JP7171386B2 - 超純水製造装置の立ち上げ方法及び超純水製造装置 - Google Patents

超純水製造装置の立ち上げ方法及び超純水製造装置 Download PDF

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Publication number
JP7171386B2
JP7171386B2 JP2018219467A JP2018219467A JP7171386B2 JP 7171386 B2 JP7171386 B2 JP 7171386B2 JP 2018219467 A JP2018219467 A JP 2018219467A JP 2018219467 A JP2018219467 A JP 2018219467A JP 7171386 B2 JP7171386 B2 JP 7171386B2
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Japan
Prior art keywords
ultrapure water
water production
flow path
water
production apparatus
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JP2018219467A
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English (en)
Japanese (ja)
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JP2020081957A (ja
Inventor
恭則 松井
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Nomura Micro Science Co Ltd
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Nomura Micro Science Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nomura Micro Science Co Ltd filed Critical Nomura Micro Science Co Ltd
Priority to JP2018219467A priority Critical patent/JP7171386B2/ja
Priority to KR1020217006613A priority patent/KR20210091115A/ko
Priority to CN201980063396.5A priority patent/CN112770825B/zh
Priority to PCT/JP2019/044156 priority patent/WO2020105494A1/ja
Priority to TW108142091A priority patent/TW202039065A/zh
Publication of JP2020081957A publication Critical patent/JP2020081957A/ja
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Publication of JP7171386B2 publication Critical patent/JP7171386B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/145—Ultrafiltration
    • B01D61/146—Ultrafiltration comprising multiple ultrafiltration steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/147—Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/22—Controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B01D65/022—Membrane sterilisation
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2311/00—Details relating to membrane separation process operations and control
    • B01D2311/25—Recirculation, recycling or bypass, e.g. recirculation of concentrate into the feed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/18—Specific valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/50—Specific extra tanks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/56—Specific mechanisms for loading the membrane in a module
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/57—Tools used for removal of membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
JP2018219467A 2018-11-22 2018-11-22 超純水製造装置の立ち上げ方法及び超純水製造装置 Active JP7171386B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018219467A JP7171386B2 (ja) 2018-11-22 2018-11-22 超純水製造装置の立ち上げ方法及び超純水製造装置
KR1020217006613A KR20210091115A (ko) 2018-11-22 2019-11-11 초순수 제조 장치의 기동 방법 및 초순수 제조 장치
CN201980063396.5A CN112770825B (zh) 2018-11-22 2019-11-11 超纯水制造装置的启动方法以及超纯水制造装置
PCT/JP2019/044156 WO2020105494A1 (ja) 2018-11-22 2019-11-11 超純水製造装置の立ち上げ方法及び超純水製造装置
TW108142091A TW202039065A (zh) 2018-11-22 2019-11-20 超純水製造裝置之啟動方法及超純水製造裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018219467A JP7171386B2 (ja) 2018-11-22 2018-11-22 超純水製造装置の立ち上げ方法及び超純水製造装置

Publications (2)

Publication Number Publication Date
JP2020081957A JP2020081957A (ja) 2020-06-04
JP7171386B2 true JP7171386B2 (ja) 2022-11-15

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JP2018219467A Active JP7171386B2 (ja) 2018-11-22 2018-11-22 超純水製造装置の立ち上げ方法及び超純水製造装置

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Country Link
JP (1) JP7171386B2 (zh)
KR (1) KR20210091115A (zh)
CN (1) CN112770825B (zh)
TW (1) TW202039065A (zh)
WO (1) WO2020105494A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7033691B1 (ja) 2021-10-29 2022-03-10 野村マイクロ・サイエンス株式会社 温超純水製造システムの立ち上げ方法、立ち上げプログラム、及び温超純水製造システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003010849A (ja) 2001-07-02 2003-01-14 Kurita Water Ind Ltd 二次純水製造装置
JP2014217830A (ja) 2013-04-11 2014-11-20 栗田工業株式会社 超純水製造システム及び超純水製造供給システム
JP2018144014A (ja) 2017-03-09 2018-09-20 オルガノ株式会社 中空糸膜装置の洗浄方法、限外ろ過膜装置、超純水製造装置及び中空糸膜装置の洗浄装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2960258B2 (ja) * 1992-07-03 1999-10-06 オルガノ株式会社 超純水製造装置
JP4661009B2 (ja) * 2001-09-04 2011-03-30 栗田工業株式会社 超純水製造システム
JP4480061B2 (ja) 2002-10-03 2010-06-16 オルガノ株式会社 超純水製造装置及び該装置における超純水製造供給システムの洗浄方法
JP4034668B2 (ja) * 2003-03-04 2008-01-16 オルガノ株式会社 超純水製造システムおよびその運転方法
JP5733482B1 (ja) * 2013-07-24 2015-06-10 栗田工業株式会社 超純水製造供給システム及びその洗浄方法
JP6304259B2 (ja) * 2013-10-04 2018-04-04 栗田工業株式会社 超純水製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003010849A (ja) 2001-07-02 2003-01-14 Kurita Water Ind Ltd 二次純水製造装置
JP2014217830A (ja) 2013-04-11 2014-11-20 栗田工業株式会社 超純水製造システム及び超純水製造供給システム
JP2018144014A (ja) 2017-03-09 2018-09-20 オルガノ株式会社 中空糸膜装置の洗浄方法、限外ろ過膜装置、超純水製造装置及び中空糸膜装置の洗浄装置

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Publication number Publication date
CN112770825B (zh) 2023-05-12
KR20210091115A (ko) 2021-07-21
WO2020105494A1 (ja) 2020-05-28
CN112770825A (zh) 2021-05-07
TW202039065A (zh) 2020-11-01
JP2020081957A (ja) 2020-06-04

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