JP7288463B2 - 多流路質量流量・質量流量比制御システムのための方法及び装置 - Google Patents

多流路質量流量・質量流量比制御システムのための方法及び装置 Download PDF

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JP7288463B2
JP7288463B2 JP2020562694A JP2020562694A JP7288463B2 JP 7288463 B2 JP7288463 B2 JP 7288463B2 JP 2020562694 A JP2020562694 A JP 2020562694A JP 2020562694 A JP2020562694 A JP 2020562694A JP 7288463 B2 JP7288463 B2 JP 7288463B2
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flow
flow path
channel
pressure
shared
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JP2021523460A5 (https=
JP2021523460A (ja
JPWO2019217078A5 (https=
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ディング・ジュンファ
ラバッシ・マイケル
コール・ウェイン
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MKS Instruments Inc
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MKS Instruments Inc
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/139—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring a value related to the quantity of the individual components and sensing at least one property of the mixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
JP2020562694A 2018-05-07 2019-04-24 多流路質量流量・質量流量比制御システムのための方法及び装置 Active JP7288463B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/973,190 US10698426B2 (en) 2018-05-07 2018-05-07 Methods and apparatus for multiple channel mass flow and ratio control systems
US15/973,190 2018-05-07
PCT/US2019/028904 WO2019217078A1 (en) 2018-05-07 2019-04-24 Methods and apparatus for multiple channel mass flow and ratio control systems

Publications (4)

Publication Number Publication Date
JP2021523460A JP2021523460A (ja) 2021-09-02
JP2021523460A5 JP2021523460A5 (https=) 2022-03-18
JPWO2019217078A5 JPWO2019217078A5 (https=) 2022-03-18
JP7288463B2 true JP7288463B2 (ja) 2023-06-07

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JP2020562694A Active JP7288463B2 (ja) 2018-05-07 2019-04-24 多流路質量流量・質量流量比制御システムのための方法及び装置

Country Status (8)

Country Link
US (1) US10698426B2 (https=)
EP (1) EP3791242B1 (https=)
JP (1) JP7288463B2 (https=)
KR (1) KR102755306B1 (https=)
CN (1) CN112204493B (https=)
SG (1) SG11202010715SA (https=)
TW (1) TWI831777B (https=)
WO (1) WO2019217078A1 (https=)

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FR3056314B1 (fr) * 2016-09-21 2018-09-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procede et appareil de regulation de plusieurs fluides
JP2020021176A (ja) * 2018-07-30 2020-02-06 株式会社堀場エステック 流量制御装置
US11187561B2 (en) * 2020-02-25 2021-11-30 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
US11940307B2 (en) * 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
KR102867611B1 (ko) * 2021-12-03 2025-10-14 한국전자통신연구원 멀티 포트 가스 유량 제어 장치
CN114935949A (zh) * 2022-05-30 2022-08-23 佛山市美的清湖净水设备有限公司 软水设备出水硬度调节方法、装置及电子设备
CN115274508B (zh) * 2022-08-11 2025-10-28 费斯托（中国）自动化制造有限公司 真空质量流量控制装置及其控制方法

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JP2009533756A (ja) 2006-04-14 2009-09-17 エム ケー エス インストルメンツ インコーポレーテッド 多導管流量率コントローラ
WO2011040330A1 (ja) 2009-10-01 2011-04-07 株式会社堀場エステック 流量調整弁及びマスフローコントローラ
US20170370763A1 (en) 2016-06-27 2017-12-28 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
JP2018526757A (ja) 2015-08-31 2018-09-13 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 非臨界流れ状態での圧力式流量測定の方法および装置

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JP2009533756A (ja) 2006-04-14 2009-09-17 エム ケー エス インストルメンツ インコーポレーテッド 多導管流量率コントローラ
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Also Published As

Publication number Publication date
SG11202010715SA (en) 2020-11-27
TWI831777B (zh) 2024-02-11
US20190339725A1 (en) 2019-11-07
JP2021523460A (ja) 2021-09-02
TW201947339A (zh) 2019-12-16
CN112204493B (zh) 2024-01-09
US10698426B2 (en) 2020-06-30
EP3791242A1 (en) 2021-03-17
KR102755306B1 (ko) 2025-01-20
KR20210006937A (ko) 2021-01-19
CN112204493A (zh) 2021-01-08
WO2019217078A1 (en) 2019-11-14
EP3791242B1 (en) 2022-04-06

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