JP2021523460A5 - - Google Patents

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Publication number
JP2021523460A5
JP2021523460A5 JP2020562694A JP2020562694A JP2021523460A5 JP 2021523460 A5 JP2021523460 A5 JP 2021523460A5 JP 2020562694 A JP2020562694 A JP 2020562694A JP 2020562694 A JP2020562694 A JP 2020562694A JP 2021523460 A5 JP2021523460 A5 JP 2021523460A5
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JP
Japan
Prior art keywords
flow
flow path
fluid control
shared
pressure
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JP2020562694A
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English (en)
Japanese (ja)
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JP7288463B2 (ja
JP2021523460A (ja
JPWO2019217078A5 (https=
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Priority claimed from US15/973,190 external-priority patent/US10698426B2/en
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JP2020562694A 2018-05-07 2019-04-24 多流路質量流量・質量流量比制御システムのための方法及び装置 Active JP7288463B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/973,190 US10698426B2 (en) 2018-05-07 2018-05-07 Methods and apparatus for multiple channel mass flow and ratio control systems
US15/973,190 2018-05-07
PCT/US2019/028904 WO2019217078A1 (en) 2018-05-07 2019-04-24 Methods and apparatus for multiple channel mass flow and ratio control systems

Publications (4)

Publication Number Publication Date
JP2021523460A JP2021523460A (ja) 2021-09-02
JP2021523460A5 true JP2021523460A5 (https=) 2022-03-18
JPWO2019217078A5 JPWO2019217078A5 (https=) 2022-03-18
JP7288463B2 JP7288463B2 (ja) 2023-06-07

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JP2020562694A Active JP7288463B2 (ja) 2018-05-07 2019-04-24 多流路質量流量・質量流量比制御システムのための方法及び装置

Country Status (8)

Country Link
US (1) US10698426B2 (https=)
EP (1) EP3791242B1 (https=)
JP (1) JP7288463B2 (https=)
KR (1) KR102755306B1 (https=)
CN (1) CN112204493B (https=)
SG (1) SG11202010715SA (https=)
TW (1) TWI831777B (https=)
WO (1) WO2019217078A1 (https=)

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CN115274508B (zh) * 2022-08-11 2025-10-28 费斯托（中国）自动化制造有限公司 真空质量流量控制装置及其控制方法

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