JP7403386B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP7403386B2
JP7403386B2 JP2020092235A JP2020092235A JP7403386B2 JP 7403386 B2 JP7403386 B2 JP 7403386B2 JP 2020092235 A JP2020092235 A JP 2020092235A JP 2020092235 A JP2020092235 A JP 2020092235A JP 7403386 B2 JP7403386 B2 JP 7403386B2
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Japan
Prior art keywords
layer
type
region
semiconductor layer
diode
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JP2020092235A
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English (en)
Japanese (ja)
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JP2021190496A (ja
JP2021190496A5 (https=
Inventor
真也 曽根田
健司 原田
翔瑠 大塚
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2020092235A priority Critical patent/JP7403386B2/ja
Priority to US17/168,750 priority patent/US12159944B2/en
Priority to DE102021107989.6A priority patent/DE102021107989A1/de
Priority to CN202110559128.1A priority patent/CN113745312B/zh
Publication of JP2021190496A publication Critical patent/JP2021190496A/ja
Publication of JP2021190496A5 publication Critical patent/JP2021190496A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/50—Physical imperfections
    • H10D62/53—Physical imperfections the imperfections being within the semiconductor body 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01—Manufacture or treatment
    • H10D12/031—Manufacture or treatment of IGBTs
    • H10D12/032—Manufacture or treatment of IGBTs of vertical IGBTs
    • H10D12/038—Manufacture or treatment of IGBTs of vertical IGBTs having a recessed gate, e.g. trench-gate IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/441—Vertical IGBTs
    • H10D12/461—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/441—Vertical IGBTs
    • H10D12/491—Vertical IGBTs having both emitter contacts and collector contacts in the same substrate side
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H10D62/405—Orientations of crystalline planes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/01—Manufacture or treatment
    • H10D8/045—Manufacture or treatment of PN junction diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/422—PN diodes having the PN junctions in mesas
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/811—Combinations of field-effect devices and one or more diodes, capacitors or resistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H10D64/117—Recessed field plates, e.g. trench field plates or buried field plates

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP2020092235A 2020-05-27 2020-05-27 半導体装置 Active JP7403386B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020092235A JP7403386B2 (ja) 2020-05-27 2020-05-27 半導体装置
US17/168,750 US12159944B2 (en) 2020-05-27 2021-02-05 RC-IGBT with lifetime control layer
DE102021107989.6A DE102021107989A1 (de) 2020-05-27 2021-03-30 Halbleitervorrichtung
CN202110559128.1A CN113745312B (zh) 2020-05-27 2021-05-21 半导体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020092235A JP7403386B2 (ja) 2020-05-27 2020-05-27 半導体装置

Publications (3)

Publication Number Publication Date
JP2021190496A JP2021190496A (ja) 2021-12-13
JP2021190496A5 JP2021190496A5 (https=) 2022-06-30
JP7403386B2 true JP7403386B2 (ja) 2023-12-22

Family

ID=78509162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020092235A Active JP7403386B2 (ja) 2020-05-27 2020-05-27 半導体装置

Country Status (4)

Country Link
US (1) US12159944B2 (https=)
JP (1) JP7403386B2 (https=)
CN (1) CN113745312B (https=)
DE (1) DE102021107989A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020121857A1 (ja) * 2018-12-12 2021-11-04 浜松ホトニクス株式会社 光検出装置及び光検出装置の製造方法
CN117581383A (zh) * 2021-07-20 2024-02-20 株式会社电装 半导体装置
JP7527256B2 (ja) * 2021-09-06 2024-08-02 三菱電機株式会社 半導体装置及び半導体装置の制御方法
CN116805627A (zh) * 2022-03-23 2023-09-26 三垦电气株式会社 半导体装置
DE102022127527A1 (de) * 2022-10-19 2024-04-25 Infineon Technologies Austria Ag Rc-igbt und herstellungsverfahren für einen rc-igbt
JPWO2024171683A1 (https=) * 2023-02-14 2024-08-22
CN117038451B (zh) * 2023-10-09 2024-02-20 深圳市锐骏半导体股份有限公司 沟槽栅igbt器件、制作方法及仿真方法
EP4672340A1 (en) 2024-06-26 2025-12-31 Nexperia B.V. SEMICONDUCTOR DEVICE AND METHOD FOR IONIC OPERATION IN A SEMICONDUCTOR DEVICE

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011216825A (ja) 2010-04-02 2011-10-27 Toyota Central R&D Labs Inc 半導体装置
JP2015118991A (ja) 2013-12-17 2015-06-25 トヨタ自動車株式会社 半導体装置
JP2016162950A (ja) 2015-03-04 2016-09-05 トヨタ自動車株式会社 半導体装置
WO2019098270A1 (ja) 2017-11-15 2019-05-23 富士電機株式会社 半導体装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011210800A (ja) * 2010-03-29 2011-10-20 Toyota Motor Corp 半導体装置
JP6078961B2 (ja) * 2012-03-19 2017-02-15 富士電機株式会社 半導体装置の製造方法
JP6107767B2 (ja) * 2013-12-27 2017-04-05 トヨタ自動車株式会社 半導体装置とその製造方法
JP6277814B2 (ja) 2014-03-25 2018-02-14 株式会社デンソー 半導体装置
CN111033751B (zh) * 2018-02-14 2023-08-18 富士电机株式会社 半导体装置
JP6958740B2 (ja) 2018-08-14 2021-11-02 富士電機株式会社 半導体装置および製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011216825A (ja) 2010-04-02 2011-10-27 Toyota Central R&D Labs Inc 半導体装置
JP2015118991A (ja) 2013-12-17 2015-06-25 トヨタ自動車株式会社 半導体装置
JP2016162950A (ja) 2015-03-04 2016-09-05 トヨタ自動車株式会社 半導体装置
WO2019098270A1 (ja) 2017-11-15 2019-05-23 富士電機株式会社 半導体装置

Also Published As

Publication number Publication date
JP2021190496A (ja) 2021-12-13
DE102021107989A1 (de) 2021-12-02
CN113745312B (zh) 2024-08-06
US12159944B2 (en) 2024-12-03
US20210376167A1 (en) 2021-12-02
CN113745312A (zh) 2021-12-03

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