JP7098581B2 - ブレード交換機構、切断装置、及び切断品の製造方法 - Google Patents

ブレード交換機構、切断装置、及び切断品の製造方法 Download PDF

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Publication number
JP7098581B2
JP7098581B2 JP2019138775A JP2019138775A JP7098581B2 JP 7098581 B2 JP7098581 B2 JP 7098581B2 JP 2019138775 A JP2019138775 A JP 2019138775A JP 2019138775 A JP2019138775 A JP 2019138775A JP 7098581 B2 JP7098581 B2 JP 7098581B2
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JP
Japan
Prior art keywords
blade
suction
replacement
flange
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019138775A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021020281A (ja
Inventor
昌一 片岡
秀俊 宇澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Towa Corp
Original Assignee
Towa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Towa Corp filed Critical Towa Corp
Priority to JP2019138775A priority Critical patent/JP7098581B2/ja
Priority to KR1020200080997A priority patent/KR102384491B1/ko
Priority to CN202010661679.4A priority patent/CN112297113B/zh
Priority to TW109123579A priority patent/TWI747374B/zh
Publication of JP2021020281A publication Critical patent/JP2021020281A/ja
Application granted granted Critical
Publication of JP7098581B2 publication Critical patent/JP7098581B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/1552—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling parts of devices for automatically inserting or removing tools
    • B23Q3/15526—Storage devices; Drive mechanisms therefor
    • B23Q3/15536—Non-rotary fixed racks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
    • B26D7/2614—Means for mounting the cutting member
    • B26D7/2621—Means for mounting the cutting member for circular cutters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/15513—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling the tool being taken from a storage device and transferred to a tool holder by means of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/157—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools
    • B23Q3/15713—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools a transfer device taking a single tool from a storage device and inserting it in a spindle
    • B23Q3/1572—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools a transfer device taking a single tool from a storage device and inserting it in a spindle the storage device comprising rotating or circulating storing means
    • B23Q3/15722—Rotary discs or drums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
    • B26D1/12—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis
    • B26D1/14—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
    • B26D7/2628—Means for adjusting the position of the cutting member
    • B26D7/2635—Means for adjusting the position of the cutting member for circular cutters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Cutting Devices (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Dicing (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
JP2019138775A 2019-07-29 2019-07-29 ブレード交換機構、切断装置、及び切断品の製造方法 Active JP7098581B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019138775A JP7098581B2 (ja) 2019-07-29 2019-07-29 ブレード交換機構、切断装置、及び切断品の製造方法
KR1020200080997A KR102384491B1 (ko) 2019-07-29 2020-07-01 블레이드 교환 기구, 절단 장치, 및 절단품의 제조 방법
CN202010661679.4A CN112297113B (zh) 2019-07-29 2020-07-10 刀片更换机构、切断装置以及切断品的制造方法
TW109123579A TWI747374B (zh) 2019-07-29 2020-07-13 刀片更換機構、切斷裝置以及切斷品的製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019138775A JP7098581B2 (ja) 2019-07-29 2019-07-29 ブレード交換機構、切断装置、及び切断品の製造方法

Publications (2)

Publication Number Publication Date
JP2021020281A JP2021020281A (ja) 2021-02-18
JP7098581B2 true JP7098581B2 (ja) 2022-07-11

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JP2019138775A Active JP7098581B2 (ja) 2019-07-29 2019-07-29 ブレード交換機構、切断装置、及び切断品の製造方法

Country Status (4)

Country Link
JP (1) JP7098581B2 (ko)
KR (1) KR102384491B1 (ko)
CN (1) CN112297113B (ko)
TW (1) TWI747374B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7496328B2 (ja) 2021-03-24 2024-06-06 Ｔｏｗａ株式会社 加工装置、及び加工品の製造方法
JP2022148902A (ja) * 2021-03-24 2022-10-06 Ｔｏｗａ株式会社 加工装置、及び加工品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010284774A (ja) 2009-06-15 2010-12-24 Disco Abrasive Syst Ltd 装着工具セット及び環状ブレードの装着方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5014892B2 (ja) * 2007-06-25 2012-08-29 株式会社ディスコ ブレード交換工具
JP2010207960A (ja) * 2009-03-10 2010-09-24 Fuji Electric Systems Co Ltd 型抜き加工装置の刃型交換システム
JP6069122B2 (ja) * 2013-07-22 2017-02-01 株式会社ディスコ 切削装置
JP6430329B2 (ja) * 2015-05-13 2018-11-28 Ｔｏｗａ株式会社 切断装置及び切断方法
JP6560714B2 (ja) * 2017-06-26 2019-08-14 Ｔｏｗａ株式会社 ブレード交換機構、切断装置およびブレード交換方法
CN107953245B (zh) * 2017-11-15 2023-12-08 厦门创云精智机械设备股份有限公司 刀片搬运系统

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010284774A (ja) 2009-06-15 2010-12-24 Disco Abrasive Syst Ltd 装着工具セット及び環状ブレードの装着方法

Also Published As

Publication number Publication date
CN112297113A (zh) 2021-02-02
TWI747374B (zh) 2021-11-21
JP2021020281A (ja) 2021-02-18
KR20210014068A (ko) 2021-02-08
CN112297113B (zh) 2022-07-05
KR102384491B1 (ko) 2022-04-08
TW202103883A (zh) 2021-02-01

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