN115004546A (https=)
WO (1) WO2021153736A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021132361A (ja) * 2020-02-21 2021-09-09 株式会社村田製作所 弾性波装置
CN113810014B (zh) * 2021-09-23 2025-08-22 武汉敏声新技术有限公司 叉指型体声波谐振器及滤波器
KR102906690B1 (ko) * 2022-01-13 2025-12-31 (주)와이솔 감쇠 특성이 개선된 표면 탄성파 필터
EP4459867A4 (en) * 2022-01-24 2025-08-06 Huawei Tech Co Ltd ACOUSTIC FILTER AND ELECTRONIC DEVICE
US12587167B2 (en) * 2023-02-02 2026-03-24 Skyworks Solutions, Inc. High quality factor saw resonators with shared reflector
US20240364305A1 (en) * 2023-04-06 2024-10-31 Skyworks Solutions, Inc. Acoustic wave device with interdigital transducer electrodes having two bus bars

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007060331A (ja) 2005-08-25 2007-03-08 Seiko Epson Corp Saw共振子
JP2009273120A (ja) 2008-04-11 2009-11-19 Nippon Dempa Kogyo Co Ltd デュプレクサ
JP2017153132A (ja) 2011-11-30 2017-08-31 スカイワークスフィルターソリューションズジャパン株式会社 ラダー型弾性波フィルタと、これを用いたアンテナ共用器
WO2018043496A1 (ja) 2016-08-30 2018-03-08 株式会社村田製作所 弾性波装置及びその製造方法
WO2019065666A1 (ja) 2017-09-27 2019-04-04 株式会社村田製作所 弾性波装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6397004A (ja) * 1986-10-13 1988-04-27 Pioneer Electronic Corp 表面弾性波共振子
JPH02250413A (ja) * 1989-03-23 1990-10-08 Murata Mfg Co Ltd 弾性表面波装置
JPH03283710A (ja) * 1990-03-30 1991-12-13 Toshiba Corp 弾性表面波共振子
JPH10303691A (ja) 1997-04-25 1998-11-13 Kyocera Corp 弾性表面波装置
JP2002176335A (ja) 2000-09-29 2002-06-21 Kyocera Corp 弾性表面波装置
JP6683256B2 (ja) * 2016-06-29 2020-04-15 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路及び通信装置
CN109845105B (zh) * 2016-10-13 2023-06-13 株式会社村田制作所 弹性波滤波器装置
WO2018079284A1 (ja) * 2016-10-28 2018-05-03 株式会社村田製作所 ラダー型フィルタ、デュプレクサ及び弾性波フィルタ装置
JP2021132361A (ja) * 2020-02-21 2021-09-09 株式会社村田製作所 弾性波装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007060331A (ja) 2005-08-25 2007-03-08 Seiko Epson Corp Saw共振子
JP2009273120A (ja) 2008-04-11 2009-11-19 Nippon Dempa Kogyo Co Ltd デュプレクサ
JP2017153132A (ja) 2011-11-30 2017-08-31 スカイワークスフィルターソリューションズジャパン株式会社 ラダー型弾性波フィルタと、これを用いたアンテナ共用器
WO2018043496A1 (ja) 2016-08-30 2018-03-08 株式会社村田製作所 弾性波装置及びその製造方法
WO2019065666A1 (ja) 2017-09-27 2019-04-04 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
KR102787918B1 (ko) 2025-03-31
WO2021153736A1 (ja) 2021-08-05
KR20250048595A (ko) 2025-04-09
US20220360252A1 (en) 2022-11-10
KR20220107021A (ko) 2022-08-01
US12255632B2 (en) 2025-03-18
JPWO2021153736A1 (https=) 2021-08-05
CN115004546A (zh) 2022-09-02

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