JP7277871B2 - 相互接続のためのルテニウム金属機能フィリング - Google Patents
相互接続のためのルテニウム金属機能フィリング Download PDFInfo
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- JP7277871B2 JP7277871B2 JP2020519373A JP2020519373A JP7277871B2 JP 7277871 B2 JP7277871 B2 JP 7277871B2 JP 2020519373 A JP2020519373 A JP 2020519373A JP 2020519373 A JP2020519373 A JP 2020519373A JP 7277871 B2 JP7277871 B2 JP 7277871B2
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- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 title claims description 4
- 239000002184 metal Substances 0.000 claims description 148
- 229910052751 metal Inorganic materials 0.000 claims description 148
- 238000000034 method Methods 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 39
- 239000007789 gas Substances 0.000 claims description 37
- 238000000151 deposition Methods 0.000 claims description 34
- 230000008569 process Effects 0.000 claims description 13
- 238000005229 chemical vapour deposition Methods 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 230000006911 nucleation Effects 0.000 claims description 11
- 238000010899 nucleation Methods 0.000 claims description 11
- 238000000231 atomic layer deposition Methods 0.000 claims description 9
- 238000001312 dry etching Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims description 4
- 229910004491 TaAlN Inorganic materials 0.000 claims description 3
- 229910010037 TiAlN Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 67
- 239000000463 material Substances 0.000 description 16
- 239000010949 copper Substances 0.000 description 14
- 239000003989 dielectric material Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910004541 SiN Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 1
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53242—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being a noble metal, e.g. gold
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/7684—Smoothing; Planarisation
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76883—Post-treatment or after-treatment of the conductive material
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
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Description
本出願は、2017年10月4日に出願された米国仮特許出願第62/568,218号に関連し、その優先権を主張するものであり、その全内容は参照により本明細書に組み込まれる。
本発明は、低抵抗ルテニウム(Ru)金属によるマイクロエレクトロニクスデバイスのためのビア及びトレンチなどのフィーチャのボイドの無いフィリングに関する。
Claims (18)
- ルテニウム(Ru)金属を充填する方法であって、
側壁及び底部を有するフィーチャを有する基板を提供するステップであって、前記側壁は、前記フィーチャの頂部から前記フィーチャの前記底部に延在する方向に関して逆行的なプロファイルのエリアを含む、ステップと、
前記フィーチャ内にRu金属層を堆積させるステップと、
前記フィーチャの開口周辺のフィールドエリアから前記Ru金属層を除去するステップと、
前記フィーチャ内に追加のRu金属を堆積させるステップであって、前記追加のRu金属を、前記フィールドエリア上よりも高いレートで前記フィーチャ内に堆積させる、ステップと、
を含む、方法。 - 前記追加のRu金属を、前記フィーチャがRu金属で完全に充填されるまで堆積させる、
請求項1記載の方法。 - 前記の除去するステップは、
前記基板をプラズマ励起乾式エッチングプロセスに曝露するステップを含む、
請求項1記載の方法。 - 前記プラズマ励起乾式エッチングプロセスは、
前記基板を酸素含有ガス及び任意にハロゲン含有ガスを含むプラズマ励起エッチングガスに曝露するステップを含む、
請求項3記載の方法。 - 前記方法はさらに、
前記Ru金属層を堆積させる前に、前記フィーチャ内に核形成層を形成するステップであって、
前記核形成層を、Mo、MoN、Ta、TaN、TaAlN、W、WN、Ti、TiN及びTiAlNからなる群から選択する、ステップ、
を含む請求項1記載の方法。 - 前記Ru金属層及び前記追加のRu金属層を、原子層堆積(ALD)又は化学気相堆積(CVD)によって堆積させる、
請求項1記載の方法。 - 前記Ru金属層を、Ru3(CO)12及びCOキャリアガスを用いたCVDによってコンフォーマルに堆積させる、
請求項6記載の方法。 - 前記方法はさらに、
前記フィーチャ内の前記Ru金属層をリフローするために前記基板を熱処理するステップを
含む、請求項1記載の方法。 - 前記の熱処理は、200℃と600℃との間の基板温度において行われる、
請求項8記載の方法。 - ルテニウム(Ru)金属を充填する方法であって、側壁及び底部を有するフィーチャを有する基板を提供するステップであって、前記側壁は、前記フィーチャの頂部から前記フィーチャの前記底部に延在する方向に関して逆行的なプロファイルのエリアを含む、ステップと、
前記フィーチャ内にRu金属層を堆積させるステップであって、前記フィーチャが前記Ru金属層で充填される前に、前記フィーチャの開口をピンチオフし、それにより前記フィーチャ内にボイドを形成する、ステップと、
前記のピンチオフを生じさせる過剰なRu金属を除去するステップであって、前記フィーチャの開口周辺のフィールドエリアから前記Ru金属層を除去する、ステップと、
前記フィーチャ内に追加のRu金属を堆積させるステップであって、前記追加のRu金属を、前記フィールドエリア上よりも高いレートで前記フィーチャ内に堆積させる、ステップと、
を含む、方法。 - 前記追加のRu金属を、前記フィーチャがRu金属で完全に充填されるまで堆積させる、
請求項10記載の方法。 - 前記の除去するステップは、
前記基板をプラズマ励起乾式エッチングプロセスに曝露するステップを含む、
請求項10記載の方法。 - 前記プラズマ励起乾式エッチングプロセスは、
前記基板を酸素含有ガス及び任意にハロゲン含有ガスを含むプラズマ励起エッチングガスに曝露するステップを含む、
請求項12記載の方法。 - 前記方法はさらに、
前記Ru金属層を堆積させる前に、前記フィーチャ内に核形成層を形成するステップであって、前記核形成層を、Mo、MoN、Ta、TaN、TaAlN、W、WN、Ti、TiN及びTiAlNからなる群から選択する、ステップ、
を含む、請求項10記載の方法。 - 前記Ru金属層及び前記追加のRu金属層を、原子層堆積(ALD)又は化学気相堆積(CVD)によって堆積させる、
請求項10記載の方法。 - 前記Ru金属層を、Ru3(CO)12及びCOキャリアガスを用いたCVDによってコンフォーマルに堆積させる、
請求項15記載の方法。 - 前記方法はさらに、
前記フィーチャ内の前記Ru金属層をリフローするために前記基板を熱処理するステップを
含む、請求項10記載の方法。 - 前記の熱処理は、200℃と600℃との間の基板温度において行われる、
請求項17記載の方法。
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