CN112204493B - 用于多通道质量流量和比率控制系统的方法和装置 - Google Patents

用于多通道质量流量和比率控制系统的方法和装置 Download PDF

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Publication number
CN112204493B
CN112204493B CN201980030414.XA CN201980030414A CN112204493B CN 112204493 B CN112204493 B CN 112204493B CN 201980030414 A CN201980030414 A CN 201980030414A CN 112204493 B CN112204493 B CN 112204493B
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China
Prior art keywords
flow
channel
shared
pressure
restrictor
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Expired - Fee Related
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CN201980030414.XA
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English (en)
Chinese (zh)
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CN112204493A (zh
Inventor
丁军华
M·勒巴塞伊
W·科勒
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MKS Instruments Inc
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MKS Instruments Inc
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Publication of CN112204493A publication Critical patent/CN112204493A/zh
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/139—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring a value related to the quantity of the individual components and sensing at least one property of the mixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
CN201980030414.XA 2018-05-07 2019-04-24 用于多通道质量流量和比率控制系统的方法和装置 Expired - Fee Related CN112204493B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/973,190 US10698426B2 (en) 2018-05-07 2018-05-07 Methods and apparatus for multiple channel mass flow and ratio control systems
US15/973,190 2018-05-07
PCT/US2019/028904 WO2019217078A1 (en) 2018-05-07 2019-04-24 Methods and apparatus for multiple channel mass flow and ratio control systems

Publications (2)

Publication Number Publication Date
CN112204493A CN112204493A (zh) 2021-01-08
CN112204493B true CN112204493B (zh) 2024-01-09

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CN201980030414.XA Expired - Fee Related CN112204493B (zh) 2018-05-07 2019-04-24 用于多通道质量流量和比率控制系统的方法和装置

Country Status (8)

Country Link
US (1) US10698426B2 (https=)
EP (1) EP3791242B1 (https=)
JP (1) JP7288463B2 (https=)
KR (1) KR102755306B1 (https=)
CN (1) CN112204493B (https=)
SG (1) SG11202010715SA (https=)
TW (1) TWI831777B (https=)
WO (1) WO2019217078A1 (https=)

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FR3056314B1 (fr) * 2016-09-21 2018-09-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procede et appareil de regulation de plusieurs fluides
JP2020021176A (ja) * 2018-07-30 2020-02-06 株式会社堀場エステック 流量制御装置
US11187561B2 (en) * 2020-02-25 2021-11-30 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
US11940307B2 (en) * 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
KR102867611B1 (ko) * 2021-12-03 2025-10-14 한국전자통신연구원 멀티 포트 가스 유량 제어 장치
CN114935949A (zh) * 2022-05-30 2022-08-23 佛山市美的清湖净水设备有限公司 软水设备出水硬度调节方法、装置及电子设备
CN115274508B (zh) * 2022-08-11 2025-10-28 费斯托（中国）自动化制造有限公司 真空质量流量控制装置及其控制方法

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WO2017040100A1 (en) * 2015-08-31 2017-03-09 Mks Instruments, Inc. Method and apparatus for pressure-based flow measurement in non-critical flow conditions
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CN101164029A (zh) * 2005-04-21 2008-04-16 Mks仪器公司 包括反对称最优控制型流量比率控制器的输气方法和系统
CN101702940A (zh) * 2007-02-20 2010-05-05 Mks仪器公司 包括利用多反对称最优控制装置的流量比率控制器的气体输送方法和系统
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Also Published As

Publication number Publication date
SG11202010715SA (en) 2020-11-27
JP7288463B2 (ja) 2023-06-07
TWI831777B (zh) 2024-02-11
US20190339725A1 (en) 2019-11-07
JP2021523460A (ja) 2021-09-02
TW201947339A (zh) 2019-12-16
US10698426B2 (en) 2020-06-30
EP3791242A1 (en) 2021-03-17
KR102755306B1 (ko) 2025-01-20
KR20210006937A (ko) 2021-01-19
CN112204493A (zh) 2021-01-08
WO2019217078A1 (en) 2019-11-14
EP3791242B1 (en) 2022-04-06

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