JP7396947B2 - 半導体装置及び半導体装置の製造方法 - Google Patents
半導体装置及び半導体装置の製造方法 Download PDFInfo
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- JP7396947B2 JP7396947B2 JP2020058087A JP2020058087A JP7396947B2 JP 7396947 B2 JP7396947 B2 JP 7396947B2 JP 2020058087 A JP2020058087 A JP 2020058087A JP 2020058087 A JP2020058087 A JP 2020058087A JP 7396947 B2 JP7396947 B2 JP 7396947B2
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- 239000004065 semiconductor Substances 0.000 title claims description 154
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 171
- 229920005591 polysilicon Polymers 0.000 claims description 170
- 239000000758 substrate Substances 0.000 claims description 69
- 238000005530 etching Methods 0.000 claims description 27
- 239000012535 impurity Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 20
- 238000000137 annealing Methods 0.000 claims description 12
- 239000003990 capacitor Substances 0.000 description 51
- 230000005684 electric field Effects 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 10
- 230000001965 increasing effect Effects 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 235000020637 scallop Nutrition 0.000 description 6
- 241000237509 Patinopecten sp. Species 0.000 description 4
- 230000001154 acute effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 241000237503 Pectinidae Species 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/91—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
- H01L21/30655—Plasma etching; Reactive-ion etching comprising alternated and repeated etching and passivation steps, e.g. Bosch process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/84—Electrodes with an enlarged surface, e.g. formed by texturisation being a rough surface, e.g. using hemispherical grains
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Plasma & Fusion (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
10 半導体基板
11 対向電極
12 ポリシリコン膜
13 容量絶縁膜
14 ポリシリコン膜
15 ポリシリコン膜
16 粗面ポリシリコン膜
Claims (10)
- 半導体基板と、
前記半導体基板の1の面から内部に向かって伸長し、側壁表面に凹凸構造を有するトレンチと、
前記トレンチの側壁表面を覆い且つ前記側壁表面から連続して前記半導体基板の前記1の面に延在するように形成された半導体膜と、
前記半導体膜を挟んで前記半導体基板と対向する位置に設けられ、前記半導体基板の前記1の面に延在する第1の部分と、前記第1の部分から連続して前記トレンチを埋めるように延在する第2の部分と、を有する対向電極と、
前記半導体膜と前記対向電極とを絶縁する絶縁膜と、
を有することを特徴とする半導体装置。 - 前記半導体膜は、ノンドープのポリシリコン膜であることを特徴とする請求項1に記載の半導体装置。
- 前記半導体膜は、不純物がドープされたポリシリコン膜であることを特徴とする請求項1に記載の半導体装置。
- 前記半導体膜は、表面に半球状粒子構造を有する粗面ポリシリコンを含むことを特徴とする請求項1乃至3のいずれか1に記載の半導体装置。
- 前記凸構造は、尖頭形の凸部を含むことを特徴とする請求項1乃至4のいずれか1に記載の半導体装置。
- 前記トレンチは、ボッシュエッチによって形成されており、
前記凹凸構造は、前記ボッシュエッチの過程において形成される鱗状の凹凸構造であることを特徴とする請求項1乃至5のいずれか1に記載の半導体装置。 - ボッシュエッチにより、半導体基板の1の面から内部に向かって伸長するトレンチを形成するステップと、
前記トレンチの側壁表面を覆い且つ前記側壁表面から連続して前記半導体基板の前記1の面に延在するように半導体膜を形成するステップと、
前記半導体膜の表面に絶縁膜を形成するステップと、
前記半導体基板の前記1の面に延在する第1の部分と、前記第1の部分から連続して前記トレンチを埋めるように延在する第2の部分と、を有する対向電極を前記絶縁膜上に形成するステップと、
を含むことを特徴とする半導体装置の製造方法。 - 前記絶縁膜を形成するステップの後、熱アニール処理を実行するステップをさらに含むことを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記半導体膜を形成するステップは、
不純物がドープされた第1のポリシリコン膜を形成する第1のステップと、
前記第1のポリシリコン膜の表面にノンドープの第2のポリシリコン膜を形成する第2のステップと、
を含むことを特徴とする請求項8に記載の半導体装置の製造方法。 - 前記半導体膜を形成するステップは、
不純物がドープされた第1のポリシリコン膜を形成する第1のステップと、
前記第1のポリシリコン膜の表面にノンドープの第2のポリシリコン膜を形成する第2のステップと、
前記第2のポリシリコン膜の表面に粗面ポリシリコン膜を形成する第3のステップと、
を含むことを特徴とする請求項8に記載の半導体装置の製造方法。
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JP2020058087A JP7396947B2 (ja) | 2020-03-27 | 2020-03-27 | 半導体装置及び半導体装置の製造方法 |
US17/205,408 US11756991B2 (en) | 2020-03-27 | 2021-03-18 | Semiconductor device and manufacturing method for semiconductor device |
CN202110294418.8A CN113451512A (zh) | 2020-03-27 | 2021-03-19 | 半导体装置以及半导体装置的制造方法 |
US18/363,456 US20230378252A1 (en) | 2020-03-27 | 2023-08-01 | Semiconductor device and manufacturing method for semiconductor device |
JP2023203022A JP2024015124A (ja) | 2020-03-27 | 2023-11-30 | 半導体装置及び半導体装置の製造方法 |
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Citations (6)
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JP2002016236A (ja) | 2000-06-30 | 2002-01-18 | Toshiba Corp | 半導体装置の製造方法 |
JP2004266248A (ja) | 2003-02-14 | 2004-09-24 | Sony Corp | キャパシタの形成方法および半導体装置の製造方法 |
JP2009535835A (ja) | 2006-05-02 | 2009-10-01 | エヌエックスピー ビー ヴィ | 改良された電極を備える電気デバイス |
JP2012079960A (ja) | 2010-10-04 | 2012-04-19 | Denso Corp | キャパシタ構造体およびその製造方法 |
US20190123135A1 (en) | 2017-10-23 | 2019-04-25 | United Microelectronics Corp. | Method of manufacturing a capacitor |
WO2019243882A2 (en) | 2018-06-21 | 2019-12-26 | Murata Manufacturing Co., Ltd. | Semiconductor structure enhanced for high voltage applications |
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US6025225A (en) * | 1998-01-22 | 2000-02-15 | Micron Technology, Inc. | Circuits with a trench capacitor having micro-roughened semiconductor surfaces and methods for forming the same |
US20030052088A1 (en) * | 2001-09-19 | 2003-03-20 | Anisul Khan | Method for increasing capacitance in stacked and trench capacitors |
US20030123216A1 (en) * | 2001-12-27 | 2003-07-03 | Yoon Hyungsuk A. | Deposition of tungsten for the formation of conformal tungsten silicide |
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TW201222778A (en) | 2010-11-18 | 2012-06-01 | Ind Tech Res Inst | Trench capacitor structures and method of manufacturing the same |
US8685828B2 (en) * | 2011-01-14 | 2014-04-01 | Infineon Technologies Ag | Method of forming a capacitor |
US20170186837A1 (en) * | 2015-12-29 | 2017-06-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Deep trench capacitor with scallop profile |
US10510828B2 (en) | 2016-10-04 | 2019-12-17 | Nano Henry, Inc. | Capacitor with high aspect radio silicon cores |
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- 2021-03-18 US US17/205,408 patent/US11756991B2/en active Active
- 2021-03-19 CN CN202110294418.8A patent/CN113451512A/zh active Pending
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- 2023-08-01 US US18/363,456 patent/US20230378252A1/en active Pending
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002016236A (ja) | 2000-06-30 | 2002-01-18 | Toshiba Corp | 半導体装置の製造方法 |
JP2004266248A (ja) | 2003-02-14 | 2004-09-24 | Sony Corp | キャパシタの形成方法および半導体装置の製造方法 |
JP2009535835A (ja) | 2006-05-02 | 2009-10-01 | エヌエックスピー ビー ヴィ | 改良された電極を備える電気デバイス |
JP2012079960A (ja) | 2010-10-04 | 2012-04-19 | Denso Corp | キャパシタ構造体およびその製造方法 |
US20190123135A1 (en) | 2017-10-23 | 2019-04-25 | United Microelectronics Corp. | Method of manufacturing a capacitor |
WO2019243882A2 (en) | 2018-06-21 | 2019-12-26 | Murata Manufacturing Co., Ltd. | Semiconductor structure enhanced for high voltage applications |
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CN113451512A (zh) | 2021-09-28 |
US20230378252A1 (en) | 2023-11-23 |
US11756991B2 (en) | 2023-09-12 |
JP2021158256A (ja) | 2021-10-07 |
JP2024015124A (ja) | 2024-02-01 |
US20210305360A1 (en) | 2021-09-30 |
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