JP7141724B2 - 基板上の電子部品を焼結するための焼結プレス機および方法 - Google Patents
基板上の電子部品を焼結するための焼結プレス機および方法 Download PDFInfo
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Description
Claims (11)
- 基板(12)上の複数の電子部品(10)の焼結を行うための焼結プレス機であって、圧縮室(26)を共に画定するフロントヘッド(22)およびリアヘッド(24)を有するマルチロッドシリンダ(20)を備えるプレスユニット(14)を備え、前記フロントヘッド(22)において、互いに平行で独立した複数のプレッサロッド(28)が摺動自在に支持されており、前記複数のプレッサロッド(28)はそれぞれのロッド軸を有し、前記それぞれのロッド軸は、焼結対象のそれぞれの前記電子部品(10)の重心が前記それぞれのロッド軸と一致するように配置され得るようになっており、前記複数のプレッサロッド(28)は、それぞれの前記電子部品(10)に印加すべき力に比例するそれぞれのスラスト断面を有し、焼結対象の各電子部品の面積は既知であり、所定の焼結圧力については、前記圧縮室(26)において、前記圧縮室(26)をリアチャンバ(26’)とフロントチャンバ(26’’)とに密封分割するシール膜(30)が延在し、前記リアチャンバ(26’)は焼結圧力での圧力下で流体のための入口通路(32)と流体連通し、前記フロントチャンバ(26’’)は、略平らな後壁(26a)によって画定されており、前記プレッサロッド(28)の後端部(28’)は前記後壁(26a)から突出しており、前記フロントチャンバ(26’’)の前記後壁(26a)に対する前記プレッサロッド(28)の前記後端部(28’)の突出、したがって前記シール膜(30)と前記後壁(26a)との間の距離が、前記シール膜(30)が略平らでありかつ前記プレッサロッド(28)の前記後端部(28’)に微かに触れるように配置される非アクティブ位置と、各プレッサロッド(28)に焼結圧力を相互に独立して伝達するために前記シール膜(30)が前記プレッサロッド(28)の前記後端部(28’)および前記後壁(26a)の両方に当接するアクティブ位置との間で前記シール膜(30)が変形可能であるように、選択される、焼結プレス機。
- 前記シール膜(30)は前記マルチロッドシリンダ(20)の前記フロントヘッド(22)と前記リアヘッド(24)との間で周状に保持される、請求項1に記載のプレス機。
- 前記プレスユニット(14)は、前記マルチロッドシリンダ(20)と一体であり、かつ複数のプレッサ加熱部材(42)を摺動自在に支持する加熱ブロック(40)を更に備え、各プレッサ加熱部材(42)は、焼結対象のそれぞれの電子部品(10)に作用するようにそれぞれのプレッサロッド(28)によって作動可能であり、前記加熱ブロック(40)には、前記プレッサ加熱部材(42)を加熱するための加熱手段(44)が設けられ、各プレッサロッド(28)は、それぞれのプレッサ加熱部材(42)の平らな端面と接触する丸い前端部(28’’)で終端している、請求項1または2に記載のプレス機。
- 前記プレッサ加熱部材(42)は棒状の形態である、請求項3に記載のプレス機。
- 前記プレッサ加熱部材(42)は、前記基板(12)によって画定される平面に対して前記電子部品(10)が傾斜する可能性に適応するように、前記加熱ブロック(40)内に形成されたそれぞれの軸方向シート(46)内で横断方向に間隔を空けて摺動する、請求項3または4に記載のプレス機。
- 前記プレスユニット(14)は、前記プレッサロッド(28)の前端部、または存在する場合には、前記プレッサ加熱部材(42)の前記前端部を越えて延在するPTFEの保護フィルム(52)を支持する周辺フレーム(50)と、前記保護フィルム(52)に面し、前記保護フィルム(52)を、前記プレッサロッド(28)の前端部(28’’)および/または前記プレッサ加熱部材(42)の前端部に付着/前記プレッサロッド(28)の前端部(28’’)および/または前記プレッサ加熱部材(42)の前端部から剥離させるように適合された吸引/吹付手段とを備える、請求項3~5のいずれか一項に記載のプレス機。
- 前記プレスユニット(14)に面し、少なくとも1つの基板(12)を支持するように適合された支持ユニット(60)を備え、前記プレスユニット(14)および支持ユニット(60)の少なくとも一方は、後退停止位置と、前記電子部品(10)が前記プレッサロッド(28)または前記プレッサ加熱部材(42)と係合可能な前進プレス位置との間で、他方に対して軸方向に移動可能である、請求項1から6のいずれか一項に記載のプレス機。
- 請求項1から7のいずれか1項に記載の焼結プレス機を用いて基板上の電子部品を焼結する方法であって、
a)前記電子部品が前記プレッサロッドまたは前記プレッサ加熱部材の前端部と接触するように、焼結対象の前記電子部品を有する基板を配置するステップと、
b)前記プレッサロッドまたは前記プレッサ加熱部材を所定の焼結温度に加熱するステップと、
c)前記圧縮室を所定の焼結圧力で加圧するステップと、
d)所定の焼結時間の間、前記焼結圧力および前記焼結温度を維持するステップと、
e)前記焼結プレス機から前記基板を取り出すステップと、
を含み、
前記圧縮室を前記所定の焼結圧力で加圧するステップの間、前記シール膜が、前記プレッサロッドの前記後端部と前記フロントチャンバの前記略平らな後壁との両方に接触するように変形される、
方法。 - 前記基板も焼結温度に加熱する、請求項8に記載の方法。
- ステップa)の前に、保護フィルムを前記プレッサロッドまたは前記プレッサ加熱部材の端部に付着させる、請求項8または9に記載の方法。
- ステップe)の後、前記圧縮室は前記焼結圧力よりも低いが大気圧よりも高い圧力にされる、請求項8~10のいずれか1項に記載の方法。
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201800007256A1 (it) * | 2018-07-17 | 2020-01-17 | Organo pressore, gruppo di pressatura e pressa di sinterizzazione di componenti elettronici su un substrato | |
IT201800020275A1 (it) | 2018-12-20 | 2020-06-20 | Amx Automatrix S R L | Pressa di sinterizzazione per sinterizzare componenti elettronici su un substrato |
IT201800020272A1 (it) * | 2018-12-20 | 2020-06-20 | Amx Automatrix S R L | Pressa di sinterizzazione per sinterizzare componenti elettronici su un substrato |
EP3709342A1 (en) * | 2019-03-12 | 2020-09-16 | Infineon Technologies AG | Arrangement and method for joining at least two joining members using a foil on a carrier element interposed between the upper one of the joining members and a pressure exerting part |
DE102021118949A1 (de) | 2021-07-22 | 2023-01-26 | Semikron Elektronik Gmbh & Co. Kg | Vorrichtung und Verfahren zur Drucksinterverbindung |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002110744A (ja) | 2000-09-26 | 2002-04-12 | Matsushita Electric Ind Co Ltd | 半導体実装装置、および半導体実装方法 |
US20100078463A1 (en) | 2008-09-25 | 2010-04-01 | Infineon Technologies Ag | Device and method for making a semiconductor device including bonding two bonding partners |
JP2016507164A (ja) | 2013-02-06 | 2016-03-07 | ボッシュマン テクノロジーズ ビーヴイ | 半導体ダイ封入又は実装方法及び対応する半導体ダイ封入又は実装装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05285978A (ja) | 1992-04-15 | 1993-11-02 | Apic Yamada Kk | 樹脂モールド装置 |
JPH05329871A (ja) | 1992-06-04 | 1993-12-14 | Sumitomo Heavy Ind Ltd | トランスファモールド装置 |
JP3039188B2 (ja) | 1993-03-23 | 2000-05-08 | 松下電器産業株式会社 | 電子部品の製造方法 |
JP2555963B2 (ja) | 1993-12-10 | 1996-11-20 | 日本電気株式会社 | 樹脂封止半導体装置用ゲート分離装置 |
JP3026550B2 (ja) | 1996-05-07 | 2000-03-27 | 富士通株式会社 | 半導体装置の製造方法 |
JP3017470B2 (ja) | 1997-07-11 | 2000-03-06 | アピックヤマダ株式会社 | 樹脂モールド方法及び樹脂モールド装置 |
JPH11121479A (ja) | 1997-10-17 | 1999-04-30 | Fujitsu Ltd | 半導体部品の実装方法および実装装置 |
JP3005534B1 (ja) | 1998-08-25 | 2000-01-31 | 九州日本電気株式会社 | 樹脂封止成形方法 |
JP2000216171A (ja) | 1999-01-22 | 2000-08-04 | Hitachi Ltd | ペレットボンディング法及びその装置と樹脂封止半導体装置 |
JP4102534B2 (ja) | 1999-12-06 | 2008-06-18 | Towa株式会社 | 電子部品の樹脂封止成形方法 |
JP2003133706A (ja) | 2001-10-22 | 2003-05-09 | Matsushita Electric Ind Co Ltd | 圧着装置および圧着方法 |
JP4017480B2 (ja) | 2002-09-24 | 2007-12-05 | Towa株式会社 | 樹脂封止金型 |
JP2004119594A (ja) * | 2002-09-25 | 2004-04-15 | Canon Inc | 一括接合装置 |
US20050280189A1 (en) * | 2004-06-22 | 2005-12-22 | The Boeing Company | Undercut For Bushing Retention For SLS Details |
JP2006156796A (ja) | 2004-11-30 | 2006-06-15 | Towa Corp | 半導体チップの樹脂封止成形方法、及び、装置 |
DE102006003735A1 (de) | 2006-01-26 | 2007-08-09 | Infineon Technologies Ag | Anordnung zum Befestigen von elektronischen Bauelementen auf einem Träger |
JP2007317738A (ja) | 2006-05-23 | 2007-12-06 | Matsushita Electric Ind Co Ltd | 部品圧着実装機の加重測定方法と装置、それらを用いた部品圧着実装機 |
FR2902200B1 (fr) | 2006-06-07 | 2008-09-12 | Essilor Int | Pastille de modification d'une puissance d'un composant optique |
JP5070896B2 (ja) | 2007-03-19 | 2012-11-14 | 富士通セミコンダクター株式会社 | 電子部品の樹脂封止方法、樹脂封止用金型及び半導体装置の製造方法 |
CN101688500B (zh) * | 2007-04-23 | 2015-07-01 | 新动力概念有限公司 | 斯特林循环机器 |
TWI501828B (zh) * | 2012-03-13 | 2015-10-01 | 晶片壓合裝置及方法 | |
ITMI20120456A1 (it) * | 2012-03-23 | 2013-09-24 | Microtel Tecnologie Elettroniche S P A | Sensore di pressione ceramico e relativo metodo di produzione, e trasduttore che incorpora un sensore di pressione ceramico |
JP5777660B2 (ja) | 2013-05-17 | 2015-09-09 | アサヒ・エンジニアリング株式会社 | 樹脂成形装置及び半導体装置の製造方法 |
IT201800006846A1 (it) * | 2018-07-02 | 2020-01-02 | Gruppo di pressatura per una pressa di sinterizzazione di componenti elettronici su un substrato |
-
2017
- 2017-01-02 IT IT102017000000191A patent/IT201700000191A1/it unknown
- 2017-12-29 WO PCT/IB2017/058520 patent/WO2018122795A1/en active Application Filing
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- 2017-12-29 US US16/475,395 patent/US11380647B2/en active Active
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002110744A (ja) | 2000-09-26 | 2002-04-12 | Matsushita Electric Ind Co Ltd | 半導体実装装置、および半導体実装方法 |
US20100078463A1 (en) | 2008-09-25 | 2010-04-01 | Infineon Technologies Ag | Device and method for making a semiconductor device including bonding two bonding partners |
JP2016507164A (ja) | 2013-02-06 | 2016-03-07 | ボッシュマン テクノロジーズ ビーヴイ | 半導体ダイ封入又は実装方法及び対応する半導体ダイ封入又は実装装置 |
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