JP7098581B2 - Blade replacement mechanism, cutting device, and manufacturing method of cut products - Google Patents

Description

The present invention relates to a blade exchange mechanism, a cutting device, and a method for manufacturing a cut product.

In a cutting device using a hubless type blade, the blade is sandwiched by a pair of flanges and fixed to the spindle. The pair of flanges is composed of an inner flange closer to the spindle and an outer flange farther from the spindle. Further, the inner flange is fixed to the spindle, and the outer flange is configured to be removable from the spindle.

A cutting device having the above configuration, which has a blade replacement mechanism for automatically replacing blades, is considered. As shown in Patent Document 1, this blade exchange mechanism is located inside the first suction portion configured to suck the blade and the first suction portion, and is independent of the suction by the first suction portion. It is provided with a second suction part configured to suck the outer flange and a detachable member rotating part located inside the second suction part and having a detachable member rotatable so that the blade can be attached to and detached from the spindle. ing.

Japanese Unexamined Patent Publication No. 2019-5857

However, in the blade replacement mechanism of Patent Document 1, the blade mounting portion into which the blade is fitted is provided on the inner flange which is the proximal flange, but the fitting tolerance of the blade with respect to the blade mounting portion of such a flange is strict. The case is not described in Patent Document 1.

Therefore, the present invention has been made to solve the above-mentioned problems, and its main object is to enable automatic blade replacement even when the fitting tolerance of the blade with respect to the flange is tight.

That is, the blade exchange mechanism according to the present invention is provided separately from the first suction portion for sucking the blade and the first suction portion, and the second suction portion for sucking the flange having the blade mounting portion on which the blade is mounted. And the side opposite to the suction surface of the blade, which is located inside the second suction portion and rotates the detachable member that enables the blade to be attached to and detached from the spindle, and the suction surface of the blade by the first suction portion. The blade is provided with a blade transporting portion that sucks the surface of the blade and transports the blade to the flange sucked by the second suction portion.

According to the present invention, it is possible to enable automatic blade replacement even when the fitting tolerance of the blade with respect to the flange is tight.

It is a schematic diagram which shows the structure of the cutting apparatus of one Embodiment which concerns on this invention. It is sectional drawing which shows typically the structure of the cutting mechanism of the same embodiment. It is a schematic diagram which shows the structure of the blade exchange mechanism of the same embodiment. It is sectional drawing which shows typically the structure of the suction arm (before desorption of the desorption member) of the blade exchange mechanism of the same embodiment. It is sectional drawing which shows typically the structure of the suction arm (after desorption of the desorption member) of the blade exchange mechanism of the same embodiment. It is sectional drawing which shows typically the structure of the blade transport part of the blade exchange mechanism of the same embodiment. It is sectional drawing which shows typically the structure of the accommodating part of the blade exchange mechanism of the same embodiment. It is sectional drawing which shows typically the structure of the storage part and the position adjustment part of the modification embodiment.

Next, the present invention will be described in more detail with reference to examples. However, the present invention is not limited by the following description.

As described above, the blade replacement mechanism of the present invention is provided separately from the first suction portion that sucks the blade and the first suction portion, and the second suction portion that has the blade mounting portion on which the blade is mounted is sucked. The suction portion, the detachable member rotating portion that rotates the detachable member that is located inside the second suction portion and enables the blade to be detached from the spindle, and the suction surface of the blade by the first suction portion. It is characterized by including a blade transporting portion that sucks the opposite surface and transports the blade to the flange sucked by the second suction portion.
With this blade replacement mechanism, the blade is transported by the blade transport section to the flange sucked by the second suction section, so the blade transport section may be positioned with respect to the flange, and the flange and spindle as in the conventional case. Compared with the positioning adjustment with, the positioning adjustment between the flange and the blade transport portion becomes easier. Therefore, the blade can be easily fitted to the blade mounting portion of the flange. As a result, it is possible to automatically replace the blade even when the fitting tolerance of the blade with respect to the flange is tight.

In the conventional configuration shown in Patent Document 1, it is conceivable to reduce the diameter of the blade mounting portion of the inner flange, which is the proximal flange fixed to the spindle, but the concentricity of the blades shifts and the cutting quality is improved. It will have an effect. Further, if the blade mounting portion of the inner flange is provided with the invitation taper, the size of the outer flange becomes larger by the amount of the invitation taper provided. For example, in the case of a twin spindle configuration in which two spindles face each other, the distance between the blades of the facing spindles becomes large, and the productivity (cutting efficiency) deteriorates.
In the present invention, the blade mounting portion is provided on the flange (outer flange) adsorbed on the second suction portion, and the blade is conveyed to the blade mounting portion by the blade transport portion, so that the flange is fixed to the spindle. The above-mentioned problem, which is premised on the configuration in which the blade mounting portion is provided on the inner flange, can be solved.

Here, in order to facilitate mounting the blade on the blade mounting portion of the flange (outer flange) attracted to the second suction portion, it is desirable that a tapered surface is formed on the outer peripheral surface of the blade mounting portion. ..

As a specific embodiment of the blade transport portion, it is desirable that the blade transport portion has a third suction portion that sucks the blade and a convex portion that can be inserted into the central opening of the flange.
Here, since the blade transport portion has a convex portion that can be inserted into the central opening of the flange (outer flange), the blade transport portion is positioned with respect to the flange (outer flange) sucked by the second suction portion. The configuration to be used can be easily realized.

In order to accurately position the flange (outer flange) adsorbed on the second suction portion and the blade transport portion, the inner peripheral surface of the central opening of the flange or the outer peripheral circumference of the convex portion of the blade transport portion. It is desirable that a tapered surface is formed on at least one of the surfaces.

It is conceivable that the blade replacement mechanism further includes a storage portion in which the replacement blade can be stored, and the storage portion has a hook portion inserted into the central opening of the blade.
In this configuration, not only the contact between the hooking portion and the convex portion of the blade transporting portion prevents the replacement from being hindered, but also the hooking portion and the blade transporting portion are accurately positioned, and then the flange (outer flange) is performed. ) Is smoothly mounted on the blade mounting portion, it is desirable that the hook portion is formed with a concave portion into which the convex portion of the blade transport portion can be inserted.

In order to accurately position the hook portion and the blade transport portion, the outer peripheral surface of the hook portion, the inner peripheral surface of the concave portion in the hook portion, or the outer peripheral surface of the convex portion of the blade transport portion. It is desirable that at least one of the tapered surfaces is formed.

For example, it is conceivable to manually store the replacement blade in the storage unit in advance. At this time, if the fitting tolerance between the hook portion and the replacement blade is strict, it becomes difficult to manually store the replacement blade. Therefore, it is conceivable to reduce the diameter of the hooking portion to facilitate the manual storage work of the replacement blade. Even when a mechanical mechanism such as a robot is used without manpower, it is conceivable to reduce the diameter of the hooking portion in the same manner. On the other hand, with this configuration, it becomes difficult to position the blade transport portion and the replacement blade.
Therefore, the blade replacement mechanism of the present invention is for temporarily storing the replacement blade attracted by the blade transport section from the storage section to position the blade transport section and the replacement blade. It is desirable to further provide a positioning unit.

The flange sandwiches the blade together with a fixed flange fixed to the spindle. Therefore, in order to ensure that the blade can be pinched, it is desirable that the fixed flange has a recess for accommodating the blade mounting portion of the flange.

In order to smoothly transfer the blade from the flange sucked to the second suction portion to the blade transport portion, the blade transport portion holds the blade in a state where the suction of the blade by the first suction portion is released. It is desirable to adsorb and remove it from the blade mounting portion.

When the blade is fitted into the blade mounting portion while being attracted to the blade transport portion, the posture of the blade attracted to the blade transport portion is fixed, so that the blade and the blade mounting portion interfere with each other. There is a risk that it will not fit any further, and even the blade may be damaged. Therefore, it is desirable that the blade transport portion sucks the replacement blade and moves it to the blade mounting portion, then releases the suction of the blade and pushes the replacement blade to a predetermined position.

Further, the cutting device according to the present invention is characterized by including the above-mentioned blade exchange mechanism, the above-mentioned blade, and the above-mentioned spindle.
With this cutting device, blades with tight fitting tolerances on the flange can be automatically replaced, so it is possible to manufacture high-quality cut products.

Further, the method for manufacturing a cut product according to the present invention is characterized in that a plurality of cut products are manufactured by cutting an object to be cut using a blade exchanged by the above-mentioned blade exchange mechanism.
According to this method for manufacturing a cut product, the quality of the cut product can be improved because the cut product can be manufactured by using a blade having a tight fitting tolerance to the flange.

<One Embodiment of the present invention>
Hereinafter, an embodiment of a cutting device incorporating the inspection system according to the present invention will be described with reference to the drawings. All of the figures shown below are schematically drawn by omitting or exaggerating them for the sake of clarity. The same components are designated by the same reference numerals and the description thereof will be omitted as appropriate.

<Overall configuration of cutting device 100>
The cutting device 100 of the present embodiment is a device for manufacturing a product P which is a plurality of individualized cut products by cutting the object W to be cut. The object W to be cut is, for example, a sealed substrate. This sealed substrate covers, for example, a substrate made of a printed circuit board, a lead frame, or the like, a plurality of functional elements (chips such as semiconductor elements) mounted on a plurality of regions of the substrate, and a plurality of regions collectively. It is provided with a sealing resin formed so as to be squeezed. By cutting this sealed substrate, an electronic component is manufactured as a product P.

Specifically, as shown in FIG. 1, the cutting device 100 is cut into pieces by a supply module 100A for supplying the sealed substrate W and a cutting module 100B for cutting the sealed substrate W. An inspection module 100C for inspecting the product P is provided as a component. Each component 100A to 100C is removable and replaceable with respect to other components.

The operation control of the cutting device 100 including the modules 100A to 100C shown below is performed by the control unit CTL provided in the supply module 100A. This control unit CTL may be provided in modules 100B and 100C other than the supply module 100A. Further, the control unit CTL may be divided into a plurality of modules and provided in at least two modules of the supply module 100A, the cutting module 100B and the inspection module 100C.

In the supply module 100A, the sealed substrate W to be cut is supplied from the outside to accommodate the sealed substrate W. The supply module 100A is provided with a substrate accommodating portion 2 for accommodating the sealed substrate W. The sealed substrate W is conveyed from the supply module 100A to the cutting module 100B by a transfer mechanism (not shown).

The cutting module 100B cuts the sealed substrate W and separates it into a plurality of products P. The cutting module 100B includes a cutting table 3 on which the sealed substrate W is placed, a moving mechanism 4 for moving the cutting table 3 in the Y direction, and a rotating mechanism 5 for rotating the cutting table 3 in the θ direction. A cutting mechanism 6 having a blade 61 for cutting the sealed substrate W, and a blade replacement mechanism 7 for replacing the blade 61 of the cutting mechanism 6 are provided. Then, the sealed substrate W is cut by the blade 61 by relatively moving the cutting table 3 and the cutting mechanism 6. The specific configuration of the cutting mechanism 6 and the blade replacement mechanism 7 will be described later.

The inspection module 100C inspects the product P individualized by the cutting module 100B. The inspection module 100C includes an inspection table 8 on which the individualized product P is placed, and an image pickup device 9 for imaging the product P placed on the inspection table 8. The inspection module 100C sorts the product P into a non-defective product and a defective product based on the captured image obtained by the image pickup device 9. Then, the non-defective product is transferred to the non-defective product tray 10 and the defective product is transferred to the defective product tray 11 by a transfer mechanism (not shown) and stored.

<About the cutting mechanism 6 and the blade replacement mechanism 7>
As shown in FIG. 2, the cutting mechanism 6 of the present embodiment includes a hubless blade 61, a spindle 62 for rotating the blade 61, and a pair of flanges 63 and 64 for detachably fixing the blade 61 to the spindle 62. It has. The blade 61 of the present embodiment has a disk shape having, for example, a circular central opening.

The pair of flanges 63, 64 is composed of an inner flange 63 fixed to the spindle 62 and closer to the spindle 62, and an outer flange 64 configured to be removable with respect to the spindle 62 and farther from the spindle 62. There is. Then, the outer flange 64 is fixed to the central shaft portion 631 of the inner flange 63 by a detachable member 65 such as a nut. The detachable member 65 allows the blade 61 to be attached / detached to / from the spindle 62.

The outer flange 64 has a blade mounting portion 641 on which the blade 61 is mounted. The blade mounting portion 641 fits into the central opening of the blade 61, has a shape corresponding to the central opening of the blade 61, and has a cylindrical shape in the present embodiment.

On the other hand, the inner flange 63 is a fixed flange fixed to the spindle 62, and a recess 632 for accommodating the blade mounting portion 641 of the outer flange 64 is formed on the surface facing the outer flange 64. The recess 632 forms an annular shape formed around the central shaft portion 631 of the inner flange 63. With this configuration, when the outer flange 64 is mounted on the inner flange 63, the blade mounting portion 641 of the outer flange 64 enters the recess 632 of the inner flange 63, and the blade 61 is sandwiched by the pair of flanges 63 and 64.

As shown in FIG. 3, the blade replacement mechanism 7 used in the cutting mechanism 6 has a suction arm 71 that sucks the blade 61 and the outer flange 64, and a blade transport portion 72 that conveys the blade 61 to the suction arm 71. And a storage unit 73 for storing the blade 61.

As shown in FIGS. 4 to 6, the suction arm 71 includes a first suction portion 711 that sucks the blade 61, a second suction portion 712 that sucks the outer flange 64, and a detachable member rotating portion that rotates the detachable member 65. It is equipped with 713. The suction arm 71 is configured to move relative to the spindle 62 by a moving mechanism (not shown) (see FIG. 3).

The first suction unit 711 sucks one surface of the blade 61 (the surface on the outer flange 64 side). Specifically, the first suction portion 711 includes a first cylindrical member 711a that comes into contact with the outer surface of the blade 61, and a plurality of first suction ports 711b formed on the contact surface of the first cylindrical member 711a with the blade 61. It has a first intake flow path 711c formed inside the first cylindrical member 711a and connected to a plurality of first suction ports 711b. The first intake flow path 711c is connected to a suction pump (not shown) provided outside the suction arm 71.

The second suction portion 712 is located inside the first suction portion 711 and sucks the outer surface of the outer flange 64 (the surface opposite to the inner flange 63). Further, the second suction unit 712 sucks the outer flange 64 independently of the suction of the first suction unit 711. Specifically, the second suction portion 712 has a plurality of second suction ports 712b formed on the contact surface between the second cylindrical member 712a in contact with the outer surface of the outer flange 64 and the outer flange 64 of the second cylindrical member 712a. And a second intake flow path 712c formed inside the second cylindrical member 712a and connected to a plurality of second suction ports 712b. The second cylindrical member 712a is arranged coaxially with the hollow portion of the first cylindrical member 711a. Further, the second intake flow path 712c is connected to a suction pump (not shown) provided outside the suction arm 71.

The detachable member rotating portion 713 is located inside the second suction portion 712, and engages with the detachable member 65 (here, a nut) of the spindle 62 to detach the detachable member 65. Specifically, the detachable member rotating portion 713 has an engaging portion 713a that engages with the detachable member 65, and has a rotatably provided rotating member 713b and a rotating mechanism having, for example, a motor that rotates the rotating member 713b. (Not shown). The engaging portion engages with the engaged portion formed on the detachable member 65. For example, when the engaged portion of the detachable member 65 is a concave portion, the engaging portion is a protrusion that engages with the concave portion. Then, by rotating the rotating member 713b in a state where the engaging portion is engaged with the engaged portion of the detachable member 65, the detachable member 65 can be attached to or detached from the central shaft portion 631 of the inner flange 63. ..

As shown in FIG. 6, the blade transport unit 72 transports the blade 61 to the outer flange 64 sucked by the second suction portion 712, removes the blade 61 from the outer flange 64, and removes the blade 61 from the outer flange 64 to the outer flange 64. 61 is to be attached. The blade transport portion 72 is configured to move between the suction arm 71 and the storage portion 73 by a moving mechanism (not shown) (see FIG. 3).

Specifically, the blade transport portion 72 sucks the surface (the surface on the inner flange 63 side) opposite to the suction surface of the blade 61 by the first suction portion 711, and the third suction portion that sucks the blade 61. It has a 721 and a convex portion 722 that can be inserted into the central opening of the outer flange 64. The third suction portion 721 includes a plurality of third suction ports 721b formed on the contact surface between the third cylindrical member 721a that contacts the outer surface of the blade 61 and the blade 61 of the third cylindrical member 721a, and the third cylinder. It has a third intake flow path 721c formed inside the member 721a and connected to a plurality of third suction ports 721b. The third intake flow path 721c is connected to a suction pump (not shown) provided outside the blade transport portion 72. Further, the convex portion 722 is formed in the central portion of the third cylindrical member 721a, and is inserted into the central opening formed inside the blade mounting portion 641 of the outer flange 64.

In the present embodiment, the outer peripheral surface of the blade mounting portion 641 of the outer flange 64 is formed with a first tapered surface T1 whose diameter is reduced toward the tip (inner flange 63 side). The first tapered surface T1 facilitates the blade 61 conveyed to the blade conveying portion 72 to enter the blade mounting portion 641.

Further, a second tapered surface T2 whose diameter increases toward the tip (inner flange 63 side) is formed on the inner peripheral surface of the blade mounting portion 641 of the outer flange 64. Then, when the blade transport portion 72 delivers the blade 61 to the outer flange 64, the convex portion 722 of the blade transport portion 72 is inserted into the central opening while being guided by the second tapered surface T2, thereby causing the outside. The blade transfer portion 72 is positioned with respect to the flange 64.

As shown in FIG. 7, the storage unit 73 can store the replacement blade 61 and the used blade 61. Specifically, the storage portion 73 has a first hook portion 731 inserted through the central opening of the replacement blade 61 and a second hook portion 732 inserted through the central opening of the used blade 61. Have. Recesses 733 and 734 into which the convex portion 722 of the blade transport portion 72 can be inserted are formed on the tip surfaces of the hook portions 731 and 732.

A third tapered surface T3 whose diameter increases toward the tip is formed on the inner peripheral surface of the recess 733 in the first hook portion 731. Then, when the blade transport portion 72 takes out the replacement blade 61 from the storage portion 73, the convex portion 722 of the blade transport portion 72 is inserted into the concave portion 733 while being guided by the third tapered surface T3, so that the first pull is performed. The blade transport portion 72 is positioned with respect to the hook portion 731. Further, on the inner peripheral surface of the recess 734 in the second hook portion 732, a fourth tapered surface T4 whose diameter increases toward the tip is formed, similarly to the first hook portion 731. Then, when the blade transport portion 72 stores the used blade 61 in the storage portion 73, the convex portion 722 of the blade transport portion 72 is inserted into the concave portion 734 while being guided by the fourth tapered surface T4. The blade transport portion 72 is positioned with respect to the hook portion 732.

<Operation of blade replacement mechanism 7>
Next, the automatic replacement operation of the blade 61 by the blade replacement mechanism 7 will be described.

The suction arm 71 of the blade replacement mechanism 7 moves and comes into contact with the spindle 62 (see FIG. 4). Then, the first suction portion 711 and the second suction portion 712 suck the blade 61 and the outer flange 64. In this state, the detachable member rotating portion 713 rotates the detachable member 65 to remove the detachable member 65. After that, the suction arm 71 is retracted from the spindle 62. As a result, the used blade 61 is removed from the spindle 62, and the used blade 61 and the outer flange 64 are attracted to the suction arm 71 (see FIG. 5).

Next, the blade transport unit 72 moves to the suction arm 71. At this time, the convex portion 722 of the blade transport portion 72 is guided by the second tapered surface T2 of the blade mounting portion 641, and the blade transport portion 72 is positioned with respect to the blade mounting portion 641. Then, the third suction portion 721 of the blade transport portion 72 sucks the used blade 61. In this state, the used blade 61 is removed from the outer flange 64 by moving the blade transport portion 72 relative to the suction arm 71 (see FIG. 6). When the used blade 61 is sucked by the blade transport portion 72, the suction by the first suction portion 711 of the suction arm 71 is released. As a result, the used blade 61 can be smoothly delivered from the outer flange 64 to the blade transport portion 72.

The blade transport portion 72 that has attracted the used blade 61 moves to the second hook portion 732 of the storage portion 73 (see the arrow (A) in FIG. 7). At this time, the convex portion 722 of the blade transport portion 72 is guided by the fourth tapered surface T4 of the second hook portion 732, and the blade transport portion 72 is positioned with respect to the second hook portion 732. Then, the third suction portion 721 of the blade transport portion 72 releases the suction of the used blade 61, and the used blade 61 is stored in the second hook portion 732.

After storing the used blade 61, the blade transport portion 72 moves to the first hook portion 731 of the storage portion 73 (see the arrow (B) in FIG. 7). At this time, the convex portion 722 of the blade transport portion 72 is guided by the third tapered surface T3 of the first hook portion 731, and the blade transport portion 72 is positioned with respect to the first hook portion 731. Then, the third suction portion 721 of the blade transport portion 72 starts sucking the replacement blade 61 and sucks the replacement blade 61 stored in the first hook portion 731.

The blade transport portion 72 that has attracted the replacement blade 61 moves to the suction arm 71 (see the arrow (C) in FIG. 7). At this time, the convex portion 722 of the blade transport portion 72 is guided by the second tapered surface T2 of the blade mounting portion 641, and the blade transport portion 72 is positioned with respect to the blade mounting portion 641. Then, the blade transport portion 72 attaches the replacement blade 61 to the blade mounting portion 641 of the outer flange 64 sucked by the suction arm 71. Here, the replacement blade 61 can be easily attached by the first tapered surface T1 of the blade mounting portion 641. After the replacement blade 61 is attached, the blade transport section 72 releases the suction of the replacement blade 61 by the third suction section 721, and the first suction section 711 of the suction arm 71 sucks the replacement blade 61 ( See FIG. 5).

When the replacement blade 61 is attached to the blade mounting portion 641, the blade transport portion 72 moves the replacement blade 61 to the blade mounting portion 641 and then releases the suction of the replacement blade 61 for replacement. The blade 61 may be pushed into a predetermined position. Here, the predetermined position is a position where the replacement blade 61 does not move any further even if it is pushed in, and is a position where it comes into contact with the inner surface (the surface on the inner flange 63 side) of the outer flange 64. Specifically, the blade transport portion 72 moves the replacement blade 61 to the blade mounting portion 641, and after the tip of the blade mounting portion 641 enters the central opening of the replacement blade 61, the replacement blade 61 Release the adsorption. At this time, the replacement blade 61 is in a state of being caught by the blade mounting portion 641. In this state, the blade transport portion 72 pushes the replacement blade 61 to a position where the replacement blade 61 contacts the inner surface of the outer flange 64. By attaching the replacement blade 61 in this way, it is possible to prevent the replacement blade 61 and the blade mounting portion 641 from interfering with each other and preventing them from entering any more, so that the replacement blade 61 can be reliably attached.

After mounting the replacement blade 61 on the blade mounting portion 641, the suction arm 71 moves to the spindle 62. Then, the detachable member rotating portion 713 rotates the detachable member 65 to sandwich the replacement blade 61 between the outer flange 64 and the inner flange (see FIG. 4). After that, the first suction unit 711 of the suction arm 71 releases the suction of the replacement blade 61, and the second suction unit 712 releases the suction of the outer flange 64, so that the suction arm 71 retracts from the spindle 62. By these series of operations, the replacement operation from the used blade 61 to the replacement blade 61 is completed.

<Effect of this embodiment>
According to the cutting device 100 of the present embodiment, the blade 61 is conveyed by the blade transfer unit 72 to the outer flange 64 adsorbed by the second suction unit 712, so that the blade transfer unit 72 is positioned with respect to the outer flange 64. As compared with the conventional positioning adjustment between the outer flange 64 and the spindle 62, the positioning adjustment between the outer flange 64 and the blade transport portion 72 becomes easier. Therefore, the blade 61 can be easily fitted to the blade mounting portion 641 of the outer flange 64. As a result, even when the fitting tolerance of the blade 61 with respect to the pair of flanges 63 and 64 is tight, the blade 61 can be automatically replaced.

In particular, since the first tapered surface T1 is formed on the blade mounting portion 641 of the outer flange 64, it is possible to easily mount the blade 61 on the blade mounting portion 641 of the outer flange 64 sucked by the second suction portion 712. can. Further, since the second tapered surface T2 is formed on the inner peripheral surface of the blade mounting portion 641 and the blade transport portion 72 is positioned on the blade mounting portion 641, the blade 61 can be more easily mounted on the blade mounting portion 641. be able to.

Further, since the third tapered surface T3 is formed on the inner peripheral surface of the first hooking portion 731 and the blade transporting portion 72 is positioned on the first hooking portion 731, a replacement blade is provided with respect to the blade transporting portion 72. The 61 can be positioned, and the replacement blade 61 can be easily mounted on the blade mounting portion 641. In addition, since the fourth tapered surface T4 is formed on the inner peripheral surface of the second hooking portion 732 and the blade transport portion 72 is positioned on the second hooking portion 732, the used blade 61 is reliably pulled to the second hook. It can be stored in the hanging portion 732.

<Other modified embodiments>
The present invention is not limited to the above embodiment.

For example, in addition to the configuration of the embodiment, as shown in FIG. 8, in order to position the blade transport portion 72 and the replacement blade 61 while transporting the replacement blade 61 from the storage portion 73 to the suction arm 71. The positioning unit 74 of the above may be provided. The arrow shown in FIG. 8 indicates the movement order of the blade transport unit 72.

The positioning unit 74 temporarily stores the replacement blade 61 adsorbed by the blade transport unit 72, and positions the blade transport unit 72 and the replacement blade 61. Specifically, the positioning portion 74 has a third hooking portion 741 for hooking the replacement blade 61. A concave portion 742 into which the convex portion 722 of the blade transport portion 72 can be inserted is formed on the tip surface of the third hook portion 741. A fifth tapered surface T5 whose diameter is reduced toward the tip is formed on the outer peripheral surface of the third hook portion 741. Further, a sixth tapered surface T6 whose diameter increases toward the tip is formed on the inner peripheral surface of the third hook portion 741. Further, the outer diameter of the third hooking portion 741 is larger than that of the first hooking portion 731 of the embodiment, and the rattling with the replacement blade 61 is smaller than that of the first hooking portion 731. There is. The positioning unit 74 can finely adjust the position of the replacement blade 61 with respect to the blade transport unit 72.

In the above embodiment, the second tapered surface T2 is formed on the inner peripheral surface of the blade mounting portion 641, the third tapered surface T3 is formed on the inner peripheral surface of the first hooking portion 731, and the second hooking portion 732 is formed. Although the fourth tapered surface T4 is formed on the inner peripheral surface, a tapered surface whose diameter decreases toward the tip may be formed on the convex portion 722 of the blade transport portion 72 that fits the fourth tapered surface T4. From the viewpoint of reducing the amount of movement to positioning, it is desirable to provide a tapered surface on only one of the convex portion 722 of the blade transport portion 72 and the other member fitted to the convex portion 722, but both are provided. It is also possible.

Further, although the cutting device 100 of the above embodiment has a single spindle configuration having one spindle 62, it may have a twin spindle configuration having two spindles 62. In this case, the blade replacement mechanism 7 replaces the blades 61 of each of the two spindles 62 in order.

In addition, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the spirit of the present invention.

100 ... Cutting device W ... Cutting object (sealed substrate)
P ・ ・ ・ Product 6 ・ ・ ・ Cutting mechanism 61 ・ ・ ・ Blade 61 ・ ・ ・ Replacement blade 62 ・ ・ ・ Spindle 63 ・ ・ ・ Fixed flange (inner flange)
632 ・ ・ ・ Recess 64 ・ ・ ・ Outer flange 641 ・ ・ ・ Blade mounting part 65 ・ ・ ・ Detachable member 7 ・ ・ ・ Blade replacement mechanism 711 ・ ・ ・ First suction part 712 ・ ・ ・ Second suction part 713 ・ ・ ・Desorption member Rotating part 72 ・ ・ ・ Blade transport part T1 ・ ・ ・ First tapered surface 721 ・ ・ ・ Third suction part 722 ・ ・ ・ Convex part T2 ・ ・ ・ Second tapered surface 73 ・ ・ ・ Storage part 732 ・····································································································

Claims (12)

The first suction part that sucks the blade and
A second suction portion provided separately from the first suction portion and sucking a flange having a blade mounting portion on which the blade is mounted, and a second suction portion.
A desorption member rotating portion that is located inside the second suction portion and rotates a desorption member that allows the blade to be detached from the spindle, and a desorption member rotating portion.
A blade exchange provided with a blade transporting portion that sucks a surface of the blade opposite to the suction surface of the first suction portion and transports the blade to the flange sucked by the second suction portion. mechanism. The blade replacement mechanism according to claim 1, wherein a tapered surface is formed on the outer peripheral surface of the blade mounting portion. The blade replacement mechanism according to claim 1 or 2, wherein the blade transport portion has a third suction portion that sucks the blade and a convex portion that can be inserted into the central opening of the flange. The blade replacement mechanism according to claim 3, wherein a tapered surface is formed on at least one of the inner peripheral surface of the central opening of the flange and the outer peripheral surface of the convex portion of the blade transport portion. It also has a storage area that can store replacement blades.
The storage portion has a hook portion that is inserted through the central opening of the blade.
The blade replacement mechanism according to claim 3 or 4, wherein the hook portion is formed with a concave portion into which the convex portion of the blade transport portion can be inserted. 5. The fifth aspect of the present invention, wherein a tapered surface is formed on at least one of the outer peripheral surface of the hooking portion, the inner peripheral surface of the concave portion in the hooking portion, or the outer peripheral surface of the convex portion of the blade transport portion. Blade replacement mechanism. Claim 5 or 6 further comprises a positioning portion for temporarily storing the replacement blade sucked by the blade transport portion from the storage portion and positioning the blade transport portion and the replacement blade. Described blade replacement mechanism. The flange sandwiches the blade together with a fixed flange fixed to the spindle.
The blade replacement mechanism according to any one of claims 1 to 7, wherein the fixed flange has a recess for accommodating a blade mounting portion of the flange. The blade according to any one of claims 1 to 8, wherein the blade transport portion sucks the blade and removes the blade from the blade mounting portion in a state where the blade is released from being sucked by the first suction portion. Exchange mechanism. Any one of claims 1 to 9, wherein the blade transport portion sucks the replacement blade and moves it to the blade mounting portion, then releases the suction of the blade and pushes the replacement blade to a predetermined position. The blade replacement mechanism described in the section. A cutting device comprising the blade replacement mechanism according to any one of claims 1 to 10, the blade, and the spindle. A method for manufacturing a cut product, in which a cutting object is cut using a blade replaced by the blade replacement mechanism according to any one of claims 1 to 10, and a plurality of cut products are manufactured.

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