JP7406897B2 - 搬送装置および物品の製造方法 - Google Patents

搬送装置および物品の製造方法 Download PDF

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Publication number
JP7406897B2
JP7406897B2 JP2019202780A JP2019202780A JP7406897B2 JP 7406897 B2 JP7406897 B2 JP 7406897B2 JP 2019202780 A JP2019202780 A JP 2019202780A JP 2019202780 A JP2019202780 A JP 2019202780A JP 7406897 B2 JP7406897 B2 JP 7406897B2
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Japan
Prior art keywords
coil
movable element
coil unit
distance
coils
Prior art date
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Active
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JP2019202780A
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English (en)
Japanese (ja)
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JP2020096514A5 (enrdf_load_stackoverflow
JP2020096514A (ja
Inventor
武 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to KR1020190157174A priority Critical patent/KR102546009B1/ko
Priority to CN201911218215.XA priority patent/CN111293855B/zh
Publication of JP2020096514A publication Critical patent/JP2020096514A/ja
Publication of JP2020096514A5 publication Critical patent/JP2020096514A5/ja
Application granted granted Critical
Publication of JP7406897B2 publication Critical patent/JP7406897B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/99—Conveyor systems not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2019202780A 2018-12-07 2019-11-07 搬送装置および物品の製造方法 Active JP7406897B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020190157174A KR102546009B1 (ko) 2018-12-07 2019-11-29 반송 장치 및 물품의 제조 방법
CN201911218215.XA CN111293855B (zh) 2018-12-07 2019-12-03 搬送装置以及物品制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018230243 2018-12-07
JP2018230243 2018-12-07

Publications (3)

Publication Number Publication Date
JP2020096514A JP2020096514A (ja) 2020-06-18
JP2020096514A5 JP2020096514A5 (enrdf_load_stackoverflow) 2022-12-08
JP7406897B2 true JP7406897B2 (ja) 2023-12-28

Family

ID=71085197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019202780A Active JP7406897B2 (ja) 2018-12-07 2019-11-07 搬送装置および物品の製造方法

Country Status (2)

Country Link
JP (1) JP7406897B2 (enrdf_load_stackoverflow)
KR (1) KR102546009B1 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7538691B2 (ja) 2020-10-29 2024-08-22 キヤノン株式会社 搬送装置、真空装置、加工システム及び物品の製造方法
JP7534923B2 (ja) * 2020-10-30 2024-08-15 キヤノン株式会社 搬送システム及び搬送システムの制御方法
JP2023019092A (ja) * 2021-07-28 2023-02-09 キヤノン株式会社 搬送システム、搬送システムの制御方法、加工システム、物品の製造方法及びモータ
CN115097851B (zh) * 2022-06-30 2025-04-22 瑞声光电科技(常州)有限公司 直驱传输系统的控制方法及相关设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
JP2012039680A (ja) 2010-08-03 2012-02-23 Toshiba Mach Co Ltd リニアモータ及びリニアモータ装置
JP2012095414A (ja) 2010-10-26 2012-05-17 Murata Mach Ltd リニアモータおよびこれを用いた搬送システム

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2314178A1 (fr) * 1975-06-11 1977-01-07 Ile De France Nouveau procede de preparation du n-(1-ethyl-2-pyrrolidylmethyl) 2-methoxy 5-methoxy 5-sulfamoyl benzamide
JPS6311609A (ja) * 1986-07-02 1988-01-19 Nippon Steel Corp 鉄鉱石の予備還元装置
JPH05231068A (ja) * 1992-02-25 1993-09-07 Fuji Electric Co Ltd ドア開閉用リニアモータ
JPH08289531A (ja) * 1995-04-14 1996-11-01 Toyota Auto Body Co Ltd リニア直流モータ
JP2000245128A (ja) * 1999-02-22 2000-09-08 Nkk Corp リニア同期モータ
JP2004328830A (ja) 2003-04-22 2004-11-18 Asyst Shinko Inc リニアモータレール装置
DE102006014616A1 (de) 2006-03-29 2007-10-11 Siemens Ag Linearmotor mit verschieden gestalteten Sekundärteilabschnitten
WO2009128321A1 (ja) * 2008-04-18 2009-10-22 株式会社安川電機 多自由度アクチュエータおよびステージ装置
EP2182627B1 (en) * 2008-10-31 2012-02-01 Robert Bosch GmbH Method and apparatus for controlling a linear motion system
JP5829153B2 (ja) * 2012-03-12 2015-12-09 住友重機械工業株式会社 射出成形機
KR101531656B1 (ko) 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
JP2012039680A (ja) 2010-08-03 2012-02-23 Toshiba Mach Co Ltd リニアモータ及びリニアモータ装置
JP2012095414A (ja) 2010-10-26 2012-05-17 Murata Mach Ltd リニアモータおよびこれを用いた搬送システム

Also Published As

Publication number Publication date
KR102546009B1 (ko) 2023-06-22
JP2020096514A (ja) 2020-06-18
KR20200070108A (ko) 2020-06-17

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