JP2009535835A - 改良された電極を備える電気デバイス - Google Patents
改良された電極を備える電気デバイス Download PDFInfo
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- H—ELECTRICITY
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
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- H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
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- H10B—ELECTRONIC MEMORY DEVICES
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- H10B12/01—Manufacture or treatment
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- H10B12/03—Making the capacitor or connections thereto
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- H10B12/03—Making the capacitor or connections thereto
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- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
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- H10B—ELECTRONIC MEMORY DEVICES
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- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
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Abstract
Description
Claims (14)
- 第1表面を有する第1電極と前記第1表面から第1の方向に延在するピラーとを備える電気素子を含む電気デバイスであって、前記ピラーは前記第1表面から前記第1の方向に平行に測った長さを有し、前記第1の方向に直角の断面を有し且つ前記第1の方向に広がり前記ピラーを覆う側壁表面を有しているデバイスにおいて、前記ピラーに向上した機械的安定性を与えるために、前記ピラーは前記ピラーの長さの少なくとも一部分に沿って延在するへこみ部及び突部の何れか一つを備えることを特徴とする電気デバイス。
- 前記側壁表面は、前記第1の方向に平行に延在する線に沿って互いに接合する第1領域及び第2領域を備え、前記第1及び第2領域が互いに鈍角の傾斜角を形成することを特徴とする請求項1記載の電気デバイス。
- 前記側壁表面はなめらかな表面であることを特徴とする請求項1又は2記載の電気デバイス。
- 前記断面は対称なプロファイル(凹凸断面)であることを特徴とする請求項1〜3の何れかに記載の電気デバイス。
- 前記断面は前記ピラーの長さに沿って一定の面積を有することを特徴とする請求項1〜4の何れかに記載の電気デバイス。
- 前記断面は前記ピラーの全長に沿って同一の形状を有することを特徴とする請求項1〜4の何れかに記載の電気デバイス。
- 前記ピラーは30より大きいアスペクト比を有することを特徴とする請求項1空の何れかに記載の電気デバイス。
- 前記電気素子は複数のピラーを備える第1電極を含むことを特徴とする請求項1〜7の何れかに記載の電気デバイス。
- 前記電気素子は第2電極及び第1補助層を備え、前記第1補助層は前記第2電極を前記第1電極から分離するように配置されている請求項1〜8の何れかに記載の電気デバイス。
- 前記電気素子は、一つ以上の追加の電極及び追加の補助層を備え、前記追加の補助層は前記第1及び第2電極間に少なくとも部分的に配置され、前記追加の電極は前記第1及び前記追加の補助層の少なくとも一部分によって互いに且つ前記第1及び第2電極から分離さていることを特徴とする請求項9記載の電気デバイス。
- 前記電気デバイスは同じタイプの複数の素子を備えることを特徴とする請求項1,8,9又は10に記載の電気デバイス。
- 前記電気デバイスは半導体を含む基板を備え、前記第1電極は前記半導体の一部分である請求項1,8,9,10又は11に記載の電気デバイス。
- 前記電気デバイスは集積回路であり、前記素子はメモリセルである請求項1,8,9,10又は11に記載の電気デバイス。
- 請求項1、8、9,10又は11に記載の電気デバイスと少なくとも一つの集積回路を備え、前記電気デバイスは前記少なくとも一つの集積回路に電気的に結合されていることを特徴とするアセンブリ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06300422 | 2006-05-02 | ||
PCT/IB2007/051598 WO2007125510A2 (en) | 2006-05-02 | 2007-04-30 | Electric device comprising an improved electrode with a pillar having protrusions or scores for enhanced stability |
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JP2013029408A Division JP5732085B2 (ja) | 2006-05-02 | 2013-02-18 | 改良された電極を備える電気デバイス |
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JP2009535835A true JP2009535835A (ja) | 2009-10-01 |
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JP2009508595A Pending JP2009535835A (ja) | 2006-05-02 | 2007-04-30 | 改良された電極を備える電気デバイス |
JP2013029408A Active JP5732085B2 (ja) | 2006-05-02 | 2013-02-18 | 改良された電極を備える電気デバイス |
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Country Status (6)
Country | Link |
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US (1) | US8283750B2 (ja) |
EP (1) | EP2018660B1 (ja) |
JP (2) | JP2009535835A (ja) |
CN (1) | CN101484976B (ja) |
TW (1) | TWI451561B (ja) |
WO (1) | WO2007125510A2 (ja) |
Cited By (6)
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WO2020217850A1 (ja) * | 2019-04-24 | 2020-10-29 | 株式会社村田製作所 | キャパシタ |
JP2021518053A (ja) * | 2018-01-23 | 2021-07-29 | テキサス インスツルメンツ インコーポレイテッド | 反り低減トレンチコンデンサ |
JP2021518052A (ja) * | 2018-01-23 | 2021-07-29 | テキサス インスツルメンツ インコーポレイテッド | エピタキシャル層に形成される集積トレンチコンデンサ |
US11158456B2 (en) | 2018-06-27 | 2021-10-26 | Taiyo Yuden Co., Ltd. | Trench capacitor |
JP7396947B2 (ja) | 2020-03-27 | 2023-12-12 | ラピスセミコンダクタ株式会社 | 半導体装置及び半導体装置の製造方法 |
JP7506515B2 (ja) | 2019-08-09 | 2024-06-26 | ローム株式会社 | チップ部品 |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007131967A1 (en) | 2006-05-15 | 2007-11-22 | Koninklijke Philips Electronics N.V. | Integrated low-loss capacitor-arrray structure |
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EP2018660A2 (en) | 2009-01-28 |
CN101484976A (zh) | 2009-07-15 |
US20100230787A1 (en) | 2010-09-16 |
CN101484976B (zh) | 2011-02-23 |
TWI451561B (zh) | 2014-09-01 |
JP5732085B2 (ja) | 2015-06-10 |
TW200810085A (en) | 2008-02-16 |
WO2007125510A3 (en) | 2008-01-10 |
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US8283750B2 (en) | 2012-10-09 |
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