CN115135996A - 光透射性积层体的检查方法 - Google Patents

光透射性积层体的检查方法 Download PDF

Info

Publication number
CN115135996A
CN115135996A CN202180016062.XA CN202180016062A CN115135996A CN 115135996 A CN115135996 A CN 115135996A CN 202180016062 A CN202180016062 A CN 202180016062A CN 115135996 A CN115135996 A CN 115135996A
Authority
CN
China
Prior art keywords
light
transmitting
laminate
defect
laminated body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180016062.XA
Other languages
English (en)
Chinese (zh)
Inventor
田中卓哉
望月政和
小西隆博
伊崎章典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to CN202510938075.2A priority Critical patent/CN120761412A/zh
Priority to CN202510938146.9A priority patent/CN120761413A/zh
Priority to CN202510938016.5A priority patent/CN120761411A/zh
Publication of CN115135996A publication Critical patent/CN115135996A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/023—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Laminated Bodies (AREA)
CN202180016062.XA 2020-02-28 2021-02-16 光透射性积层体的检查方法 Pending CN115135996A (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202510938075.2A CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938016.5A CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020032701A JP7451227B2 (ja) 2020-02-28 2020-02-28 光透過性積層体の検査方法
JP2020-032701 2020-02-28
PCT/JP2021/005643 WO2021172089A1 (ja) 2020-02-28 2021-02-16 光透過性積層体の検査方法

Related Child Applications (3)

Application Number Title Priority Date Filing Date
CN202510938016.5A Division CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A Division CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938075.2A Division CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Publications (1)

Publication Number Publication Date
CN115135996A true CN115135996A (zh) 2022-09-30

Family

ID=77491087

Family Applications (4)

Application Number Title Priority Date Filing Date
CN202180016062.XA Pending CN115135996A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938075.2A Pending CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938016.5A Pending CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A Pending CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN202510938075.2A Pending CN120761412A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938016.5A Pending CN120761411A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法
CN202510938146.9A Pending CN120761413A (zh) 2020-02-28 2021-02-16 光透射性积层体的检查方法

Country Status (5)

Country Link
JP (4) JP7451227B2 (enExample)
KR (1) KR20220145816A (enExample)
CN (4) CN115135996A (enExample)
TW (4) TW202521974A (enExample)
WO (1) WO2021172089A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7451227B2 (ja) * 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法
KR20240045215A (ko) * 2021-08-17 2024-04-05 닛토덴코 가부시키가이샤 광투과성 적층체의 검사 방법
JP7723528B2 (ja) 2021-08-20 2025-08-14 株式会社シマノ 充電装置および充電システム
JP2023105601A (ja) 2022-01-19 2023-07-31 日東電工株式会社 表面保護フィルムおよび表面保護フィルム付光学部材
JP7288989B1 (ja) 2022-01-31 2023-06-08 日東電工株式会社 長尺光学フィルムの検査方法
JP7472927B2 (ja) * 2022-03-17 2024-04-23 味の素株式会社 樹脂シート及びその製造方法、並びに欠点検出方法

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264259A (ja) * 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2002506526A (ja) * 1997-06-23 2002-02-26 ネーデルランドセ・オルガニザテイエ・フール・テゲパスト−ナトウールベテンシヤツペリーク・オンデルツエク・テイエヌオー 欠陥に関して品物を検査するための方法および装置
JP2002303714A (ja) * 2001-04-03 2002-10-18 Toppan Printing Co Ltd カラーフィルタの製造方法
JP2003202298A (ja) * 2002-01-07 2003-07-18 Nitto Denko Corp シート状成形体の検査結果記録方法及び検査結果記録システム及びロール状成形体及び枚葉物
JP2004054092A (ja) * 2002-07-23 2004-02-19 Elpida Memory Inc マスクおよびその製造方法
TW577981B (en) * 2000-02-14 2004-03-01 Dainippon Screen Mfg Method and apparatus for inspecting flaw
JP2005134573A (ja) * 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
CN101548177A (zh) * 2007-08-23 2009-09-30 日东电工株式会社 层叠膜的缺陷检查方法及其装置
CN101925846A (zh) * 2008-04-15 2010-12-22 日东电工株式会社 光学薄膜层积体卷筒及其制造方法与系统
JP2013231662A (ja) * 2012-04-27 2013-11-14 Mitsubishi Chemicals Corp 積層体の検査方法、積層体の製造方法、及び積層体の検査装置
TW201632869A (zh) * 2015-02-03 2016-09-16 Sumitomo Chemical Co 光學薄膜的缺陷檢查方法、光學薄膜的缺陷檢查裝置、光學薄膜的製造方法、及光學薄膜的製造裝置
WO2017098970A1 (ja) * 2015-12-10 2017-06-15 日東電工株式会社 円偏光板およびそれを用いたフレキシブルな画像表示装置
JP2017166903A (ja) * 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法
JP2018509752A (ja) * 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003139713A (ja) * 2001-10-30 2003-05-14 Tomoegawa Paper Co Ltd シート材料
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置
WO2009025210A1 (ja) * 2007-08-23 2009-02-26 Nitto Denko Corporation 積層フィルムの欠陥検査方法およびその装置
JP2012002676A (ja) * 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP6807637B2 (ja) * 2015-09-30 2021-01-06 日東電工株式会社 偏光子の検査方法および偏光板の製造方法
CN109856049A (zh) * 2018-12-14 2019-06-07 杭州元色科技有限公司 透明板材瑕疵检测全内反射光导入装置及载片方法
JP2019215371A (ja) * 2019-08-26 2019-12-19 住友化学株式会社 光学フィルム及び積層光学フィルムの欠陥検査方法
JP7451227B2 (ja) 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002506526A (ja) * 1997-06-23 2002-02-26 ネーデルランドセ・オルガニザテイエ・フール・テゲパスト−ナトウールベテンシヤツペリーク・オンデルツエク・テイエヌオー 欠陥に関して品物を検査するための方法および装置
TW577981B (en) * 2000-02-14 2004-03-01 Dainippon Screen Mfg Method and apparatus for inspecting flaw
JP2001264259A (ja) * 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP2002303714A (ja) * 2001-04-03 2002-10-18 Toppan Printing Co Ltd カラーフィルタの製造方法
JP2003202298A (ja) * 2002-01-07 2003-07-18 Nitto Denko Corp シート状成形体の検査結果記録方法及び検査結果記録システム及びロール状成形体及び枚葉物
JP2004054092A (ja) * 2002-07-23 2004-02-19 Elpida Memory Inc マスクおよびその製造方法
JP2005134573A (ja) * 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
CN101548177A (zh) * 2007-08-23 2009-09-30 日东电工株式会社 层叠膜的缺陷检查方法及其装置
CN101925846A (zh) * 2008-04-15 2010-12-22 日东电工株式会社 光学薄膜层积体卷筒及其制造方法与系统
JP2013231662A (ja) * 2012-04-27 2013-11-14 Mitsubishi Chemicals Corp 積層体の検査方法、積層体の製造方法、及び積層体の検査装置
JP2018509752A (ja) * 2015-01-21 2018-04-05 ケーエルエー−テンカー コーポレイション 焦点体積方法を用いたウェーハ検査
TW201632869A (zh) * 2015-02-03 2016-09-16 Sumitomo Chemical Co 光學薄膜的缺陷檢查方法、光學薄膜的缺陷檢查裝置、光學薄膜的製造方法、及光學薄膜的製造裝置
WO2017098970A1 (ja) * 2015-12-10 2017-06-15 日東電工株式会社 円偏光板およびそれを用いたフレキシブルな画像表示装置
JP2017166903A (ja) * 2016-03-15 2017-09-21 株式会社大真空 欠陥検査装置及び欠陥検査方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JAEYUL LEE;MUHAMMAD FAIZAN SHIRAZI;KIBEOM PARK;MANSIK JEON;JEEHYUN KIM: "Defect inspection of actuator lenses using swept-source optical coherence tomography", OPTICAL REVIEW, vol. 25, no. 3, 31 December 2018 (2018-12-31) *
陈方涵;赵光宇;蒋仕龙;: "基于机器视觉系统的半透明薄膜缺陷检测及厚度测量研究", 光电子・激光, no. 07, 15 July 2018 (2018-07-15) *

Also Published As

Publication number Publication date
TW202141029A (zh) 2021-11-01
JP7451227B2 (ja) 2024-03-18
JP2024083647A (ja) 2024-06-21
WO2021172089A1 (ja) 2021-09-02
TW202521975A (zh) 2025-06-01
JP7766141B2 (ja) 2025-11-07
JP2024111327A (ja) 2024-08-16
CN120761413A (zh) 2025-10-10
JP7498815B2 (ja) 2024-06-12
TW202521974A (zh) 2025-06-01
JP2023053294A (ja) 2023-04-12
CN120761411A (zh) 2025-10-10
KR20220145816A (ko) 2022-10-31
JP2021135219A (ja) 2021-09-13
CN120761412A (zh) 2025-10-10
TW202519849A (zh) 2025-05-16

Similar Documents

Publication Publication Date Title
CN115135996A (zh) 光透射性积层体的检查方法
US10204947B2 (en) Cover-glass-free array camera with individually light-shielded cameras
CN106133898A (zh) 用于对象检验的可变图像场曲率
JP2019053057A (ja) 欠陥検査装置、欠陥検査方法、円偏光板又は楕円偏光板の製造方法及び位相差板の製造方法
JP2014119255A (ja) 光学フィルムの検査装置および光学フィルムの検査方法
JP2021135219A5 (enExample)
CN107850761A (zh) 亚微米晶片对准
CN107850759B (zh) 亚微米晶片对准
TWI718132B (zh) 層積光學薄膜的缺陷檢查方法，光學薄膜的缺陷檢查方法及層積光學薄膜的製造方法
US9595094B2 (en) Measuring form changes of a substrate
JP2025019281A (ja) 光透過性積層体の検査方法および検査装置
KR20240144891A (ko) 장척 광학 필름의 검사 방법
WO2023021854A1 (ja) 光透過性積層体の検査方法
JP6415948B2 (ja) 形状等測定装置
CN119310084A (zh) 超细缺陷自动检测模块及方法和不良自动检查系统及方法
JP7531233B2 (ja) カラー光学検査装置及びこれを含むシステム
JP7460359B2 (ja) 測定方法、管理方法及び光学部品の製造方法
JP2009210300A (ja) 観察方法及び観察装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination