JP7467093B2 - 搬送システムおよび物品の製造方法 - Google Patents

搬送システムおよび物品の製造方法 Download PDF

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Publication number
JP7467093B2
JP7467093B2 JP2019221444A JP2019221444A JP7467093B2 JP 7467093 B2 JP7467093 B2 JP 7467093B2 JP 2019221444 A JP2019221444 A JP 2019221444A JP 2019221444 A JP2019221444 A JP 2019221444A JP 7467093 B2 JP7467093 B2 JP 7467093B2
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JP
Japan
Prior art keywords
mover
coils
coil group
coil
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019221444A
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English (en)
Japanese (ja)
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JP2021093781A5 (enExample
JP2021093781A (ja
Inventor
武 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2019221444A priority Critical patent/JP7467093B2/ja
Priority to US17/104,978 priority patent/US11843299B2/en
Priority to KR1020200167172A priority patent/KR102788789B1/ko
Priority to CN202011400657.9A priority patent/CN112928886B/zh
Publication of JP2021093781A publication Critical patent/JP2021093781A/ja
Publication of JP2021093781A5 publication Critical patent/JP2021093781A5/ja
Application granted granted Critical
Publication of JP7467093B2 publication Critical patent/JP7467093B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2019221444A 2019-12-06 2019-12-06 搬送システムおよび物品の製造方法 Active JP7467093B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019221444A JP7467093B2 (ja) 2019-12-06 2019-12-06 搬送システムおよび物品の製造方法
US17/104,978 US11843299B2 (en) 2019-12-06 2020-11-25 Conveyance system, movable element, control apparatus, control method, and method of manufacturing articles
KR1020200167172A KR102788789B1 (ko) 2019-12-06 2020-12-03 반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법
CN202011400657.9A CN112928886B (zh) 2019-12-06 2020-12-04 输送系统、可移动元件、控制装置、控制方法以及物品的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019221444A JP7467093B2 (ja) 2019-12-06 2019-12-06 搬送システムおよび物品の製造方法

Publications (3)

Publication Number Publication Date
JP2021093781A JP2021093781A (ja) 2021-06-17
JP2021093781A5 JP2021093781A5 (enExample) 2022-12-07
JP7467093B2 true JP7467093B2 (ja) 2024-04-15

Family

ID=76162652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019221444A Active JP7467093B2 (ja) 2019-12-06 2019-12-06 搬送システムおよび物品の製造方法

Country Status (4)

Country Link
US (1) US11843299B2 (enExample)
JP (1) JP7467093B2 (enExample)
KR (1) KR102788789B1 (enExample)
CN (1) CN112928886B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022264287A1 (ja) * 2021-06-15 2022-12-22 株式会社日立ハイテク ステージ装置、荷電粒子線装置および真空装置
JP7786807B2 (ja) * 2021-08-31 2025-12-16 キヤノン株式会社 搬送装置、加工システム、制御方法及び物品の製造方法
JP2023087446A (ja) * 2021-12-13 2023-06-23 キヤノン株式会社 搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343105A (ja) 2003-05-01 2004-12-02 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
CN105119463A (zh) 2015-07-22 2015-12-02 北京顿一科技有限公司 新型有铁芯直线电机、电机伺服系统及铁芯的制备方法
US20180212505A1 (en) 2015-07-06 2018-07-26 Guangdong Jixun Precision Equipment Co., Ltd. Displacement device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2879934B2 (ja) * 1990-04-27 1999-04-05 住友重機械工業株式会社 ステージ装置
US6208045B1 (en) * 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
JP4590846B2 (ja) 2003-09-01 2010-12-01 株式会社ニコン 磁気浮上式ステージ装置及び露光装置
JP4566697B2 (ja) * 2004-11-08 2010-10-20 キヤノン株式会社 位置決め装置およびそれを用いた露光装置、デバイス製造方法
KR100726711B1 (ko) * 2005-12-30 2007-06-12 한국전기연구원 자기부상방식의 대면적 스테이지 장치
KR20120019298A (ko) * 2010-08-25 2012-03-06 주식회사 져스텍 리니어 모터를 이용하는 반송 장치 및 그 반송 장치의 제어 방법.
KR20140084238A (ko) * 2011-10-27 2014-07-04 더 유니버시티 오브 브리티쉬 콜롬비아 변위 장치 및 변위 장치의 제조, 사용 그리고 제어를 위한 방법
JP7066333B2 (ja) * 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343105A (ja) 2003-05-01 2004-12-02 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
US20180212505A1 (en) 2015-07-06 2018-07-26 Guangdong Jixun Precision Equipment Co., Ltd. Displacement device
CN105119463A (zh) 2015-07-22 2015-12-02 北京顿一科技有限公司 新型有铁芯直线电机、电机伺服系统及铁芯的制备方法

Also Published As

Publication number Publication date
KR20210071844A (ko) 2021-06-16
CN112928886A (zh) 2021-06-08
US11843299B2 (en) 2023-12-12
US20210175787A1 (en) 2021-06-10
KR102788789B1 (ko) 2025-03-31
CN112928886B (zh) 2024-08-09
JP2021093781A (ja) 2021-06-17

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