CN112928886B - 输送系统、可移动元件、控制装置、控制方法以及物品的制造方法 - Google Patents

输送系统、可移动元件、控制装置、控制方法以及物品的制造方法 Download PDF

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Publication number
CN112928886B
CN112928886B CN202011400657.9A CN202011400657A CN112928886B CN 112928886 B CN112928886 B CN 112928886B CN 202011400657 A CN202011400657 A CN 202011400657A CN 112928886 B CN112928886 B CN 112928886B
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CN
China
Prior art keywords
movable element
coils
coil group
coil
magnetic bodies
Prior art date
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CN202011400657.9A
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English (en)
Chinese (zh)
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CN112928886A (zh
Inventor
山本武
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN112928886A publication Critical patent/CN112928886A/zh
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Publication of CN112928886B publication Critical patent/CN112928886B/zh
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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
CN202011400657.9A 2019-12-06 2020-12-04 输送系统、可移动元件、控制装置、控制方法以及物品的制造方法 Active CN112928886B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019221444A JP7467093B2 (ja) 2019-12-06 2019-12-06 搬送システムおよび物品の製造方法
JP2019-221444 2019-12-06

Publications (2)

Publication Number Publication Date
CN112928886A CN112928886A (zh) 2021-06-08
CN112928886B true CN112928886B (zh) 2024-08-09

Family

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CN202011400657.9A Active CN112928886B (zh) 2019-12-06 2020-12-04 输送系统、可移动元件、控制装置、控制方法以及物品的制造方法

Country Status (4)

Country Link
US (1) US11843299B2 (enExample)
JP (1) JP7467093B2 (enExample)
KR (1) KR102788789B1 (enExample)
CN (1) CN112928886B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022264287A1 (ja) * 2021-06-15 2022-12-22 株式会社日立ハイテク ステージ装置、荷電粒子線装置および真空装置
JP7786807B2 (ja) * 2021-08-31 2025-12-16 キヤノン株式会社 搬送装置、加工システム、制御方法及び物品の製造方法
JP2023087446A (ja) * 2021-12-13 2023-06-23 キヤノン株式会社 搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0412657A (ja) * 1990-04-27 1992-01-17 Sumitomo Heavy Ind Ltd ステージ装置
JP2004343105A (ja) * 2003-05-01 2004-12-02 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
CN105119463A (zh) * 2015-07-22 2015-12-02 北京顿一科技有限公司 新型有铁芯直线电机、电机伺服系统及铁芯的制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6208045B1 (en) * 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
JP4590846B2 (ja) 2003-09-01 2010-12-01 株式会社ニコン 磁気浮上式ステージ装置及び露光装置
JP4566697B2 (ja) * 2004-11-08 2010-10-20 キヤノン株式会社 位置決め装置およびそれを用いた露光装置、デバイス製造方法
KR100726711B1 (ko) * 2005-12-30 2007-06-12 한국전기연구원 자기부상방식의 대면적 스테이지 장치
KR20120019298A (ko) * 2010-08-25 2012-03-06 주식회사 져스텍 리니어 모터를 이용하는 반송 장치 및 그 반송 장치의 제어 방법.
KR20140084238A (ko) * 2011-10-27 2014-07-04 더 유니버시티 오브 브리티쉬 콜롬비아 변위 장치 및 변위 장치의 제조, 사용 그리고 제어를 위한 방법
NL2015092B1 (en) 2015-07-06 2017-01-30 Ding Chenyang Displacement device.
JP7066333B2 (ja) * 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0412657A (ja) * 1990-04-27 1992-01-17 Sumitomo Heavy Ind Ltd ステージ装置
JP2004343105A (ja) * 2003-05-01 2004-12-02 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
CN105119463A (zh) * 2015-07-22 2015-12-02 北京顿一科技有限公司 新型有铁芯直线电机、电机伺服系统及铁芯的制备方法

Also Published As

Publication number Publication date
KR20210071844A (ko) 2021-06-16
CN112928886A (zh) 2021-06-08
JP7467093B2 (ja) 2024-04-15
US11843299B2 (en) 2023-12-12
US20210175787A1 (en) 2021-06-10
KR102788789B1 (ko) 2025-03-31
JP2021093781A (ja) 2021-06-17

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