SG11202100784RA - Flow rate control system and flow rate measurement method - Google Patents

Flow rate control system and flow rate measurement method

Info

Publication number
SG11202100784RA
SG11202100784RA SG11202100784RA SG11202100784RA SG11202100784RA SG 11202100784R A SG11202100784R A SG 11202100784RA SG 11202100784R A SG11202100784R A SG 11202100784RA SG 11202100784R A SG11202100784R A SG 11202100784RA SG 11202100784R A SG11202100784R A SG 11202100784RA
Authority
SG
Singapore
Prior art keywords
flow rate
control system
measurement method
rate control
rate measurement
Prior art date
Application number
SG11202100784RA
Inventor
Masaaki Nagase
Satoru Yamashita
Masayoshi Kawashima
Masahiko Takimoto
Kouji Nishino
Nobukazu Ikeda
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11202100784RA publication Critical patent/SG11202100784RA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
SG11202100784RA 2018-07-30 2019-07-16 Flow rate control system and flow rate measurement method SG11202100784RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018143005 2018-07-30
PCT/JP2019/027880 WO2020026784A1 (en) 2018-07-30 2019-07-16 Flow rate control system and flow rate measurement method

Publications (1)

Publication Number Publication Date
SG11202100784RA true SG11202100784RA (en) 2021-02-25

Family

ID=69231614

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202100784RA SG11202100784RA (en) 2018-07-30 2019-07-16 Flow rate control system and flow rate measurement method

Country Status (7)

Country Link
US (1) US11519769B2 (en)
JP (1) JP7244940B2 (en)
KR (1) KR102545945B1 (en)
CN (1) CN112470093A (en)
SG (1) SG11202100784RA (en)
TW (1) TWI719552B (en)
WO (1) WO2020026784A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110234965B (en) * 2017-02-10 2020-10-27 株式会社富士金 Flow rate measuring method and flow rate measuring device
CN111989635A (en) * 2018-04-27 2020-11-24 株式会社富士金 Flow rate control method and flow rate control device
KR20240123543A (en) * 2023-02-07 2024-08-14 주식회사 쎄믹스 System for supplying thermal fluid

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7174263B2 (en) * 2005-03-25 2007-02-06 Mks Instruments, Inc. External volume insensitive flow verification
JP4648098B2 (en) * 2005-06-06 2011-03-09 シーケーディ株式会社 Absolute flow verification system for flow control equipment
CN101395453B (en) * 2006-03-07 2010-09-29 喜开理株式会社 Gas flow rate verification unit
JP5346628B2 (en) * 2009-03-11 2013-11-20 株式会社堀場エステック Mass flow controller verification system, verification method, verification program
JP5502616B2 (en) * 2010-06-24 2014-05-28 東京瓦斯株式会社 Flow rate measuring device and flow rate measuring method
JP5538119B2 (en) 2010-07-30 2014-07-02 株式会社フジキン Calibration method and flow rate measuring method of flow controller for gas supply device
KR101205122B1 (en) 2010-09-29 2012-11-26 현대제철 주식회사 440MPa GRADE HIGH STRENGTH STEEL PLATE APPLIED BATCH ANNEALING TYPE AND METHOD FOR MANUFACTURING THE SAME
JP5703032B2 (en) * 2011-01-06 2015-04-15 株式会社フジキン Flow rate measuring method of flow controller for gas supply device
JP5286430B2 (en) * 2012-03-13 2013-09-11 株式会社フジキン Corrosion-resistant pressure type flow rate controller for the reference pressure type flow rate controller constituting the pressure control type flow rate reference device.
JP5797246B2 (en) * 2013-10-28 2015-10-21 株式会社フジキン Flow meter and flow control device including the same
JP6047540B2 (en) * 2014-11-05 2016-12-21 Ckd株式会社 Flow rate verification unit
JP6600568B2 (en) * 2015-09-16 2019-10-30 東京エレクトロン株式会社 How to find the output flow rate of the flow controller
CN105526996B (en) * 2015-10-13 2018-10-12 辽宁省计量科学研究院 High-precision pVTt method gas flow standard devices
CN108885471B (en) 2016-03-29 2021-10-01 株式会社富士金 Pressure type flow rate control device and flow rate self-diagnosis method
CN110234965B (en) 2017-02-10 2020-10-27 株式会社富士金 Flow rate measuring method and flow rate measuring device

Also Published As

Publication number Publication date
CN112470093A (en) 2021-03-09
JPWO2020026784A1 (en) 2021-08-02
TWI719552B (en) 2021-02-21
KR102545945B1 (en) 2023-06-21
WO2020026784A1 (en) 2020-02-06
JP7244940B2 (en) 2023-03-23
US11519769B2 (en) 2022-12-06
TW202032098A (en) 2020-09-01
KR20210015971A (en) 2021-02-10
US20210310844A1 (en) 2021-10-07

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