JP7033691B1 - 温超純水製造システムの立ち上げ方法、立ち上げプログラム、及び温超純水製造システム - Google Patents
温超純水製造システムの立ち上げ方法、立ち上げプログラム、及び温超純水製造システム Download PDFInfo
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- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 387
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 387
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 96
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 517
- 238000000034 method Methods 0.000 claims abstract description 51
- 239000008400 supply water Substances 0.000 claims abstract description 40
- 239000012528 membrane Substances 0.000 claims description 37
- 238000000108 ultra-filtration Methods 0.000 claims description 26
- 238000005342 ion exchange Methods 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 14
- YDLQKLWVKKFPII-UHFFFAOYSA-N timiperone Chemical compound C1=CC(F)=CC=C1C(=O)CCCN1CCC(N2C(NC3=CC=CC=C32)=S)CC1 YDLQKLWVKKFPII-UHFFFAOYSA-N 0.000 claims description 9
- 229950000809 timiperone Drugs 0.000 claims description 9
- 230000006866 deterioration Effects 0.000 abstract description 19
- 238000010586 diagram Methods 0.000 abstract description 4
- 229910052731 fluorine Inorganic materials 0.000 description 34
- 239000011737 fluorine Substances 0.000 description 34
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 29
- 239000002033 PVDF binder Substances 0.000 description 27
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 27
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 19
- 230000008569 process Effects 0.000 description 11
- 239000000126 substance Substances 0.000 description 10
- -1 that is Substances 0.000 description 8
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 7
- 238000007872 degassing Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000003456 ion exchange resin Substances 0.000 description 7
- 229920003303 ion-exchange polymer Polymers 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000001172 regenerating effect Effects 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000010828 elution Methods 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 238000004904 shortening Methods 0.000 description 4
- 238000010792 warming Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012510 hollow fiber Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003480 eluent Substances 0.000 description 1
- 239000003673 groundwater Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005374 membrane filtration Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
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- F24D17/00—Domestic hot-water supply systems
- F24D17/0078—Recirculation systems
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- F24—HEATING; RANGES; VENTILATING
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- F24D17/00—Domestic hot-water supply systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
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- C02F1/28—Treatment of water, waste water, or sewage by sorption
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- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
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Abstract
Description
14 前処理装置
16 一次純水装置
18 純水タンク
20 二次純水装置
22 水温調整装置
24 ユースポイント
26 クーラー
28 紫外線酸化装置
30 触媒樹脂
32 膜脱気装置
34 非再生型イオン交換樹脂
36 第一限外濾過膜
40 プレヒーター
42 ヒーター
44 第二限外濾過膜
50 配管
50A 第一リターン配管
50B 第二リターン配管
50C 第三リターン配管
50D PVDF配管
Claims (12)
- 超純水をユースポイントへの供給水温に加熱し温超純水を製造する温超純水製造システムの立ち上げ方法であって、
常温以上で且つ前記供給水温以下の水温範囲内で、前記超純水を常温よりも高温に昇温させた昇温水と、前記昇温水よりも低温に降温させた降温水と、を前記温超純水が流れる温超純水配管に交互に通水する、温超純水製造システムの立ち上げ方法。 - 前記温超純水製造システムが、前記超純水を水温調整して前記供給水温にする水温調整装置を備えており、
前記水温調整装置を用いて、前記超純水への前記昇温と前記降温とを行う請求項1に記載の温超純水製造システムの立ち上げ方法。 - 前記昇温水の水温は、前記供給水温よりも10℃低い水温以上である請求項2に記載の温超純水製造システムの立ち上げ方法。
- 前記降温水の水温は、50℃以下である請求項3に記載の温超純水製造システムの立ち上げ方法。
- 前記温超純水配管への前記昇温水の通水1回あたりの連続通水時間が3時間以上24時間以下である請求項1~請求項4の何れか一項に記載の温超純水製造システムの立ち上げ方法。
- 前記温超純水配管への前記降温水の通水1回あたりの連続通水時間が3時間以上24時間以下である請求項1~請求項4の何れか一項に記載の温超純水製造システムの立ち上げ方法。
- 前記超純水の昇温時及び降温時の単位時間当たりの水温変化の絶対値が0.2℃/分以上で5.0℃/分以下である請求項1~請求項4のいずれか一項に記載の温超純水製造システムの立ち上げ方法。
- 前記温超純水配管への前記昇温水の1回の通水と前記降温水の1回の通水とを通水サイクルとして、前記通水サイクルを3回以上10回以下で繰り返す請求項1~請求項4のいずれか一項に記載の温超純水製造システムの立ち上げ方法。
- 前記温超純水配管への前記昇温水と前記降温水との交互の通水を、前記温超純水製造システムから前記ユースポイントへの前記温超純水の供給前に行う、請求項1~請求項4の何れか一項に記載の温超純水製造システムの立ち上げ方法。
- 超純水をユースポイントへの供給水温に加熱し温超純水を製造する温超純水製造システムの立ち上げプログラムであって、
常温以上で且つ前記供給水温以下の水温範囲内で、前記超純水を常温よりも高温に昇温させた昇温水と、前記昇温水よりも低温に降温させた降温水と、を前記温超純水が流れる温超純水配管に交互に通水することを含む処理をコンピュータに実行させる、温超純水製造システムの立ち上げプログラム。 - 超純水を製造する超純水製造装置と、
前記超純水製造装置で製造された前記超純水を水温調整しユースポイントへの供給水温に昇温して温超純水とする水温調整装置と、
前記水温調整装置の内部、及び、前記水温調整装置とユースポイント間に設けられて前
記温超純水が流れる温超純水配管と、
前記超純水から、常温以上で且つ前記ユースポイントへの供給水温以下の水温範囲内で、前記常温よりも昇温させた昇温水と、前記昇温水よりも降温させた降温水と、を交互に生成するように、前記水温調整装置を制御する制御装置と、
を有する温超純水製造システム。 - 超純水を製造する超純水製造装置と、
前記超純水製造装置で製造された前記超純水を水温調整しユースポイントへの供給水温に昇温して温超純水とする水温調整装置と、
前記水温調整装置の内部、及び、前記水温調整装置とユースポイント間に設けられて前記温超純水が流れる温超純水配管と、
を有し、
前記超純水製造装置が、
被処理水からイオン交換により異物を除去するイオン交換装置と、
前記イオン交換装置よりも前記被処理水の流れ方向の下流に設けられる第一限外濾過膜と、
を有し、
前記水温調整装置が、
前記超純水と熱媒との熱交換を行う熱交換器と、
前記熱交換器よりも前記超純水の流れ方向の下流に設けられる第二限外濾過膜と、
で構成され、
前記超純水が前記超純水製造装置から前記ユースポイントに直接的に流れる超純水配管と、
前記超純水配管から分岐し前記超純水が前記水温調整装置に流れる分岐配管と、
を有する、温超純水製造システム。
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JP2021177165A JP7033691B1 (ja) | 2021-10-29 | 2021-10-29 | 温超純水製造システムの立ち上げ方法、立ち上げプログラム、及び温超純水製造システム |
KR1020220089494A KR102521177B1 (ko) | 2021-10-29 | 2022-07-20 | 온 초순수 제조 시스템의 기동 방법, 기동 프로그램 및 온 초순수 제조 시스템 |
TW111127320A TWI793049B (zh) | 2021-10-29 | 2022-07-21 | 溫超純水製造系統之初始方法、初始程式及溫超純水製造系統 |
US17/876,624 US11926536B2 (en) | 2021-10-29 | 2022-07-29 | Method for starting up hot ultrapure water production system, and hot ultrapure water production system |
CN202210910255.6A CN116081848A (zh) | 2021-10-29 | 2022-07-29 | 温超纯水制造系统及其启动方法、及计算机可读存储介质 |
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JP2013202610A (ja) | 2012-03-30 | 2013-10-07 | Kurita Water Ind Ltd | 超純水製造装置 |
JP2014217830A (ja) | 2013-04-11 | 2014-11-20 | 栗田工業株式会社 | 超純水製造システム及び超純水製造供給システム |
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JP2013202610A (ja) | 2012-03-30 | 2013-10-07 | Kurita Water Ind Ltd | 超純水製造装置 |
JP2014217830A (ja) | 2013-04-11 | 2014-11-20 | 栗田工業株式会社 | 超純水製造システム及び超純水製造供給システム |
JP2017200683A (ja) | 2016-05-06 | 2017-11-09 | 野村マイクロ・サイエンス株式会社 | 超純水製造装置の立ち上げ方法 |
JP2018043228A (ja) | 2017-05-24 | 2018-03-22 | 栗田工業株式会社 | 超純水製造装置 |
JP2019152411A (ja) | 2018-03-06 | 2019-09-12 | 栗田工業株式会社 | 超純水の加熱方法 |
WO2020105494A1 (ja) | 2018-11-22 | 2020-05-28 | 野村マイクロ・サイエンス株式会社 | 超純水製造装置の立ち上げ方法及び超純水製造装置 |
JP2021120988A (ja) | 2020-01-30 | 2021-08-19 | 栗田工業株式会社 | 温純水供給装置の加熱手段の制御方法 |
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