SG11202010715SA - Methods and apparatus for multiple channel mass flow and ratio control systems - Google Patents

Methods and apparatus for multiple channel mass flow and ratio control systems

Info

Publication number
SG11202010715SA
SG11202010715SA SG11202010715SA SG11202010715SA SG11202010715SA SG 11202010715S A SG11202010715S A SG 11202010715SA SG 11202010715S A SG11202010715S A SG 11202010715SA SG 11202010715S A SG11202010715S A SG 11202010715SA SG 11202010715S A SG11202010715S A SG 11202010715SA
Authority
SG
Singapore
Prior art keywords
methods
mass flow
control systems
ratio control
multiple channel
Prior art date
Application number
SG11202010715SA
Other languages
English (en)
Inventor
Junhua Ding
Michael L'bassi
Wayne Cole
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11202010715SA publication Critical patent/SG11202010715SA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/139—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring a value related to the quantity of the individual components and sensing at least one property of the mixture
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
SG11202010715SA 2018-05-07 2019-04-24 Methods and apparatus for multiple channel mass flow and ratio control systems SG11202010715SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/973,190 US10698426B2 (en) 2018-05-07 2018-05-07 Methods and apparatus for multiple channel mass flow and ratio control systems
PCT/US2019/028904 WO2019217078A1 (en) 2018-05-07 2019-04-24 Methods and apparatus for multiple channel mass flow and ratio control systems

Publications (1)

Publication Number Publication Date
SG11202010715SA true SG11202010715SA (en) 2020-11-27

Family

ID=66952008

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202010715SA SG11202010715SA (en) 2018-05-07 2019-04-24 Methods and apparatus for multiple channel mass flow and ratio control systems

Country Status (8)

Country Link
US (1) US10698426B2 (https=)
EP (1) EP3791242B1 (https=)
JP (1) JP7288463B2 (https=)
KR (1) KR102755306B1 (https=)
CN (1) CN112204493B (https=)
SG (1) SG11202010715SA (https=)
TW (1) TWI831777B (https=)
WO (1) WO2019217078A1 (https=)

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FR3056314B1 (fr) * 2016-09-21 2018-09-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procede et appareil de regulation de plusieurs fluides
JP2020021176A (ja) * 2018-07-30 2020-02-06 株式会社堀場エステック 流量制御装置
US11187561B2 (en) * 2020-02-25 2021-11-30 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
US11940307B2 (en) * 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
KR102867611B1 (ko) * 2021-12-03 2025-10-14 한국전자통신연구원 멀티 포트 가스 유량 제어 장치
CN114935949A (zh) * 2022-05-30 2022-08-23 佛山市美的清湖净水设备有限公司 软水设备出水硬度调节方法、装置及电子设备
CN115274508B (zh) * 2022-08-11 2025-10-28 费斯托（中国）自动化制造有限公司 真空质量流量控制装置及其控制方法

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US6333272B1 (en) * 2000-10-06 2001-12-25 Lam Research Corporation Gas distribution apparatus for semiconductor processing
US6631334B2 (en) 2000-12-26 2003-10-07 Mks Instruments, Inc. Pressure-based mass flow controller system
US20030234045A1 (en) * 2002-06-24 2003-12-25 Ali Shajii Apparatus and method for mass flow controller with on-line diagnostics
US7169231B2 (en) * 2002-12-13 2007-01-30 Lam Research Corporation Gas distribution system with tuning gas
US6945123B1 (en) * 2004-06-28 2005-09-20 The General Electric Company Gas flow sensor having redundant flow sensing capability
US7536865B2 (en) * 2005-02-09 2009-05-26 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
US7621290B2 (en) * 2005-04-21 2009-11-24 Mks Instruments, Inc. Gas delivery method and system including a flow ratio controller using antisymmetric optimal control
US7673645B2 (en) * 2005-04-21 2010-03-09 Mks Instruments, Inc. Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement
US8997791B2 (en) 2006-04-14 2015-04-07 Mks Instruments, Inc. Multiple-channel flow ratio controller
JPWO2011040330A1 (ja) * 2009-10-01 2013-02-28 株式会社堀場エステック 流量調整弁及びマスフローコントローラ
US9348339B2 (en) 2010-09-29 2016-05-24 Mks Instruments, Inc. Method and apparatus for multiple-channel pulse gas delivery system
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Also Published As

Publication number Publication date
JP7288463B2 (ja) 2023-06-07
TWI831777B (zh) 2024-02-11
US20190339725A1 (en) 2019-11-07
JP2021523460A (ja) 2021-09-02
TW201947339A (zh) 2019-12-16
CN112204493B (zh) 2024-01-09
US10698426B2 (en) 2020-06-30
EP3791242A1 (en) 2021-03-17
KR102755306B1 (ko) 2025-01-20
KR20210006937A (ko) 2021-01-19
CN112204493A (zh) 2021-01-08
WO2019217078A1 (en) 2019-11-14
EP3791242B1 (en) 2022-04-06

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