JP7354594B2 - 電子素子モジュール及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims description 71
- 238000007789 sealing Methods 0.000 claims description 42
- 230000017525 heat dissipation Effects 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 238000003780 insertion Methods 0.000 claims description 17
- 230000037431 insertion Effects 0.000 claims description 17
- 238000012546 transfer Methods 0.000 claims description 17
- 230000005855 radiation Effects 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 6
- 238000004381 surface treatment Methods 0.000 claims 3
- 238000000926 separation method Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 37
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- 230000008569 process Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 11
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 7
- 238000000465 moulding Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229920006336 epoxy molding compound Polymers 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229940073686 let me clarify Drugs 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
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- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
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- Computer Hardware Design (AREA)
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- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
20 基板
30 遮蔽フレーム
40 封止部
50 遮蔽層
60 熱伝達層
70 放熱部材
Claims (17)
- 基板と、
前記基板に実装される第1素子及び第2素子を含む電子素子と、
前記第1素子を内部に収容し、前記基板に実装される遮蔽フレームと、
前記電子素子と前記遮蔽フレームを封止する封止部と、を含み、
前記遮蔽フレームは、前記第1素子上に積層配置される放熱部、及び前記放熱部の縁から延長され、一定間隔に離隔配置される多数のポストを含み、
前記放熱部の上部に積層配置され、上部面が前記封止部の外部に露出するように配置される放熱部材をさらに含む、
前記ポスト間の最大離隔間隔は、前記第1素子に流入する電磁波の波長、または、前記第1素子から流出する電磁波の波長よりも小さく形成される、電子素子モジュール。 - 前記放熱部は、下部面に溝状の収容部を備え、
前記第1素子は、少なくとも一部が前記収容部内に配置される、請求項1に記載の電子素子モジュール。 - 前記遮蔽フレームの表面には、表面処理により粗さが増加した結合層が配置される、請求項1または2に記載の電子素子モジュール。
- 基板と、
前記基板に実装される第1素子及び第2素子を含む電子素子と、
前記第1素子を内部に収容し、前記基板に実装される遮蔽フレームと、を含み、
前記遮蔽フレームは、前記第1素子上に積層配置される放熱部、及び前記放熱部の縁から延長され、一定間隔に離隔配置される多数のポストを含み、
前記放熱部は、下部面に溝状の収容部を備え、
前記第1素子は、少なくとも一部が前記収容部内に配置され、
前記ポスト間の最大離隔間隔は、前記第1素子に流入する電磁波の波長、または、前記第1素子から流出する電磁波の波長よりも小さく形成される、電子素子モジュール。 - 前記遮蔽フレームの表面には、表面処理により粗さが増加した結合層が配置される、請求項2に記載の電子素子モジュール。
- 基板と、
前記基板に実装される第1素子及び第2素子を含む電子素子と、
前記第1素子を内部に収容し、前記基板に実装される遮蔽フレームと、を含み、
前記遮蔽フレームの表面には、表面処理により粗さが増加した結合層が配置され、
前記遮蔽フレームは、前記第1素子上に積層配置される放熱部、及び前記放熱部の縁から延長され、一定間隔に離隔配置される多数のポストを含み、
前記ポスト間の最大離隔間隔は、前記第1素子に流入する電磁波の波長、または、前記第1素子から流出する電磁波の波長よりも小さく形成される、電子素子モジュール。 - 前記電子素子と前記遮蔽フレームを封止する封止部をさらに含む、請求項4から6のいずれか1項に記載の電子素子モジュール。
- 前記放熱部は、上部面が前記封止部の外部に露出する、請求項1から3のいずれか1項、または、請求項7に記載の電子素子モジュール。
- 前記放熱部材は、ブロック状または貫通ビア状に形成される、請求項1から3のいずれか1項に記載の電子素子モジュール。
- 前記封止部の表面に沿って配置され、前記遮蔽フレームを介して前記基板の接地と電気的に連結される遮蔽層をさらに含む、請求項1から3、および、7から9のいずれか一項に記載の電子素子モジュール。
- 前記封止部は、前記遮蔽フレームの内部空間に充填される、請求項1から3、および、7から10のいずれか一項に記載の電子素子モジュール。
- 前記第1素子と前記放熱部との間に配置される熱伝達層をさらに含む、請求項1から11のいずれか一項に記載の電子素子モジュール。
- 前記ポストは、端部が前記基板に形成された挿入孔に挿入配置される、請求項1から12のいずれか一項に記載の電子素子モジュール。
- 前記放熱部と前記ポストは、同一の厚さに形成される、請求項1から13のいずれか一項に記載の電子素子モジュール。
- 金属板を設ける段階と、
前記金属板から不要な部分を除去して放熱部と多数のポストを形成する段階と、
前記放熱部と前記ポストとが連結される部分を折り曲げて遮蔽フレームを形成する段階と、
前記遮蔽フレームの表面に粗さが増加した結合層を形成する段階と、
基板に実装された第1素子が前記遮蔽フレームの内部に収容されるように、前記遮蔽フレームを前記基板に実装する段階と、
を含む、電子素子モジュールの製造方法。 - 折り曲げられた前記ポスト間の最大離隔間隔は、前記第1素子に流入する電磁波の波長、または、前記第1素子から流出する電磁波の波長よりも小さく形成される、請求項15に記載の電子素子モジュールの製造方法。
- 前記遮蔽フレームを前記基板に実装する段階前に、
前記第1素子の上部面に熱伝達層を配置する段階をさらに含む、請求項15または16に記載の電子素子モジュールの製造方法。
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KR1020190025948A KR20200107201A (ko) | 2019-03-06 | 2019-03-06 | 전자 소자 모듈 및 그 제조 방법 |
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CN110178214A (zh) * | 2017-01-18 | 2019-08-27 | 株式会社村田制作所 | 模块 |
JP7070373B2 (ja) | 2018-11-28 | 2022-05-18 | 三菱電機株式会社 | 半導体装置の製造方法、半導体装置、電力変換装置 |
US11652064B2 (en) * | 2019-12-06 | 2023-05-16 | Qualcomm Incorporated | Integrated device with electromagnetic shield |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2017139278A (ja) | 2016-02-02 | 2017-08-10 | Towa株式会社 | 電子部品の製造装置及び製造方法並びに電子部品 |
JP2018056235A (ja) | 2016-09-27 | 2018-04-05 | 富士通コンポーネント株式会社 | シールドケース及び電子装置 |
WO2018164158A1 (ja) | 2017-03-08 | 2018-09-13 | 株式会社村田製作所 | 高周波モジュール |
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JP2018056235A (ja) | 2016-09-27 | 2018-04-05 | 富士通コンポーネント株式会社 | シールドケース及び電子装置 |
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