JP7451227B2 - 光透過性積層体の検査方法 - Google Patents

光透過性積層体の検査方法 Download PDF

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Publication number
JP7451227B2
JP7451227B2 JP2020032701A JP2020032701A JP7451227B2 JP 7451227 B2 JP7451227 B2 JP 7451227B2 JP 2020032701 A JP2020032701 A JP 2020032701A JP 2020032701 A JP2020032701 A JP 2020032701A JP 7451227 B2 JP7451227 B2 JP 7451227B2
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Japan
Prior art keywords
light
transmitting laminate
defect
transmitting
laminate
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English (en)
Japanese (ja)
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JP2021135219A5 (enExample
JP2021135219A (ja
Inventor
卓哉 田中
政和 望月
隆博 小西
章典 伊▲崎▼
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Nitto Denko Corp
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Nitto Denko Corp
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Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2020032701A priority Critical patent/JP7451227B2/ja
Priority to CN202510938146.9A priority patent/CN120761413A/zh
Priority to CN202180016062.XA priority patent/CN115135996A/zh
Priority to PCT/JP2021/005643 priority patent/WO2021172089A1/ja
Priority to CN202510938016.5A priority patent/CN120761411A/zh
Priority to KR1020227026090A priority patent/KR20220145816A/ko
Priority to CN202510938075.2A priority patent/CN120761412A/zh
Priority to TW114104353A priority patent/TW202519849A/zh
Priority to TW110106532A priority patent/TW202141029A/zh
Priority to TW114104350A priority patent/TW202521974A/zh
Priority to TW114104352A priority patent/TW202521975A/zh
Publication of JP2021135219A publication Critical patent/JP2021135219A/ja
Priority to JP2023020634A priority patent/JP7498815B2/ja
Publication of JP2021135219A5 publication Critical patent/JP2021135219A5/ja
Application granted granted Critical
Publication of JP7451227B2 publication Critical patent/JP7451227B2/ja
Priority to JP2024071634A priority patent/JP2024083647A/ja
Priority to JP2024102530A priority patent/JP7766141B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/023—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Laminated Bodies (AREA)
JP2020032701A 2020-02-28 2020-02-28 光透過性積層体の検査方法 Active JP7451227B2 (ja)

Priority Applications (14)

Application Number Priority Date Filing Date Title
JP2020032701A JP7451227B2 (ja) 2020-02-28 2020-02-28 光透過性積層体の検査方法
CN202180016062.XA CN115135996A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
PCT/JP2021/005643 WO2021172089A1 (ja) 2020-02-28 2021-02-16 光透過性積層体の検査方法
CN202510938016.5A CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
KR1020227026090A KR20220145816A (ko) 2020-02-28 2021-02-16 광투과성 적층체의 검사 방법
CN202510938075.2A CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
TW110106532A TW202141029A (zh) 2020-02-28 2021-02-24 光透射性積層體之檢查方法
TW114104353A TW202519849A (zh) 2020-02-28 2021-02-24 光透射性積層體之製造方法
TW114104350A TW202521974A (zh) 2020-02-28 2021-02-24 光透射性積層體
TW114104352A TW202521975A (zh) 2020-02-28 2021-02-24 光透射性積層體
JP2023020634A JP7498815B2 (ja) 2020-02-28 2023-02-14 光透過性積層体
JP2024071634A JP2024083647A (ja) 2020-02-28 2024-04-25 光透過性積層体
JP2024102530A JP7766141B2 (ja) 2020-02-28 2024-06-26 光透過性積層体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020032701A JP7451227B2 (ja) 2020-02-28 2020-02-28 光透過性積層体の検査方法

Related Child Applications (1)

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JP2023020634A Division JP7498815B2 (ja) 2020-02-28 2023-02-14 光透過性積層体

Publications (3)

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JP2021135219A JP2021135219A (ja) 2021-09-13
JP2021135219A5 JP2021135219A5 (enExample) 2023-02-24
JP7451227B2 true JP7451227B2 (ja) 2024-03-18

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Application Number Title Priority Date Filing Date
JP2020032701A Active JP7451227B2 (ja) 2020-02-28 2020-02-28 光透過性積層体の検査方法
JP2023020634A Active JP7498815B2 (ja) 2020-02-28 2023-02-14 光透過性積層体
JP2024071634A Pending JP2024083647A (ja) 2020-02-28 2024-04-25 光透過性積層体
JP2024102530A Active JP7766141B2 (ja) 2020-02-28 2024-06-26 光透過性積層体の製造方法

Family Applications After (3)

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JP2023020634A Active JP7498815B2 (ja) 2020-02-28 2023-02-14 光透過性積層体
JP2024071634A Pending JP2024083647A (ja) 2020-02-28 2024-04-25 光透過性積層体
JP2024102530A Active JP7766141B2 (ja) 2020-02-28 2024-06-26 光透過性積層体の製造方法

Country Status (5)

Country Link
JP (4) JP7451227B2 (enExample)
KR (1) KR20220145816A (enExample)
CN (4) CN115135996A (enExample)
TW (4) TW202521974A (enExample)
WO (1) WO2021172089A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7451227B2 (ja) * 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法
KR20240045215A (ko) * 2021-08-17 2024-04-05 닛토덴코 가부시키가이샤 광투과성 적층체의 검사 방법
JP7723528B2 (ja) 2021-08-20 2025-08-14 株式会社シマノ 充電装置および充電システム
JP2023105601A (ja) 2022-01-19 2023-07-31 日東電工株式会社 表面保護フィルムおよび表面保護フィルム付光学部材
JP7288989B1 (ja) 2022-01-31 2023-06-08 日東電工株式会社 長尺光学フィルムの検査方法
JP7472927B2 (ja) * 2022-03-17 2024-04-23 味の素株式会社 樹脂シート及びその製造方法、並びに欠点検出方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264259A (ja) 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2002506526A (ja) 1997-06-23 2002-02-26 ネーデルランドセ・オルガニザテイエ・フール・テゲパスト−ナトウールベテンシヤツペリーク・オンデルツエク・テイエヌオー 欠陥に関して品物を検査するための方法および装置
JP2005134573A (ja) 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
WO2009025210A1 (ja) 2007-08-23 2009-02-26 Nitto Denko Corporation 積層フィルムの欠陥検査方法およびその装置
JP2012002676A (ja) 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2017166903A (ja) 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法
JP2018509752A (ja) 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査
CN109856049A (zh) 2018-12-14 2019-06-07 杭州元色科技有限公司 透明板材瑕疵检测全内反射光导入装置及载片方法

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* Cited by examiner, † Cited by third party
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JP2001228091A (ja) * 2000-02-14 2001-08-24 Kobe Steel Ltd 欠陥検査方法及びその装置
JP2002303714A (ja) * 2001-04-03 2002-10-18 Toppan Printing Co Ltd カラーフィルタの製造方法
JP2003139713A (ja) * 2001-10-30 2003-05-14 Tomoegawa Paper Co Ltd シート材料
JP3974400B2 (ja) * 2002-01-07 2007-09-12 日東電工株式会社 シート状成形体の検査結果記録方法及び検査結果記録システム及びロール状成形体
JP2004054092A (ja) * 2002-07-23 2004-02-19 Elpida Memory Inc マスクおよびその製造方法
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置
JP2009069142A (ja) * 2007-08-23 2009-04-02 Nitto Denko Corp 積層フィルムの欠陥検査方法およびその装置
WO2009128115A1 (ja) * 2008-04-15 2009-10-22 日東電工株式会社 光学フィルム積層体ロールならびにその製造方法および装置
JP2013231662A (ja) * 2012-04-27 2013-11-14 Mitsubishi Chemicals Corp 積層体の検査方法、積層体の製造方法、及び積層体の検査装置
JP6437329B2 (ja) * 2015-02-03 2018-12-12 住友化学株式会社 光学フィルムの欠陥検査方法
JP6807637B2 (ja) * 2015-09-30 2021-01-06 日東電工株式会社 偏光子の検査方法および偏光板の製造方法
WO2017098970A1 (ja) * 2015-12-10 2017-06-15 日東電工株式会社 円偏光板およびそれを用いたフレキシブルな画像表示装置
JP2019215371A (ja) * 2019-08-26 2019-12-19 住友化学株式会社 光学フィルム及び積層光学フィルムの欠陥検査方法
JP7451227B2 (ja) 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002506526A (ja) 1997-06-23 2002-02-26 ネーデルランドセ・オルガニザテイエ・フール・テゲパスト−ナトウールベテンシヤツペリーク・オンデルツエク・テイエヌオー 欠陥に関して品物を検査するための方法および装置
JP2001264259A (ja) 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2005134573A (ja) 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
WO2009025210A1 (ja) 2007-08-23 2009-02-26 Nitto Denko Corporation 積層フィルムの欠陥検査方法およびその装置
JP2012002676A (ja) 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2018509752A (ja) 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査
JP2017166903A (ja) 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法
CN109856049A (zh) 2018-12-14 2019-06-07 杭州元色科技有限公司 透明板材瑕疵检测全内反射光导入装置及载片方法

Also Published As

Publication number Publication date
TW202141029A (zh) 2021-11-01
JP2024083647A (ja) 2024-06-21
WO2021172089A1 (ja) 2021-09-02
TW202521975A (zh) 2025-06-01
JP7766141B2 (ja) 2025-11-07
JP2024111327A (ja) 2024-08-16
CN120761413A (zh) 2025-10-10
JP7498815B2 (ja) 2024-06-12
CN115135996A (zh) 2022-09-30
TW202521974A (zh) 2025-06-01
JP2023053294A (ja) 2023-04-12
CN120761411A (zh) 2025-10-10
KR20220145816A (ko) 2022-10-31
JP2021135219A (ja) 2021-09-13
CN120761412A (zh) 2025-10-10
TW202519849A (zh) 2025-05-16

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