JP7412925B2 - 光学装置、および、物品の製造方法 - Google Patents

光学装置、および、物品の製造方法 Download PDF

Info

Publication number
JP7412925B2
JP7412925B2 JP2019154010A JP2019154010A JP7412925B2 JP 7412925 B2 JP7412925 B2 JP 7412925B2 JP 2019154010 A JP2019154010 A JP 2019154010A JP 2019154010 A JP2019154010 A JP 2019154010A JP 7412925 B2 JP7412925 B2 JP 7412925B2
Authority
JP
Japan
Prior art keywords
optical system
galvano
amount
optical device
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019154010A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021030273A5 (enExample
JP2021030273A (ja
Inventor
晋宏 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2019154010A priority Critical patent/JP7412925B2/ja
Priority to US16/985,686 priority patent/US11878367B2/en
Priority to EP20189587.7A priority patent/EP3786684A1/en
Priority to CN202010847078.2A priority patent/CN112496527B/zh
Publication of JP2021030273A publication Critical patent/JP2021030273A/ja
Publication of JP2021030273A5 publication Critical patent/JP2021030273A5/ja
Application granted granted Critical
Publication of JP7412925B2 publication Critical patent/JP7412925B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2019154010A 2019-08-26 2019-08-26 光学装置、および、物品の製造方法 Active JP7412925B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019154010A JP7412925B2 (ja) 2019-08-26 2019-08-26 光学装置、および、物品の製造方法
US16/985,686 US11878367B2 (en) 2019-08-26 2020-08-05 Optical device and article manufacturing method
EP20189587.7A EP3786684A1 (en) 2019-08-26 2020-08-05 Optical device and article manufacturing method
CN202010847078.2A CN112496527B (zh) 2019-08-26 2020-08-21 光学设备以及物品制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019154010A JP7412925B2 (ja) 2019-08-26 2019-08-26 光学装置、および、物品の製造方法

Publications (3)

Publication Number Publication Date
JP2021030273A JP2021030273A (ja) 2021-03-01
JP2021030273A5 JP2021030273A5 (enExample) 2022-08-30
JP7412925B2 true JP7412925B2 (ja) 2024-01-15

Family

ID=71950496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019154010A Active JP7412925B2 (ja) 2019-08-26 2019-08-26 光学装置、および、物品の製造方法

Country Status (4)

Country Link
US (1) US11878367B2 (enExample)
EP (1) EP3786684A1 (enExample)
JP (1) JP7412925B2 (enExample)
CN (1) CN112496527B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12420355B2 (en) 2016-11-25 2025-09-23 Glowforge Inc. Laser fabrication with beam detection
WO2018098398A1 (en) * 2016-11-25 2018-05-31 Glowforge Inc. Preset optical components in a computer numerically controlled machine
JP2023027451A (ja) * 2021-08-17 2023-03-02 キヤノン株式会社 光学装置、加工方法、および、物品の製造方法
JP2023067484A (ja) * 2021-11-01 2023-05-16 キヤノン株式会社 光軸検出装置、光軸補正装置、加工装置、および、物品の製造方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339266A (ja) 2005-05-31 2006-12-14 Hitachi Via Mechanics Ltd レーザ加工方法
JP2008032524A (ja) 2006-07-28 2008-02-14 National Institute Of Advanced Industrial & Technology レーザ加工装置および計測用レーザ光の焦点検出方法
WO2013038606A1 (ja) 2011-09-15 2013-03-21 パナソニック株式会社 レーザ加工装置およびレーザ加工方法
JP2014117722A (ja) 2012-12-14 2014-06-30 Kataoka Seisakusho:Kk レーザ加工機
JP2014133242A (ja) 2013-01-09 2014-07-24 Lps Works Co Ltd レーザ加工方法及びレーザ加工装置
WO2015067411A1 (de) 2013-11-11 2015-05-14 Robert Bosch Gmbh Vorrichtung und verfahren zur führung eines laserstrahls
JP2015116591A (ja) 2013-12-18 2015-06-25 三菱重工業株式会社 レーザ加工装置及びレーザ加工方法
US20170120378A1 (en) 2014-11-25 2017-05-04 T.Friends Co., Ltd. Apparatus for processing micro-component by using laser
US20180134604A1 (en) 2015-07-15 2018-05-17 Schott Ag Method and device for separation of glass portions or glass ceramic portions

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2785852B2 (ja) * 1991-06-24 1998-08-13 日本電気株式会社 ビームポジショナ
JPH08286135A (ja) 1995-04-11 1996-11-01 Fuji Xerox Co Ltd 光走査装置
WO2000053365A1 (en) * 1999-03-05 2000-09-14 Mitsubishi Denki Kabushiki Kaisha Laser machining apparatus
AU2002351635A1 (en) 2001-12-31 2003-07-30 Brasscorp Limited Led inspection lamp and led spot light
EP1716963B1 (de) 2005-04-26 2008-10-22 Highyag Lasertechnologie GmbH Optische Anordnung für die Remote-Laser-Materialbearbeitung zur Erzeugung eines dreidimensionalen Arbeitsraumes
JP2006329266A (ja) * 2005-05-24 2006-12-07 Nissan Motor Co Ltd ショックアブソーバ
JP2012189659A (ja) 2011-03-09 2012-10-04 Nikon Corp 焦点維持装置及び顕微鏡装置
JP6057583B2 (ja) 2012-07-20 2017-01-11 オリンパス株式会社 光走査装置および走査型検査装置
JP6249225B2 (ja) * 2014-03-13 2017-12-20 パナソニックＩｐマネジメント株式会社 レーザ加工装置及びレーザ加工方法
JP2016002585A (ja) * 2014-06-19 2016-01-12 株式会社ディスコ レーザー加工装置
CN104162741B (zh) * 2014-07-31 2016-06-01 北京万恒镭特机电设备有限公司 激光加工装置及其方法
JP6595879B2 (ja) 2014-11-13 2019-10-23 キヤノン株式会社 光学装置、加工装置、および、物品の製造方法
DE102017213511A1 (de) 2017-08-03 2019-02-07 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Lasermaterialbearbeitung und Lasermaschine

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339266A (ja) 2005-05-31 2006-12-14 Hitachi Via Mechanics Ltd レーザ加工方法
JP2008032524A (ja) 2006-07-28 2008-02-14 National Institute Of Advanced Industrial & Technology レーザ加工装置および計測用レーザ光の焦点検出方法
WO2013038606A1 (ja) 2011-09-15 2013-03-21 パナソニック株式会社 レーザ加工装置およびレーザ加工方法
JP2014117722A (ja) 2012-12-14 2014-06-30 Kataoka Seisakusho:Kk レーザ加工機
JP2014133242A (ja) 2013-01-09 2014-07-24 Lps Works Co Ltd レーザ加工方法及びレーザ加工装置
WO2015067411A1 (de) 2013-11-11 2015-05-14 Robert Bosch Gmbh Vorrichtung und verfahren zur führung eines laserstrahls
JP2015116591A (ja) 2013-12-18 2015-06-25 三菱重工業株式会社 レーザ加工装置及びレーザ加工方法
US20170120378A1 (en) 2014-11-25 2017-05-04 T.Friends Co., Ltd. Apparatus for processing micro-component by using laser
US20180134604A1 (en) 2015-07-15 2018-05-17 Schott Ag Method and device for separation of glass portions or glass ceramic portions

Also Published As

Publication number Publication date
US20210060698A1 (en) 2021-03-04
EP3786684A1 (en) 2021-03-03
CN112496527B (zh) 2023-08-29
US11878367B2 (en) 2024-01-23
JP2021030273A (ja) 2021-03-01
CN112496527A (zh) 2021-03-16

Similar Documents

Publication Publication Date Title
JP7412925B2 (ja) 光学装置、および、物品の製造方法
JP5931537B2 (ja) レーザの光軸アライメント方法およびそれを用いたレーザ加工装置
JP6645960B2 (ja) 工作物へのレーザービームの進入深さを測定する方法、及び、レーザー加工装置
US10773339B2 (en) Scanning head with integrated beam position sensor and adjustment arrangement for an off-line adjustment
CN109219496B (zh) 激光加工时工艺监控的具有光学距离测量装置和棱镜偏转单元的装置及具有其的激光加工头
JP5133568B2 (ja) レーザー加工装置
CN104379296B (zh) 激光加工装置
JP2010082663A (ja) レーザ加工機
US7333255B2 (en) Laser processing device
JP6851751B2 (ja) 光学装置、加工装置、および物品製造方法
JP4762593B2 (ja) 外部レーザ導入装置
WO2018047823A1 (ja) レーザ加工装置
KR102540387B1 (ko) 광 경로 분할 고속 3차원 센서장치
JP6780544B2 (ja) レーザ溶接装置
WO1997021132A1 (en) Mirror angle detector and detection method
TWI604220B (zh) 光學裝置、處理裝置及物品製造方法
JP3579630B2 (ja) 顕微鏡のオートフォーカス装置
JP2004177502A (ja) レーザ走査装置
CN118119820A (zh) 用于设定oct系统的参考路段的方法和系统
JP2012103487A (ja) レーザー照射装置
US20030222143A1 (en) Precision laser scan head
KR101941580B1 (ko) 표면형상 측정장치
US6329634B1 (en) Workpiece irradiation system
JP2020082149A (ja) レーザ照射システム
JPH02150369A (ja) 走査式描画装置の描画面調整機構

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220822

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220822

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230614

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230620

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230821

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231128

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20231227

R151 Written notification of patent or utility model registration

Ref document number: 7412925

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151