JP7137697B2 - 高流速でガスパージされる側部収納ポッド装置、アセンブリ、及び方法 - Google Patents
高流速でガスパージされる側部収納ポッド装置、アセンブリ、及び方法 Download PDFInfo
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Description
1)相対湿度(RH)、
2)温度(T)、
3)O2の量、又は
4)EFEMチャンバ114C及び/又は側部収納ポッドチャンバ123内の不活性ガス及び/又は非反応性ガスの量。
EFEM114の他の環境条件において、側部収納ポッド収納チャンバ123は、EFEMチャンバ114C内への若しくはそれを通過するガス流通速度及び/若しくは側部収納ポッドチャンバ123内のガス流通速度V、又はEFEMチャンバ114C、側部収納チャンバ123、若しくはその両方の圧力などが、監視及び/又は制御されうる。
Claims (24)
- 機器フロントエンドモジュールの側部収納ポッド装置であって、
前記機器フロントエンドモジュールの本体の側壁に連結するように構成された表面と、前記機器フロントエンドモジュールから基板を受け入れ、且つ前記機器フロントエンドモジュールからパージガスの流れを受け入れるように構成された開口部とを有する側部収納容器と、
基板を支持するように構成された複数の支持部材を有する、前記側部収納容器内の側部収納チャンバと、
前記側部収納チャンバに近接して設けられたプレナムチャンバであって、前記側部収納チャンバとは別個のチャンバである、プレナムチャンバと、
前記側部収納容器と前記プレナムチャンバを包囲する保持容器と、
前記プレナムチャンバと、前記パージガスを排気処理スクラバに送る排気導管とに連結された排気口と
を備える、側部収納ポッド装置。 - 前記プレナムチャンバが、前記開口部とは反対側の前記側部収納容器の側面に位置決めされる、請求項1に記載の側部収納ポッド装置。
- 前記プレナムチャンバが、バッフルプレートによって前記側部収納チャンバから分離される、請求項1に記載の側部収納ポッド装置。
- 前記バッフルプレートが、前記側部収納チャンバを通して実質的なガス流均一性をもたらすように適合される、請求項3に記載の側部収納ポッド装置。
- 前記バッフルプレートを通って形成された一連の流路を更に備える、請求項3に記載の側部収納ポッド装置。
- 前記一連の流路の少なくともいくつかが、異なる断面積を有する、請求項5に記載の側部収納ポッド装置。
- 前記一連の流路が、前記バッフルプレートの1つの垂直部分に位置決めされた一組のより大きな流路と、前記バッフルプレートの別の垂直部分に位置決めされた一組のより小さな流路とを備える、請求項5に記載の側部収納ポッド装置。
- 前記一組のより大きな流路が、前記バッフルプレートの一端に向かって位置する、請求項7に記載の側部収納ポッド装置。
- 前記一組のより大きな流路が、前記排気口から垂直に離れて位置決めされる、請求項7に記載の側部収納ポッド装置。
- 前記排気口が、前記プレナムチャンバの底部分に連結される、請求項1に記載の側部収納ポッド装置。
- 前記プレナムチャンバを前記側部収納チャンバから分離するためのバッフルプレートを更に備え、前記バッフルプレートが、前記バッフルプレートを通る異なる断面積を有する一連の流路を備え、前記一連の流路が、前記プレナムチャンバの上端に近接して位置する一組のより大きな流路と、前記プレナムチャンバの底部端に近接して位置する一組のより小さな流路とを含む、請求項1に記載の側部収納ポッド装置。
- 前記排気口に連結され、前記保持容器の壁を通過する排気導管を更に備える、請求項1に記載の側部収納ポッド装置。
- 前記排気口、又は前記排気口に連結された排気導管に連結された補助ファンを更に備える、請求項1に記載の側部収納ポッド装置。
- 機器フロントエンドモジュールであって、
機器フロントエンド本体と、
前記機器フロントエンド本体の側壁に連結された側部収納ポッド装置と
を備え、前記側部収納ポッド装置が、
前記機器フロントエンド本体の側壁に連結するように構成された表面を有する側部収納容器と、
前記機器フロントエンドモジュールから基板を受け入れ、且つ前記機器フロントエンドモジュールからパージガスの流れを受け入れる開口部と、
基板を支持するように各々が構成された、垂直方向に間隔が取られた複数の収納部材を有する、前記側部収納容器内の側部収納ポッドチャンバと、
前記側部収納ポッドチャンバとは別個のチャンバを備える、前記側部収納容器内のプレナムチャンバと、
前記プレナムチャンバを前記側部収納ポッドチャンバから分離するように構成されたバッフルプレートと、
前記側部収納容器と前記プレナムチャンバを包囲する保持容器と、
前記プレナムチャンバと、前記パージガスを排気処理スクラバに送る排気導管とに連結された排気口と
を更に備える、機器フロントエンドモジュール。 - 機器フロントエンドモジュールを備える電子デバイス処理アセンブリであって、前記機器フロントエンドモジュールが、
機器フロントエンドモジュールチャンバを形成する機器フロントエンドモジュール本体と、
前記機器フロントエンドモジュール本体の前壁に連結された1つ又は複数のロードポートであって、基板キャリアをそこにドッキングするように各々が構成された1つ又は複数のロードポートと、
前記機器フロントエンドモジュール本体の側壁に連結された側部収納ポッド装置と
を含み、前記側部収納ポッド装置が、
側部収納ポッドチャンバの壁を画定し、前記機器フロントエンドモジュール本体に連結するように構成されたシール面を有する側部収納容器であって、前記壁が、基板を支持するように構成された、垂直方向に間隔が取られた複数の支持部材を含む、側部収納容器と、
前記機器フロントエンドモジュールから基板を受け入れ、且つ前記機器フロントエンドモジュールからパージガスの流れを受け入れる開口部と、
前記側部収納ポッドチャンバとは別個のチャンバを備える、前記側部収納容器内のプレナムチャンバと、
前記プレナムチャンバを前記側部収納ポッドチャンバから分離するように構成されたバッフルプレートと、
前記側部収納容器と前記プレナムチャンバを包囲する保持容器と、
排気口と、
前記パージガスを排気処理スクラバに送る、前記排気口に連結された排気導管と、
前記排気口又は前記排気導管に連結された補助ファンと
を備える、電子デバイス処理アセンブリ。 - 前記機器フロントエンドモジュールチャンバに連結された環境制御システムであって、前記機器フロントエンドモジュールチャンバに環境制御された雰囲気を提供するための環境制御システムを更に備える、請求項15に記載の電子デバイス処理アセンブリ。
- 基板を処理する方法であって、
機器フロントエンドモジュール本体及び機器フロントエンドモジュールチャンバを含む機器フロントエンドモジュールを提供することであって、前記機器フロントエンドモジュールは、機器フロントエンドモジュール本体の前壁に連結された1つ又は複数のロードポートであって各ロードポートが基板キャリアを支持するように構成されている1つ又は複数のロードポートと、前記機器フロントエンドモジュールの側壁に連結された側部収納ポッド装置とを含む、機器フロントエンドモジュールを提供することと、
前記側部収納ポッド装置において、バッフルプレートによって分離された側部収納ポッドチャンバ及びプレナムチャンバと、前記側部収納ポッドチャンバ及び前記プレナムチャンバの壁を画定する側部収納容器と、前記側部収納容器と前記プレナムチャンバを包囲する保持容器と、前記プレナムチャンバに連結された排気口とを提供することと、
前記機器フロントエンドモジュールから、前記バッフルプレートを通って前記プレナムチャンバへと、前記側部収納ポッドチャンバ内に収納された基板全体にパージガスを流すことと、
前記パージガスを、前記プレナムチャンバから前記排気口を通って排気することと、
前記パージガスを、排気処理スクラバに送ることと
を含む、方法。 - 補助ファンを用いて、前記パージガスが前記側部収納ポッドチャンバを通って流れることを補助することを更に含む、請求項17に記載の方法。
- 前記基板全体に前記パージガスを流すことが、毎分100立方フィート(cfm)以上のガス流速を含む、請求項17に記載の方法。
- 前記ガス流速が、140cfm以上である、請求項19に記載の方法。
- 前記ガス流速が、160cfm以上である、請求項19に記載の方法。
- 前記ガス流速が、100cfm以上200cfm以下である、請求項19に記載の方法。
- 前記側部収納ポッドチャンバが複数の基板を含み、前記方法が、前記側部収納ポッドチャンバに収容された複数の基板のそれぞれの上でガス流速が実質的に均一となるようにすることを含む、請求項17に記載の方法。
- 前記排気導管と、
前記排気導管に取り付けられた前記排気処理スクラバと
を更に備え、前記排気処理スクラバが化学フィルタを備える、請求項1に記載の側部収納ポッド装置。
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