TWI831777B - 用於多通道質量流量和比例控制系統的方法和設備 - Google Patents

用於多通道質量流量和比例控制系統的方法和設備 Download PDF

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Publication number
TWI831777B
TWI831777B TW108114999A TW108114999A TWI831777B TW I831777 B TWI831777 B TW I831777B TW 108114999 A TW108114999 A TW 108114999A TW 108114999 A TW108114999 A TW 108114999A TW I831777 B TWI831777 B TW I831777B
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TW
Taiwan
Prior art keywords
flow
channel
flow channel
common
channels
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TW108114999A
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English (en)
Chinese (zh)
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TW201947339A (zh
Inventor
君華 丁
麥可 雷貝西
韋恩 科爾
Original Assignee
美商Ｍｋｓ儀器股份有限公司
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Publication of TW201947339A publication Critical patent/TW201947339A/zh
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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0658—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/139—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring a value related to the quantity of the individual components and sensing at least one property of the mixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
TW108114999A 2018-05-07 2019-04-30 用於多通道質量流量和比例控制系統的方法和設備 TWI831777B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/973,190 US10698426B2 (en) 2018-05-07 2018-05-07 Methods and apparatus for multiple channel mass flow and ratio control systems
US15/973,190 2018-05-07

Publications (2)

Publication Number Publication Date
TW201947339A TW201947339A (zh) 2019-12-16
TWI831777B true TWI831777B (zh) 2024-02-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW108114999A TWI831777B (zh) 2018-05-07 2019-04-30 用於多通道質量流量和比例控制系統的方法和設備

Country Status (8)

Country Link
US (1) US10698426B2 (https=)
EP (1) EP3791242B1 (https=)
JP (1) JP7288463B2 (https=)
KR (1) KR102755306B1 (https=)
CN (1) CN112204493B (https=)
SG (1) SG11202010715SA (https=)
TW (1) TWI831777B (https=)
WO (1) WO2019217078A1 (https=)

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JP2020021176A (ja) * 2018-07-30 2020-02-06 株式会社堀場エステック 流量制御装置
US11187561B2 (en) * 2020-02-25 2021-11-30 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
US11940307B2 (en) * 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
KR102867611B1 (ko) * 2021-12-03 2025-10-14 한국전자통신연구원 멀티 포트 가스 유량 제어 장치
CN114935949A (zh) * 2022-05-30 2022-08-23 佛山市美的清湖净水设备有限公司 软水设备出水硬度调节方法、装置及电子设备
CN115274508B (zh) * 2022-08-11 2025-10-28 费斯托（中国）自动化制造有限公司 真空质量流量控制装置及其控制方法

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WO2002052363A1 (en) * 2000-12-26 2002-07-04 Mks Instruments, Inc. Pressure-based mass flow controller system
US20030234045A1 (en) * 2002-06-24 2003-12-25 Ali Shajii Apparatus and method for mass flow controller with on-line diagnostics
CN103502779A (zh) * 2011-04-19 2014-01-08 艾尼股份公司 用于测量存在于多相流中的不同流体的流量的设备及方法
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Also Published As

Publication number Publication date
SG11202010715SA (en) 2020-11-27
JP7288463B2 (ja) 2023-06-07
US20190339725A1 (en) 2019-11-07
JP2021523460A (ja) 2021-09-02
TW201947339A (zh) 2019-12-16
CN112204493B (zh) 2024-01-09
US10698426B2 (en) 2020-06-30
EP3791242A1 (en) 2021-03-17
KR102755306B1 (ko) 2025-01-20
KR20210006937A (ko) 2021-01-19
CN112204493A (zh) 2021-01-08
WO2019217078A1 (en) 2019-11-14
EP3791242B1 (en) 2022-04-06

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