JP7101551B2 - 選択的に対象膜を形成する方法およびシステム - Google Patents
選択的に対象膜を形成する方法およびシステム Download PDFInfo
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- JP7101551B2 JP7101551B2 JP2018125837A JP2018125837A JP7101551B2 JP 7101551 B2 JP7101551 B2 JP 7101551B2 JP 2018125837 A JP2018125837 A JP 2018125837A JP 2018125837 A JP2018125837 A JP 2018125837A JP 7101551 B2 JP7101551 B2 JP 7101551B2
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
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Description
<経緯および概要>
最初に、本開示の方法の経緯および概要について説明する。
SAMを用いた選択成膜は、従来、例えば、表面が金属である第1の基板領域および表面が誘電体である第2の基板領域を有する基板に対して行われる。すなわち、例えば、表面が金属である第1の基板領域に、チオール系SAMを吸着させることにより、誘電体膜の成膜を阻害させ、第2の基板領域にのみ誘電体膜を成膜する(例えば非特許文献1)。
次に、具体的な実施形態について説明する。
最初に、第1の実施形態について説明する。
図1は第1の実施形態に係る選択的成膜方法を示すフローチャート、図2はその工程断面図である。
本実施形態では、複数種類の表面(アモルファスシリコン(a-Si)膜、カーボン(C)膜、SiN膜、SiO2膜)を有する基板のうち、a-Si膜の表面のみに選択的に対象膜を形成する例について説明する。
次に、第2の実施形態について説明する。
図3は第2の実施形態に係る選択的成膜方法を示すフローチャート、図4はその工程断面図である。
本実施形態においても第1の実施形態と同様、複数種類の表面(アモルファスシリコン(a-Si)膜、カーボン(C)膜、SiN膜、SiO2膜)を有する基板のうち、a-Si膜の表面のみに選択的に対象膜を成膜する例について説明する。
次に、本開示の一実施形態に係る選択的成膜方法を実施するためのシステムについて説明する。
本開示の一実施形態に係る選択的に膜を形成する方法は、バッチ装置、枚葉装置、セミバッチ装置のいずれの形態であってもよい。ただし、上記それぞれのステップにおいて最適な温度が異なる場合があり、また、基板の表面が酸化して表面状態が変化したときに各ステップの実施に支障をきたす場合がある。そのような点を考慮すると、各ステップを最適な温度に設定しやすく、かつ全てのステップを真空中で行うことができるマルチチャンバータイプの枚葉式成膜システムが好適である。
図5は、一実施形態に係る選択的成膜方法を実施するための成膜システムの一例を示す模式図である。
次に、中間膜成膜装置200、対象膜成膜装置400のような成膜装置、およびSAM形成装置300の一例について説明する。
図6は、成膜装置およびSAM形成装置として用いることができる処理装置の一例を示す断面図である。
以上、実施形態について説明したが、今回開示された実施形態は、全ての点で例示であって制限的なものではないと考えられるべきである。上記の実施形態は、添付の特許請求の範囲およびその主旨を逸脱することなく、様々な形態で省略、置換、変更されてもよい。
2;a-Si膜
3;カーボン(C)膜
4;SiN膜
5;SiO2膜
6;中間膜(Al2O3膜)
7;第1のSAM(シラン系化合物)
8;第2のSAM(チオール系化合物)
10;基体
20;第1の基板領域
30;第2の基板領域
40;対象膜(TiN膜)
100;成膜システム
200;中間膜成膜装置
300;SAM形成装置
400;対象膜成膜装置
500;プラズマ処理装置
600;処理装置
Claims (12)
- 基板上へ対象膜を形成する方法であって、
第1の基板領域と、前記第1の基板領域とは異なる材料で形成された少なくとも2種類の表面を有する第2の基板領域とを有する基板を準備することと、
前記第2の基板領域への前記対象膜の成膜を阻害する第1の自己組織化単分子膜が吸着可能な中間膜を、前記第2の基板領域の表面に選択的に形成することと、
次いで、前記中間膜の表面に選択的に前記第1の自己組織化単分子膜を吸着させることと、
次いで、前記第1の基板領域の表面に選択的に前記対象膜を形成することと、
を有する、方法。 - 前記第1の基板領域は、a-Si膜または金属膜を含む、請求項1に記載の方法。
- 前記対象膜は、金属膜または金属化合物膜である、請求項2に記載の方法。
- 前記対象膜は、TiN膜である、請求項3に記載の方法。
- 前記第2の基板領域は、SiO2膜、SiN膜、カーボン膜からなる群から選択された少なくとも2種の材料が前記少なくとも2種類の表面を形成している、請求項1から請求項4のいずれか1項に記載の方法。
- 前記中間膜は、誘電体膜である、請求項1から請求項5のいずれか1項に記載の方法。
- 前記中間膜は、Al2O3膜である、請求項6に記載の方法。
- 前記中間膜を形成することに先立って実施される、前記基板に対し、前記第2の基板領域の表面のみに中間膜を形成することが可能となる処理を行うことをさらに有する、請求項1から請求項7のいずれか1項に記載の方法。
- 前記第2の基板領域の表面のみに中間膜を形成することが可能となる処理は、前記第1の基板領域の表面に選択的に吸着可能であり、かつ中間膜の成膜を阻害する機能を有する第2の自己組織化単分子膜を、前記第1の基板領域に吸着させる処理である、請求項8に記載の方法。
- 前記第2の基板領域の表面のみに中間膜を形成することが可能となる処理は、前記基板表面にプラズマ処理を施し、前記第1の基板領域の表面を前記中間膜が形成されない表面に改質する処理である、請求項8に記載の方法。
- 基板上に対象膜を形成するシステムであって、
基板を搬送するための搬送装置を有する搬送室と、
前記搬送室に連結された、中間膜を成膜する装置と、
前記搬送室に連結された、対象膜を成膜する装置と、
前記搬送室に連結された、自己組織化単分子膜を吸着させる装置と、
前記搬送装置、前記中間膜を成膜する装置、前記対象膜を成膜する装置、および前記自己組織化単分子膜を吸着させる装置を制御する制御部と、
を具備し、
前記制御部は、請求項1から請求項9のいずれか1項に記載の方法が実施されるように、搬送装置、前記中間膜を成膜する装置、前記対象膜を成膜する装置、および前記自己組織化単分子膜を吸着させる装置を制御する、システム。 - 基板上に対象膜を形成するシステムであって、
基板を搬送するための搬送装置を有する搬送室と、
前記搬送室に連結された、中間膜を成膜する装置と、
前記搬送室に連結された、対象膜を成膜する装置と、
前記搬送室に連結された、自己組織化単分子膜を吸着させる装置と、
前記搬送室に連結された、プラズマ処理する装置と、
前記搬送装置、前記中間膜を成膜する装置、前記対象膜を成膜する装置、前記自己組織化単分子膜を吸着させる装置、および前記プラズマ処理する装置を制御する制御部と、
を具備し、
前記制御部は、請求項10に記載の方法が実施されるように、前記搬送装置、前記中間膜を成膜する装置、前記対象膜を成膜する装置、前記自己組織化単分子膜を吸着させる装置、および前記プラズマ処理する装置を制御する、システム。
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