FR3056314B1 - Procede et appareil de regulation de plusieurs fluides - Google Patents

Procede et appareil de regulation de plusieurs fluides Download PDF

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Publication number
FR3056314B1
FR3056314B1 FR1658846A FR1658846A FR3056314B1 FR 3056314 B1 FR3056314 B1 FR 3056314B1 FR 1658846 A FR1658846 A FR 1658846A FR 1658846 A FR1658846 A FR 1658846A FR 3056314 B1 FR3056314 B1 FR 3056314B1
Authority
FR
France
Prior art keywords
multiple fluids
regulating multiple
regulating
fluids
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1658846A
Other languages
English (en)
Other versions
FR3056314A1 (fr
Inventor
Madiha EL AZIZ
Alban Pivard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR1658846A priority Critical patent/FR3056314B1/fr
Priority to US16/335,452 priority patent/US10976755B2/en
Priority to PCT/FR2017/052363 priority patent/WO2018055255A1/fr
Priority to CN201780056882.5A priority patent/CN109690442B/zh
Publication of FR3056314A1 publication Critical patent/FR3056314A1/fr
Application granted granted Critical
Publication of FR3056314B1 publication Critical patent/FR3056314B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0082—Regulation; Control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/16—Evaporating by spraying
    • B01D1/20—Sprayers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/42—Regulation; Control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
FR1658846A 2016-09-21 2016-09-21 Procede et appareil de regulation de plusieurs fluides Active FR3056314B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1658846A FR3056314B1 (fr) 2016-09-21 2016-09-21 Procede et appareil de regulation de plusieurs fluides
US16/335,452 US10976755B2 (en) 2016-09-21 2017-09-06 Method and apparatus for regulating a plurality of fluids
PCT/FR2017/052363 WO2018055255A1 (fr) 2016-09-21 2017-09-06 Procédé et appareil de régulation de plusieurs fluides
CN201780056882.5A CN109690442B (zh) 2016-09-21 2017-09-06 用于调节多种流体的方法和设备

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1658846 2016-09-21
FR1658846A FR3056314B1 (fr) 2016-09-21 2016-09-21 Procede et appareil de regulation de plusieurs fluides

Publications (2)

Publication Number Publication Date
FR3056314A1 FR3056314A1 (fr) 2018-03-23
FR3056314B1 true FR3056314B1 (fr) 2018-09-07

Family

ID=57348981

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1658846A Active FR3056314B1 (fr) 2016-09-21 2016-09-21 Procede et appareil de regulation de plusieurs fluides

Country Status (4)

Country Link
US (1) US10976755B2 (fr)
CN (1) CN109690442B (fr)
FR (1) FR3056314B1 (fr)
WO (1) WO2018055255A1 (fr)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000063756A1 (fr) * 1999-04-16 2000-10-26 Fujikin Incorporated Dispositif d'alimentation en fluide du type derivation parallele, et procede et dispositif de commande du debit d'un systeme de pression du type a fluide variable utilise dans ledit dispositif
US6766260B2 (en) * 2002-01-04 2004-07-20 Mks Instruments, Inc. Mass flow ratio system and method
KR101428826B1 (ko) * 2006-12-12 2014-08-08 가부시키가이샤 호리바 에스텍 유량 비율 제어 장치
JP5346628B2 (ja) * 2009-03-11 2013-11-20 株式会社堀場エステック マスフローコントローラの検定システム、検定方法、検定用プログラム
FR2968575A1 (fr) * 2010-12-08 2012-06-15 Air Liquide Procede et appareil de production d'un fluide enrichi en dioxyde de carbone a partir d'un gaz residuaire d'une unite siderurgique
CN102841508B (zh) * 2011-06-23 2014-09-17 上海微电子装备有限公司 分流式气浴风道
JP5430621B2 (ja) * 2011-08-10 2014-03-05 Ｃｋｄ株式会社 ガス流量検定システム及びガス流量検定ユニット
CN202521229U (zh) * 2012-01-31 2012-11-07 锦州万泰智能节能设备制造有限公司 分流式管路调压节能装置
US9004107B2 (en) * 2012-08-21 2015-04-14 Applied Materials, Inc. Methods and apparatus for enhanced gas flow rate control
CN103791962A (zh) * 2013-12-24 2014-05-14 兰州空间技术物理研究所 多工作模式的气体流量计及气体流量测量方法
CN203963165U (zh) * 2014-07-05 2014-11-26 滕州京鲁伟业科学仪器有限公司 一种电控气体稳压调节装置
US10698426B2 (en) * 2018-05-07 2020-06-30 Mks Instruments, Inc. Methods and apparatus for multiple channel mass flow and ratio control systems

Also Published As

Publication number Publication date
US10976755B2 (en) 2021-04-13
CN109690442B (zh) 2022-06-24
CN109690442A (zh) 2019-04-26
US20200019194A1 (en) 2020-01-16
WO2018055255A1 (fr) 2018-03-29
FR3056314A1 (fr) 2018-03-23

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