JP6430329B2 - Cutting apparatus and cutting method - Google Patents

Description

  The present invention relates to a cutting apparatus and a cutting method for manufacturing a plurality of separated products by cutting an object to be cut.

  A substrate composed of a printed circuit board, a lead frame, etc. is virtually divided into a plurality of grid-like areas, and chip-like elements (for example, semiconductor chips) are attached to the respective areas, and then the entire board is sealed with resin. This is called a sealed substrate. A product obtained by cutting a sealed substrate by a cutting mechanism using a rotary blade or the like and dividing it into individual regions is a product.

  Conventionally, a predetermined region of a sealed substrate is cut by a cutting mechanism such as a rotary blade using a cutting device. First, the sealed substrate is placed on a cutting table. Next, the sealed substrate is aligned (positioned). By aligning, the position of a virtual cutting line that divides a plurality of regions is set. Next, the cutting table on which the sealed substrate is placed and the cutting mechanism are relatively moved. The cutting water is sprayed onto the cut portion of the sealed substrate, and the sealed substrate is cut along the cutting line set on the sealed substrate by the cutting mechanism. An individualized product is manufactured by cutting the sealed substrate.

  A spindle having a rotary blade is used as a cutting mechanism. The spindle cuts the sealed substrate by rotating the rotary blade at a high speed. The rotary blade is attached so that both ends thereof are sandwiched by flanges that are fixing members and are parallel to a plane orthogonal to the axial direction of the rotary shaft provided on the spindle. Since the rotary blade rotates at a high speed of about 30,000 to 50,000 rpm, a centrifugal force acts from the center of the rotary blade toward the outer periphery. When the centrifugal force increases, displacement occurs in the flange and the rotary blade due to the centrifugal force. When the rotary blade rotates at a high speed, the flange and the rotary blade are deformed by centrifugal force. When the rotary blade is deformed by centrifugal force, the rotary blade is displaced from a plane orthogonal to the axial direction of the rotary shaft. In other words, the rotary blade has an inclination with respect to the direction orthogonal to the rotation axis. If the amount of deviation (inclination) of the rotary blade becomes larger than a certain level, the rotary blade may be damaged or the rotary blade may meander.

  In the cutting device, “the washer-shaped cutting blade is fixed to the spindle tip by a nut while being sandwiched between two flanges. Since the blade is fixed in contact with the flange, it contacts the blade of the flange. If the angle between the end surface to be rotated and the rotation center line of the spindle is not 90 degrees, the flange will end up blurring at the time of spindle rotation, and precise processing cannot be performed "(for example, Patent Documents). 1 paragraphs [0003] and [0004], see FIG. 3).

JP 2009-297855 A

  According to the technique disclosed in Patent Document 1, the blade 31 and the flange 37 are fitted to the flange 36, and the blade 31 is sandwiched between the pair of flanges 36 and 37. Furthermore, the blade 31 is clamped and fixed by the end surfaces 36c and 37a near the outer peripheral surface of the flanges 36 and 37 by screwing the female screw portion 35a of the nut 35 to the flange male screw portion 36a of the flange 36 and tightening (see Patent Document 1). [0020], FIG. 3).

  According to this technique, the blade 31 is fixed by the end surfaces 36c and 37a near the outer peripheral surfaces of the flanges 36 and 37. The structure and weight of the flange 36 and the flange 37 are different. Therefore, the force received by the centrifugal force differs between the flange 36 and the flange 37. When the blade 31 rotates at a high speed, the force acting on the flange 36 and the flange 37 differs depending on the centrifugal force, so that the blade 31 may be deformed.

  The present invention optimizes the structures of the first fixing member and the second fixing member that are fixed with the rotary blade interposed therebetween, and the displacement amount of the first fixing member and the second fixing caused by the centrifugal force, respectively. It is an object of the present invention to provide a cutting device and a cutting method capable of preventing deformation and breakage of the rotary blade by making the displacement amount of the member equal.

  In order to solve the above problems, a cutting apparatus according to the present invention includes a table on which a workpiece is placed, a cutting mechanism that cuts the workpiece, and a movement that relatively moves the table and the cutting mechanism. A cutting device having a mechanism and used when manufacturing a plurality of products by cutting a workpiece, a rotating shaft provided in the cutting mechanism, and a disc fixed to the rotating shaft A rotary blade, a first fixing member that is partially in close contact with the first surface of the rotary blade that is located closer to the main body of the cutting mechanism, and an outer peripheral portion of the first fixing member that is provided on the outer periphery of the rotary blade. The first holding member that is in close contact with the first surface, the first concave portion provided in the first fixing member, and the first fixing member so as to overlap at least part of the first concave portion. A deep recess having a depth greater than the depth of the first recess, and the first fixing member A first support portion provided, a second fixing member that is partially in close contact with the second surface of the rotary blade, and an outer peripheral portion of the second fixed member that is in close contact with the second surface of the rotary blade A second holding portion, a second recess provided in the second fixing member, and a second support portion provided in the second fixing member, the first fixing member and the second fixing portion In a state where the rotary blade is sandwiched between the fixing members, the rotary blade is fixed to the rotary shaft, and the second concave portion is disposed opposite to the first concave portion and the deep concave portion with the rotary blade interposed therebetween. The deformation of the rotary blade due to the centrifugal force generated by the rotation of the rotary blade is suppressed.

  In the cutting device according to the present invention, in the above-described cutting device, the first holding portion, the first concave portion, the deep concave portion, and the first support portion are formed in a circumferential shape, and the second holding portion and the second holding portion are formed. The concave portion and the second support portion are formed in a circumferential shape.

  The cutting device according to the present invention is characterized in that, in the above-described cutting device, the depth of the deep recess is larger than the depth of the first recess and the depth of the second recess.

  In the cutting device according to the present invention, in the above-described cutting device, the first support portion is provided on a side near the rotation shaft of the first fixing member, and the second support portion is on the rotation shaft of the second fixing member. The first support part and the second support part are arranged opposite to each other with the rotary blade in between, and are arranged from the first surface of the rotary blade to the end surface of the first support part. The first distance and the second distance from the second surface of the rotary blade to the end surface of the second support part are equal to each other, and the predetermined distance is larger than the maximum diameter of the abrasive grains of the rotary blade. It is large and smaller than the maximum value of the deformation amount in the range where the deformation of the rotary blade is allowed.

  The cutting device according to the present invention is the above-described cutting device, wherein the deep recess is at least one of a surface facing the first surface of the rotary blade or a surface opposite to the surface facing the first fixing member. It is provided.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a sealed substrate.

  The cutting device according to the present invention is characterized in that, in the above-described cutting device, the object to be cut is a substrate in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

  In order to solve the above-described problems, a cutting method according to the present invention includes a step of placing an object to be cut on a table, a disk-shaped rotary blade fixed to a rotating shaft, and the object to be cut. A cutting method for manufacturing a plurality of products by cutting an object to be cut, wherein the first holding portion, the first recess, and the first recess are provided so as to overlap with each other. A step of preparing a first fixing member having a deep recess having a depth larger than the depth of the first recess, and a first support portion, a second holding portion, and a second recess, A step of preparing a second fixing member having a second support portion; a step of preparing a rotary blade fixed to the rotary shaft in a state sandwiched between the first fixing member and the second fixing member; A step of rotating the rotary blade, and a first fixing member prepared The second holding member is provided on the outer peripheral portion in the prepared second fixing member, and in the step of preparing the rotary blade, the second concave portion is deep with the first concave portion. The first holding portion is disposed in opposition to the concave portion, the first holding portion is brought into close contact with the first surface located on the side closer to the main body of the cutting mechanism in the rotary blade, and the second holding portion is provided on the second surface of the rotary blade. In the step of rotating the rotary blade, the deformation of the rotary blade due to the centrifugal force generated by the rotation of the rotary blade is suppressed.

  In the cutting method according to the present invention, in the above-described cutting method, in the first fixing member prepared, the first holding portion, the first concave portion, the deep concave portion, and the first support portion are circumferential. In the second fixing member formed and prepared in a shape, the second holding portion, the second concave portion, and the second support portion are formed in a circumferential shape.

  The cutting method according to the present invention is the above-described cutting method. In the first fixing member and the second fixing member respectively prepared, the depth of the deep recess is the depth of the first recess and the second recess. It is characterized by being larger than the depth of.

  In the cutting method according to the present invention, in the above-described cutting method, in the first fixing member and the second fixing member respectively prepared, the first support portion is closer to the rotating shaft in the first fixing member. The second support part is provided on the side of the second fixed member close to the rotation axis, and the first support part and the second support part are arranged to face each other with the rotary blade in between. The predetermined distance from which the 1st distance from the 1st surface of a rotary blade to the end surface of the 1st support part and the 2nd distance from the 2nd surface of a rotary blade to the end surface of the 2nd support part are equal The predetermined distance is larger than the maximum diameter of the abrasive grains of the rotary blade and smaller than the maximum value of the deformation amount in a range where the deformation of the rotary blade is allowed.

  In the cutting method according to the present invention, in the above-described cutting method, in the prepared first fixing member, the deep recess is a surface facing the first surface of the rotary blade or a surface opposite to the surface facing the rotating blade. It is provided in at least one.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a sealed substrate.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a substrate in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

  According to the present invention, the cutting mechanism is provided with the rotary shaft, the rotary blade fixed to the rotary shaft, and the first fixing member and the second fixing member that fix the rotary blade sandwiched from both sides. The first fixing member is provided so as to overlap at least a part of the first holding portion, the first concave portion, and the first concave portion that are partially in close contact with the first surface of the rotary blade. A deep concave portion having a depth larger than the depth of the first concave portion and a first support portion are provided. The second fixing member is provided with a second holding portion that is partially in close contact with the second surface of the rotary blade, a second recess, and a second support portion. Suppressing deformation of the rotary blade due to the centrifugal force generated by the rotation of the rotary blade by arranging the second concave portion opposite to the first concave portion and the deep concave portion with the rotary blade interposed therebetween. To do. Therefore, even when the rotary blade rotates at high speed, vibration, breakage, meandering, etc. of the rotary blade caused by centrifugal force can be prevented.

It is a top view which shows the outline | summary of the cutting device which concerns on this invention. 2A and 2B are schematic views showing a spindle used in the cutting apparatus shown in FIG. 1, FIG. 2A is a front view, and FIG. 2B is a side view. FIG. 3 is a schematic exploded sectional view showing components of the spindle shown in FIG. 2. It is a schematic sectional drawing which shows the state which attached the structural member shown in FIG. 3 to the spindle. FIG. 5 is a schematic enlarged cross-sectional view of the flange shown in FIG. 4.

  As shown in FIG. 4, the spindle 7 has a rotary shaft 8, a rotary blade 9 fixed to the rotary shaft 8, and a first flange 15 and a second flange 16 that fix the rotary blade 9 from both sides. Provide. The first flange 15 is provided with a first recess 21 and a deep recess 20 each formed in a circumferential shape. The second flange 16 is provided with a second recess 25 formed in a circumferential shape. The second recess 25 is disposed opposite to the first recess 21 and the deep recess 20 with the rotary blade 9 in between. By providing the deep recess 20, the amount of displacement of the first flange 15 and the amount of displacement of the second flange 16 caused by centrifugal force are made equal. As a result, it is possible to cancel the force of each flange trying to push the rotary blade 9 toward the opposite flange. Therefore, even when the rotary blade 9 rotates at a high speed, vibration, breakage, meandering, etc. of the rotary blade 9 caused by centrifugal force can be prevented.

  A cutting apparatus according to the present invention will be described with reference to FIG. Any figure in the present application document is schematically omitted or exaggerated as appropriate for easy understanding. About the same component, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

  As shown in FIG. 1, the cutting device 1 is a device that divides an object to be cut into a plurality of products. The cutting apparatus 1 includes a substrate supply module A, a substrate cutting module B, and an inspection module C as components. Each component (each module A to C) is detachable and replaceable with respect to other components.

  The substrate supply module A is provided with a substrate supply mechanism 3 that supplies a sealed substrate 2 corresponding to an object to be cut, and a control unit CTL that performs operation and control of the cutting device 1. The sealed substrate 2 is a substrate made of a printed circuit board or a lead frame, a plurality of functional elements (chips such as semiconductor elements) mounted in a plurality of regions of the substrate, and a plurality of regions are collectively covered. The sealing resin thus formed is included. The sealed substrate 2 is an object to be cut that is finally cut into pieces. The sealed substrate 2 is transported to the substrate cutting module B by a transport mechanism (not shown).

  The cutting device 1 shown in FIG. 1 is a single-cut table type cutting device. Accordingly, the substrate cutting module B is provided with one cutting table 4. The cutting table 4 can be moved in the Y direction in the figure by the moving mechanism 5 and can be rotated in the θ direction by the rotating mechanism 6. A cutting jig (not shown) is attached to the cutting table 4, and the sealed substrate 2 is placed on the cutting jig.

  The substrate cutting module B is provided with a spindle 7 as a cutting mechanism. The cutting device 1 shown in FIG. 1 is a cutting device having a single spindle configuration in which one spindle 7 is provided. The spindle 7 can move independently in the X direction and the Z direction. The spindle 7 includes a rotary shaft 8 and a rotary blade 9 attached to the tip of the rotary shaft 8. The rotary blade 9 is attached to be parallel to a plane (a plane including the Y axis and the Z axis) perpendicular to the axial direction (X direction) of the rotary shaft 8. The spindle 7 is provided with a cutting water nozzle (not shown) for injecting cutting water in order to suppress frictional heat generated by the rotary blade 9 rotating at high speed. The sealed substrate 2 is cut by relatively moving the cutting table 4 and the spindle 7. The rotary blade 8 cuts the sealed substrate 2 by rotating in a plane including the Y axis and the Z axis.

  The inspection module C is provided with an inspection table 10. On the inspection table 10, an aggregate made up of a plurality of products P cut into pieces by cutting the sealed substrate 2, that is, a cut substrate 11 is placed. The plurality of products P are inspected by a camera for inspection (not shown) and sorted into non-defective products and defective products. The non-defective product is stored in the tray 12.

  In the first embodiment, the single-cut table type cutting apparatus 1 having a single spindle configuration has been described. However, the present invention is not limited thereto, and a single-cut table type cutting device having a twin spindle configuration or a twin-cut table type cutting device having a twin spindle configuration may be used.

  The spindle 7 used in the cutting device 1 according to the present invention will be described with reference to FIGS. A spindle 7 that is a cutting mechanism shown in FIG. 2 includes a spindle body 13, a spindle motor 14 that is a drive mechanism, and a rotary shaft 8 that is connected to the spindle motor 14. The rotary shaft 8 is rotatably supported on the spindle 7 in a non-contact state by air (air) blown from a radial air bearing and an axial air bearing (not shown). A rotary blade 9 for cutting the sealed substrate 2 is attached to the tip of the rotary shaft 8. The rotary blade 9 is attached to be parallel to a plane (a plane including the Y axis and the Z axis) perpendicular to the axial direction (X direction) of the rotary shaft 8. The rotary blade 9 is attached to the rotary shaft 8 with both sides sandwiched between a first flange 15 and a second flange 16 which are fixed members. The rotary blade 9 is a washer type rotary blade having a through hole. The rotary blade 9 is detachable from the spindle 7 and can be exchanged.

  With reference to FIG. 3, the components of the spindle 7 used in this embodiment will be described. As shown in FIG. 3, the rotary shaft 8 provided on the spindle 7 has a tip 8 a having a small diameter for attaching the first flange 15 to the tip. A female screw portion 8 i that is screwed with a bolt 17 for fixing the first flange 15 to the rotary shaft 8 is formed at the tip end portion 8 a of the rotary shaft 8.

  The first flange 15 is a member that holds the rotary blade 9 together with the second flange 16 and fixes the rotary blade 9 to the spindle 7. The first flange 15 is a rear flange disposed on the back side (spindle 7 side; first surface side) of the rotary blade 9 and is directly attached to the rotary shaft 8. At the center of the first flange 15, a through hole 19 that is fitted to the tip 8 a of the rotating shaft 8 is provided. The first flange 15 includes a cylindrical base portion 15 a into which the rotary blade 9 is inserted, a cylindrical base portion 15 b into which the second flange 16 is fitted, and a circumferential holding portion that holds the rotary blade 9. 15c, a circumferential support portion 15d for suppressing tilting and warping of the rotary blade 9, and a deep recess 20 formed in a circumferential shape for suppressing displacement (deformation) of the first flange 15; In order to suppress displacement (deformation) of the first flange 15, a first recess 21 formed in a circumferential shape is provided. The deep recess 20 and the first recess 21 are formed in a circumferential shape. A concave portion 22 to which the bolt 17 is fastened and a nut male screw portion 15 e that is screwed into the nut 18 are formed at the center tip portion of the first flange 15.

When viewed from above or below in FIG. 3, the deep recess 20 is provided so as to overlap at least part of the first recess 21. In other words, in FIG. 3, the deep recessed portion 20 formed in a circumferential shape is included in at least a part of the first recessed portion 21 formed in a circumferential shape in plan view. In the present application documents , the phrase “formed in a circumferential shape” is formed so as to be formed in a circumferential shape without any breaks, or as being circumferential and having at least one or more breaks. Including both cases.

  As shown in FIG. 3, in the first flange 15, the deep recess 20 is provided on the same side as the first recess 21 (the lower side in the figure). It is not limited to this, In the 1st flange 15, the deep recessed part 20 may be provided in the other side (upper side of a figure) of the 1st recessed part 21. FIG. In the first flange 15, the deep recess 20 may be provided on both the same side and the opposite side as the first recess 21.

  The rotary blade 9 is a washer type rotary blade having a through hole 23 and formed in a ring shape. The through hole 23 of the rotary blade 9 is inserted into the cylindrical base portion 15a of the first flange. The rotary blade 9 is, for example, a rotary blade made of an annular grindstone in which abrasive grains such as diamond are bonded with a binding material such as metal, resin, or ceramic. As abrasive grains used when cutting a sealed substrate, diamond abrasive grains having a particle diameter of about several μm to several tens of μm are often used.

  The second flange 16 is a member that holds the rotary blade 9 together with the first flange 15 and fixes the rotary blade 9 to the spindle 7. The second flange 16 is a front flange disposed on the front side of the rotary blade 9 (on the side opposite to the spindle 7; the second surface side), and is fitted to the first flange 15. A through hole 24 is provided at the center of the second flange 16 to be fitted into the cylindrical base portion 15 b of the first flange 15. The second flange 16 includes a circumferential holding portion 16 c that holds the rotary blade 9, a circumferential support portion 16 d that suppresses inclination and warpage of the rotary blade 9, and displacement (deformation) of the second flange 16. ), And a second recess 25 formed in a circumferential shape.

  The rotary blade 9 is sandwiched and held between a circumferential holding portion 15 c provided on the outer peripheral portion of the first flange 15 and a circumferential holding portion 16 c provided on the outer peripheral portion of the second flange 16. . The rotary blade 9 is held so as to be parallel to a plane orthogonal to the axial direction of the rotary shaft 8. In order to hold the rotary blade 9 with high accuracy, the end surfaces of the holding portion 15c and the holding portion 16c have high flatness.

  The nut 18 is a flange nut for fixing the second flange 16 to the first flange 15. A nut female thread portion 18 i is formed on the inner peripheral surface of the nut 18. By fastening the nut 18 to the nut male screw portion 15 e of the first flange 15, the rotary blade 9 is sandwiched and fixed between the first flange 15 and the second flange 16.

  The bolt 17 is a fixing member for fixing the first flange 15 and the second flange 16 fixed by the nut 18 with the rotary blade 9 interposed therebetween to the rotary shaft 8. The bolt 17 is formed with a male screw portion 17 e that is screwed into the female screw portion 8 i of the rotary shaft 8. For example, a hexagonal hole 26 is formed in the head of the bolt 17 in order to rotate the bolt 17 when the bolt 17 is fastened to the rotating shaft 8 or loosened from the rotating shaft 8.

  With reference to FIG. 3, the procedure for mounting the rotary blade 9 on the spindle 7 will be described. First, the through hole 23 of the rotary blade 9 is inserted into the cylindrical base portion 15 a of the first flange 15. Next, the through hole 24 of the second flange 16 is fitted into the cylindrical base portion 15 b of the first flange 15. Further, the nut female screw portion 18 i of the nut 18 is screwed into the nut male screw portion 15 e formed at the tip portion of the first flange 15 and tightened. Thus, the rotary blade 9 is sandwiched and fixed between the first flange 15 and the second flange 16.

  Next, in a state where the rotary blade 9 is fixed by the first flange 15 and the second flange 16, the through hole 19 formed at the center of the first flange 15 is formed at the tip 8 a of the rotary shaft 8 of the spindle 7. Mating. Next, the bolt 17 is screwed into an internal thread portion 8 i formed at the tip end portion 8 a of the rotating shaft 8 and tightened. For example, an L-shaped wrench is inserted into the hexagonal hole 26 formed in the head of the bolt 17 to tighten the bolt 17. The rotary blade 9 fixed by the first flange 15 and the second flange 16 is attached to the rotary shaft 8 of the spindle 7 by fastening the bolt 17 to the rotary shaft 8.

  With reference to FIG. 4, a state where the rotary blade 9 is mounted on the spindle 7 will be described. FIG. 4 shows the spindle 7 used in the cutting device 1 according to the present invention. As shown in FIG. 4, the rotary blade 9 sandwiched between the first flange 15 and the second flange 16 and fixed by the nut 18 is attached to the rotary shaft 8 by a bolt 17. The rotary blade 9 is sandwiched and fixed by a holding portion 15 c formed on the outer peripheral portion of the first flange 15 and a holding portion 16 c formed on the outer peripheral portion of the second flange 16. The holding part 15c and the holding part 16c have high flatness in order to maintain the attachment state of the rotary blade 9 stably. The rotary blade 9 sandwiched and fixed between the holding portion 15c and the holding portion 16c rotates the sealed substrate 2 by rotating at high speed.

  The procedure for mounting the rotary blade 9 on the spindle 7 is the same as that in the present embodiment and the conventional technique. Here, the subject at the time of using the 1st flange 15 and the 2nd flange 16 in a prior art is demonstrated. In the conventional technique, when the rotary blade 9 is not idling or stationary, the rotary blade 9 is positioned parallel to a plane perpendicular to the axial direction of the rotary shaft 8. As the rotary blade 9 rotates at a high speed, the first flange 15 and the second flange 16 receive a centrifugal force due to the rotation. The centrifugal force acts from the center of the rotary blade 9 in the radial direction (outside). Accordingly, the first flange 15 and the second flange 16 are displaced (deformed) in the outer circumferential direction under the centrifugal force that is directed outward from the center of each flange.

  The conventional technique shown in FIG. 3 of Patent Document 1 will be described with reference to FIG. 4 of the present application. According to the prior art, there is no deep recess 20, support 15d and support 16d shown in FIG. 4 of the present application. In this state, the first flange 15 is directly fixed to the rotary shaft 8 by the bolt 17. The first flange 15 is firmly fixed to the rotating shaft 8 by a bolt 17. Accordingly, the amount of displacement (displacement amount) generated in the first flange 15 due to the centrifugal force is relatively small. The second flange 16 is fastened to the first flange 15 by a nut 18. The second flange 16 is not directly fixed to the rotating shaft 8. Therefore, the amount of displacement generated due to the centrifugal force in the second flange 16 is larger than the amount of displacement generated due to the centrifugal force in the first flange 15. If the displacement amount generated in the first flange 15 and the displacement amount generated in the second flange 16 are different, the flange (first flange 15) having a small displacement amount from the side of the flange (second flange 16) having a large displacement amount. A force (rightward force in FIG. 4) that pushes the rotary blade 9 is generated on the side. As a result, according to the conventional technology, when the rotary blade 9 rotates at a high speed, the rotary blade 9 may be displaced from a plane orthogonal to the axial direction of the rotary shaft 8. In other words, the rotary blade 9 has an inclination with respect to the plane including the Y axis and the Z axis in FIG. If the inclination of the rotary blade 9 becomes larger than a certain level, the rotary blade 9 may be vibrated or damaged, or the rotary blade 9 may meander.

  On the other hand, according to the present invention, as shown in FIG. 4, the first flange 15 is provided with a circumferential first recess 21 and a deep recess 20, respectively. The second flange 16 is provided with a circumferential second recess 25. The deep recess 20 is provided for the purpose of reducing the rigidity of the first flange 15 in order to equalize the displacement amount of the first flange 15 and the displacement amount of the second flange 16 respectively caused by centrifugal force. It is done. By making the displacement amount of the first flange 15 equal to the displacement amount of the second flange 16, it is possible to cancel the force of each flange trying to push the rotary blade 9 toward the opposite flange. Accordingly, the rotary blade 9 can be held so as to be always parallel to a plane orthogonal to the axial direction of the rotary shaft 8 (a plane including the Y axis and the Z axis in FIG. 4). Therefore, even when the rotary blade 9 rotates at a high speed, vibration, breakage, meandering, etc. (hereinafter referred to as “vibration” as appropriate) of the rotary blade 9 caused by centrifugal force can be prevented. The phrase “the displacement amount of the first flange 15 and the displacement amount of the second flange 16 are equal” means that the displacement amount is strictly different but the tilt of the rotary blade 9 does not cause vibration or the like. In other words, in other words, includes a case where their displacement amounts are substantially equal.

  According to the present invention, the support portion 15d of the flange 15 and the support portion 16d of the second flange 16 are provided so as to face each other with the rotary blade 9 therebetween. The first distance from the back surface of the rotary blade 9 (the surface on the spindle 7 side; the first surface of the rotary blade 9) to the end surface of the support portion 15d of the first flange 15 and the front surface of the rotary blade 9 (with the spindle 7) The second distance from the opposite surface (the second surface of the rotary blade 9) to the end surface of the support portion 16d of the second flange 16 is preset to an equal distance (predetermined distance). The set predetermined distance is larger than the maximum diameter of the abrasive grains AG (only a part of which is shown in FIG. 5) of the rotary blade 9, and the maximum value of the deformation amount in a range where the deformation of the rotary blade 9 is allowed. Smaller than.

  By setting the predetermined distance as described above, first, when the rotary blade 9 starts to be deformed due to centrifugal force, the abrasive grains protruding from the first surface of the rotary blade 9 are supported by the support portion. Abrasive grains protruding from the end face of 15d or from the second face of the rotary blade 9 come into contact with the end face of the support portion 16d at an early stage. Second, when the amount of abrasive grains protruding from the first surface or the second surface of the rotary blade 9 is small, the amount of deformation that the rotary blade 9 deforms due to centrifugal force is allowed as the amount of deformation. The first surface of the rotary blade 9 is in contact with the end surface of the support portion 15d, or the second surface of the rotary blade 9 is in contact with the end surface of the support portion 16d. By these two actions, the end surface of the support portion 15d and the end surface of the support portion 16d can suppress distortion, warpage, bending, and the like (hereinafter referred to as “deformation” as appropriate) of the rotary blade 9. The term “equal distance” means that these distances are strictly different, but the difference between the distances is sufficiently small that the inclination of the rotary blade 9 does not generate vibrations, in other words, the distances are Including the case where it is substantially equal.

  As shown in FIG. 5, in the first flange 15, the depth from the end surface of the holding portion 15 c (the left end surface in the figure) to the inner bottom surface of the deep recess 20 is L1, and the depth from the inner bottom surface of the first recess 21 is The depth is L2, and the distance from the back surface of the rotary blade 9 to the end surface of the support portion 15d (the leftmost surface in the figure) is L3. In the second flange 16, the depth from the end surface of the holding portion 16c (the right end surface in the drawing) to the inner bottom surface of the second recess 25 is L4, and the end surface of the support portion 16d from the front surface of the rotary blade 9 (the right end surface in the drawing). The distance to the surface) is L5.

  Generally, in a spindle, the amount of displacement of the flange caused by the centrifugal force that the flange receives when the rotary blade rotates depends on the outer diameter of the flange, the mass of the flange, the rotational speed of the rotary blade, and the like. By optimizing the depth L1 of the deep recess 20 in the first flange 15 and the depth L2 of the first recess 21 and the depth L4 of the second recess 25 in the second flange 16, it is caused by centrifugal force. Therefore, the displacement amount of the first flange 15 and the displacement amount of the second flange 16 can be made substantially equal. For example, in this embodiment, the depth L1 of the deep recess 20 of the first flange 15 is 0.7 to 1.5 mm, and the depth L2 of the first recess 21 of the first flange 15 is 0.3 to 0. The displacement amount of the first flange 15 and the displacement amount of the second flange 16 are made substantially equal by setting the depth L4 of the second recess 25 of the second flange 16 to 0.3 mm to 5 mm. Became possible. Thereby, even if the rotary blade 9 rotates at a high speed, the distortion and warpage of the rotary blade 9 can be suppressed. Therefore, damage or meandering of the rotary blade 9 caused by the centrifugal force received by the rotary blade 9 can be prevented.

  For example, the case where the maximum value of the grain size of the abrasive grains contained in the rotary blade 9 is 15 μm will be described. The distance L3 from the back surface of the rotary blade 9 to the end surface of the support portion 15d and the distance L5 from the front surface of the rotary blade 9 to the end surface of the support portion 16d are larger than the maximum value of the particle size of the abrasive grains contained in the rotary blade 9 It set to 0.02 mm so that it might become slightly large. As a result, even if deformation (distortion, deflection, etc.) of the rotary blade 9 occurs due to the centrifugal force received by the rotary blade 9, the deformation can be suppressed. Therefore, even when the rotary blade 9 rotates at a high speed, it is possible to prevent the rotary blade 9 from being damaged due to strain or deflection.

  In each Example, the case where the sealed board | substrate 2 which formed sealing resin on the board | substrate as a to-be-cut object was cut | disconnected was shown. Not limited to this, a sealed substrate in which a glass epoxy laminated board, a printed wiring board, a ceramic substrate, a metal base substrate, a film base substrate, etc. are used as a substrate in an object to be cut and a sealing resin is formed thereon. The present invention can also be applied.

  The functional elements include sensors, filters, actuators, oscillators, etc., in addition to semiconductor elements such as IC (Integrated Circuit), transistors, and diodes. A plurality of functional elements may be mounted in one area.

  Furthermore, even when cutting a workpiece having a substantially circular shape, such as a wafer level package in which a silicon semiconductor or a compound semiconductor wafer is encapsulated with a resin in a wafer state, the contents described so far are used. Applicable.

  The object to be cut is not limited to the sealed substrate 2. In some cases, a member (resin molded body) manufactured by a resin molding method is cut to produce a product such as an optical component such as a lens array or a general resin molded product. The resin molded body in this case is included in the object to be cut. When cutting a workpiece using a rotary blade, when it is desired to suppress deformation, vibration, etc. in the rotary blade 9 as much as possible, in other words, dimensional accuracy and appearance quality required for a product manufactured by cutting. The higher the level is, the more effective the present invention.

  For example, when the rotary blade 9 is rotated at a high speed, it may be possible that the present invention cannot sufficiently suppress the deformation of the rotary blade 9. The cause is that at least one of the outer peripheral portion of the first flange 15 and the outer peripheral portion of the second flange 16 is deformed so as to bend outward (in a direction away from the surface of the rotary blade 9). . In this case, the end face of the holding portion (at least one of the holding portions 15c or 16c) of the deformed flange is closer to the rotation axis in a state where the rotary blade 9 is stopped. You may incline so that it may leave | separate. By adjusting the angle of the end surface of the holding portion 15c or the end surface of the holding portion 16c with respect to the surface of the rotary blade 9, the deformation of the rotary blade 9 can be suppressed.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary within the scope not departing from the gist of the present invention. It is.

DESCRIPTION OF SYMBOLS 1 Cutting apparatus 2 Sealed board | substrate (to-be-cut object)
3 Substrate supply mechanism 4 Cutting table (table)
5 Moving mechanism 6 Rotating mechanism 7 Spindle (cutting mechanism)
DESCRIPTION OF SYMBOLS 8 Rotating shaft 8a Tip part 8i Female thread part 9 Rotary blade 10 Inspection table 11 Cut substrate 12 Tray 13 Spindle body part 14 Spindle motor 15 First flange (first fixing member)
15a base part 15b base part 15c holding part (first holding part)
15d Support section (first support section)
15e Nut male thread portion 16 Second flange (second fixing member)
16c holding part (second holding part)
16d support section (second support section)
17 Bolt 17e Male thread part 18 Nut 18i Nut female thread part 19 Through hole 20 Deep recessed part 21 First recessed part 22 Recessed part 23 Through hole 24 Through hole 25 Second recessed part 26 Hexagonal hole A Substrate supply module B Substrate cutting module C Inspection module CTL Control part P Product AG Abrasive grain L1 Depth of deep recess L2 Depth of first recess L3 Distance from the back of the rotary blade to the end face of the support part (first distance)
L4 Depth of the second recess L5 Distance from the front surface of the rotary blade to the end surface of the support portion (second distance)

Claims (14)

A table on which the workpiece is placed, a cutting mechanism for cutting the workpiece, and a moving mechanism for moving the table and the cutting mechanism relative to each other, by cutting the workpiece A cutting device used when manufacturing a plurality of products,
A rotating shaft provided in the cutting mechanism;
A disc-shaped rotary blade fixed to the rotary shaft;
A first fixing member that is partially in close contact with a first surface located on the side of the rotary blade close to the main body of the cutting mechanism;
A first holding portion provided on an outer peripheral portion of the first fixing member and in close contact with the first surface of the rotary blade;
A first recess provided in the first fixing member;
A deep portion that is provided in the first fixing member so as to overlap at least a part of the first recess when viewed along the axial direction of the rotary blade , and has a depth greater than the depth of the first recess. A recess,
A first support portion provided on the first fixing member;
A second fixing member that is partially in close contact with the second surface of the rotary blade;
A second holding portion that is provided on an outer peripheral portion of the second fixing member and is in close contact with the second surface of the rotary blade;
A second recess provided in the second fixing member;
A second support portion provided on the second fixing member,
The rotary blade is fixed to the rotary shaft in a state where the rotary blade is sandwiched between the first fixing member and the second fixing member;
The second recess is disposed opposite to the first recess with the rotary blade in between,
A cutting apparatus, wherein deformation of the rotary blade due to centrifugal force generated by rotation of the rotary blade is suppressed. The cutting device according to claim 1, wherein
The first holding portion, the first concave portion, the deep concave portion, and the first support portion are formed in a circumferential shape, and the second holding portion, the second concave portion, and the second support are formed. A cutting device characterized in that the portion is formed in a circumferential shape. The cutting device according to claim 1, wherein
The depth of the said deep recessed part is larger than the depth of the said 1st recessed part, and the depth of the said 2nd recessed part, The cutting device characterized by the above-mentioned. The cutting device according to claim 1, wherein
The first support portion is provided on a side of the first fixing member close to the rotation shaft,
The second support portion is provided on a side of the second fixing member close to the rotation shaft,
The first support part and the second support part are arranged to face each other with the rotary blade in between,
A first distance from the first surface of the rotary blade to an end surface of the first support portion, and a second distance from the second surface of the rotary blade to an end surface of the second support portion; Are equal predetermined distances,
The cutting apparatus according to claim 1, wherein the predetermined distance is larger than a maximum diameter of abrasive grains of the rotary blade and smaller than a maximum deformation amount in a range in which the rotary blade is allowed to be deformed. The cutting device according to claim 1, wherein
The deep recess is provided on at least one of a surface facing the first surface of the rotary blade or a surface opposite to the facing surface in the first fixing member. . In the cutting device as described in any one of Claims 1-5,
The cutting apparatus, wherein the object to be cut is a sealed substrate. In the cutting device as described in any one of Claims 1-5,
The cutting apparatus is a cutting device in which a functional element is formed in each of a plurality of regions corresponding to the plurality of products. A step of placing the object to be cut on a table, and a step of relatively moving the disk-shaped rotary blade fixed to the rotating shaft and the object to be cut, by cutting the object to be cut A cutting method for producing a plurality of products,
A first holding portion, a first recess, and a depth greater than the depth of the first recess provided to overlap the first recess when viewed along the axial direction of the rotary blade. Preparing a first fixing member having a deep recess and a first support portion;
Preparing a second fixing member having a second holding portion, a second recess, and a second support portion;
Preparing the rotary blade fixed to the rotary shaft in a state sandwiched between the first fixed member and the second fixed member;
And rotating the rotary blade using a cutting mechanism ,
In the prepared first fixing member, the first holding portion is provided on an outer peripheral portion,
In the prepared second fixing member, the second holding portion is provided on the outer peripheral portion,
In the step of preparing the rotary blade, the second concave portion is disposed opposite to the first concave portion, and the first surface located on a side of the rotary blade close to the main body of the cutting mechanism is disposed on the first surface. 1 holding part is brought into close contact, and the second holding part is brought into close contact with the second surface of the rotary blade,
In the step of rotating the rotary blade, the cutting method is characterized by suppressing deformation of the rotary blade due to centrifugal force generated by the rotation of the rotary blade. The cutting method according to claim 8, wherein
In the prepared first fixing member, the first holding portion, the first concave portion, the deep concave portion, and the first support portion are formed in a circumferential shape,
In the prepared second fixing member, the second holding portion, the second concave portion, and the second support portion are formed in a circumferential shape. The cutting method according to claim 8, wherein
In the first fixing member and the second fixing member respectively prepared, the depth of the deep recess is greater than the depth of the first recess and the depth of the second recess. How to cut. The cutting method according to claim 8, wherein
In the first fixing member and the second fixing member respectively prepared,
The first support portion is provided on a side of the first fixing member close to the rotation shaft,
The second support portion is provided on a side of the second fixing member close to the rotation shaft,
The first support part and the second support part are arranged to face each other with the rotary blade in between,
A first distance from the first surface of the rotary blade to an end surface of the first support portion, and a second distance from the second surface of the rotary blade to an end surface of the second support portion; Are equal predetermined distances,
The cutting method according to claim 1, wherein the predetermined distance is larger than a maximum diameter of the abrasive grains of the rotary blade and smaller than a maximum deformation amount in a range in which the rotary blade is allowed to be deformed. The cutting method according to claim 8, wherein
In the prepared first fixing member, the deep recess is provided on at least one of a surface facing the first surface of the rotary blade or a surface opposite to the facing surface. How to cut. In the cutting method as described in any one of Claims 8-12,
The cutting method, wherein the object to be cut is a sealed substrate. In the cutting method as described in any one of Claims 8-12,
The cutting method is a substrate in which functional elements are formed in a plurality of regions corresponding to the plurality of products, respectively.

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