JP7162734B2 - 荷電粒子線装置 - Google Patents

荷電粒子線装置 Download PDF

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JP7162734B2
JP7162734B2 JP2021514762A JP2021514762A JP7162734B2 JP 7162734 B2 JP7162734 B2 JP 7162734B2 JP 2021514762 A JP2021514762 A JP 2021514762A JP 2021514762 A JP2021514762 A JP 2021514762A JP 7162734 B2 JP7162734 B2 JP 7162734B2
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image
charged particle
particle beam
deterioration
computer
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JPWO2020213145A1 (https=
JPWO2020213145A5 (https=
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諒 小松崎
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/23—Clustering techniques
    • G06F18/232—Non-hierarchical techniques
    • G06F18/2321—Non-hierarchical techniques using statistics or function optimisation, e.g. modelling of probability density functions
    • G06F18/23213—Non-hierarchical techniques using statistics or function optimisation, e.g. modelling of probability density functions with fixed number of clusters, e.g. K-means clustering
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/762—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using clustering, e.g. of similar faces in social networks
    • G06V10/763—Non-hierarchical techniques, e.g. based on statistics of modelling distributions
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/401—Imaging image processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/24—Indexing scheme for image data processing or generation, in general involving graphical user interfaces [GUIs]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20092—Interactive image processing based on input by user
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/221—Image processing

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Artificial Intelligence (AREA)
  • General Health & Medical Sciences (AREA)
  • Software Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Medical Informatics (AREA)
  • Databases & Information Systems (AREA)
  • Computing Systems (AREA)
  • Multimedia (AREA)
  • Data Mining & Analysis (AREA)
  • Probability & Statistics with Applications (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2021514762A 2019-04-18 2019-04-18 荷電粒子線装置 Active JP7162734B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/016720 WO2020213145A1 (ja) 2019-04-18 2019-04-18 荷電粒子線装置

Publications (3)

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JPWO2020213145A1 JPWO2020213145A1 (https=) 2020-10-22
JPWO2020213145A5 JPWO2020213145A5 (https=) 2022-03-24
JP7162734B2 true JP7162734B2 (ja) 2022-10-28

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US (1) US11928801B2 (https=)
JP (1) JP7162734B2 (https=)
KR (1) KR102643362B1 (https=)
CN (2) CN113728411B (https=)
WO (1) WO2020213145A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021240801A1 (ja) * 2020-05-29 2021-12-02 株式会社日立ハイテク 荷電粒子線装置において試料の位置を制御する方法、プログラム、記憶媒体、制御装置および荷電粒子線装置
WO2022233591A1 (en) * 2021-05-04 2022-11-10 Asml Netherlands B.V. System and method for distributed image recording and storage for charged particle systems
US12423772B2 (en) * 2022-02-17 2025-09-23 Fei Company Systems and methods for hybrid enhancement of scanning electron microscope images
WO2025131496A1 (en) * 2023-12-20 2025-06-26 Carl Zeiss Multisem Gmbh Frame aggregation for multi-beam raster scanning microscopes

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000294185A (ja) 1999-04-05 2000-10-20 Canon Inc 分析装置および透過電子顕微鏡
JP2001256480A (ja) 2000-03-09 2001-09-21 Hitachi Ltd 画像自動分類方法及び装置
WO2003044821A1 (en) 2001-11-21 2003-05-30 Hitachi High-Technologies Corporation Sample imaging method and charged particle beam system
JP2008124625A (ja) 2006-11-09 2008-05-29 Sanyo Electric Co Ltd 撮像装置
JP2015094973A (ja) 2013-11-08 2015-05-18 株式会社リコー 画像処理装置、画像処理方法、画像処理プログラム、及び記録媒体
JP2016178037A (ja) 2015-03-20 2016-10-06 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置及び荷電粒子ビーム装置を用いた画像の生成方法並びに画像処理装置
JP2019008599A (ja) 2017-06-26 2019-01-17 株式会社 Ｎｇｒ 順伝播型ニューラルネットワークを用いた画像ノイズ低減方法

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US6538249B1 (en) * 1999-07-09 2003-03-25 Hitachi, Ltd. Image-formation apparatus using charged particle beams under various focus conditions
JP4301385B2 (ja) * 2000-06-30 2009-07-22 株式会社ホロン 画像処理装置および記録媒体
US7034296B2 (en) * 2001-11-21 2006-04-25 Hitachi High-Technologies Corporation Method of forming a sample image and charged particle beam apparatus
JP4383950B2 (ja) * 2004-04-23 2009-12-16 株式会社日立ハイテクノロジーズ 荷電粒子線調整方法、及び荷電粒子線装置
US20090112644A1 (en) 2007-10-24 2009-04-30 Isom Pamela K System and Method For Implementing a Service Oriented Architecture in an Enterprise
US8126197B2 (en) * 2007-11-29 2012-02-28 Certifi-Media Inc. Method for image quality assessment using quality vectors
JP5164754B2 (ja) * 2008-09-08 2013-03-21 株式会社日立ハイテクノロジーズ 走査型荷電粒子顕微鏡装置及び走査型荷電粒子顕微鏡装置で取得した画像の処理方法
JP5948074B2 (ja) * 2012-02-13 2016-07-06 株式会社日立ハイテクノロジーズ 画像形成装置及び寸法測定装置
JP6121704B2 (ja) * 2012-12-10 2017-04-26 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2014207110A (ja) * 2013-04-12 2014-10-30 株式会社日立ハイテクノロジーズ 観察装置および観察方法
CN108292577B (zh) * 2015-11-27 2019-12-17 株式会社日立高新技术 带电粒子射线装置及带电粒子射线装置中的图像处理方法
JP2017187850A (ja) * 2016-04-01 2017-10-12 株式会社リコー 画像処理システム、情報処理装置、プログラム
JP6805034B2 (ja) * 2017-03-13 2020-12-23 株式会社日立製作所 荷電粒子線装置
US10169873B2 (en) * 2017-03-23 2019-01-01 International Business Machines Corporation Weakly supervised probabilistic atlas generation through multi-atlas label fusion
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
KR102917833B1 (ko) * 2018-08-15 2026-01-28 에이에스엠엘 네델란즈 비.브이. 원시 이미지들로부터 고품질 평균 sem 이미지들의 자동 선택 시 기계 학습 활용

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000294185A (ja) 1999-04-05 2000-10-20 Canon Inc 分析装置および透過電子顕微鏡
JP2001256480A (ja) 2000-03-09 2001-09-21 Hitachi Ltd 画像自動分類方法及び装置
WO2003044821A1 (en) 2001-11-21 2003-05-30 Hitachi High-Technologies Corporation Sample imaging method and charged particle beam system
JP2008124625A (ja) 2006-11-09 2008-05-29 Sanyo Electric Co Ltd 撮像装置
JP2015094973A (ja) 2013-11-08 2015-05-18 株式会社リコー 画像処理装置、画像処理方法、画像処理プログラム、及び記録媒体
JP2016178037A (ja) 2015-03-20 2016-10-06 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置及び荷電粒子ビーム装置を用いた画像の生成方法並びに画像処理装置
JP2019008599A (ja) 2017-06-26 2019-01-17 株式会社 Ｎｇｒ 順伝播型ニューラルネットワークを用いた画像ノイズ低減方法

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KR102643362B1 (ko) 2024-03-07
US11928801B2 (en) 2024-03-12
KR20210133293A (ko) 2021-11-05
JPWO2020213145A1 (https=) 2020-10-22
CN113728411A (zh) 2021-11-30
WO2020213145A1 (ja) 2020-10-22
US20220261973A1 (en) 2022-08-18
CN113728411B (zh) 2025-01-03
CN119920664A (zh) 2025-05-02

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