JP4904606B2 - Cutting blade mounting device and cutting blade mounting method thereof - Google Patents

Description

The present invention relates to a cutting blade mounting device and a cutting blade mounting method thereof, and more particularly, to a cutting blade mounting device that hardly deforms in a thrust direction even when rotated at a high speed , and a cutting blade mounting method thereof .

  2. Description of the Related Art Conventionally, there is known a cutting blade mounting device for mounting a cutting blade (hereinafter also referred to as a blade) on a rotating shaft that can be rotated at a high speed. As this type of cutting blade mounting device, for example, as shown in FIG. 3, a rear flange 30 ′ whose thickness decreases as it approaches the outer periphery, a cutting blade 20 ′ into which a boss portion (not shown) of the rear flange 30 ′ is inserted, The flange nut 40 ′ sandwiching the cutting blade 20 ′ between itself and the rear flange 30 ′ by screwing and tightening to the tip of the boss portion, and the rear flange 30 ′ into which the rotation shaft S of the spindle motor is inserted Some have a fixing nut 50 'or the like for fixing to the rotating shaft S of the spindle motor. The cutting blade mounting device described in Patent Document 1 has the same configuration.

  When the rear flange 30 '(and the flange nut 40') is rotated at a high speed (for example, 100,000 rotations per minute), the rear flange 30 'expands in the thrust direction due to the force applied to the left side in FIG. The nut 40 'is also swelled in the thrust direction by the force applied to the right side in FIG. Table 1 shows the measurement results of the amount of deformation in the thrust direction of the rear flange 30 '(and the flange nut 40').

JP 7-24829 A

  As shown in Table 1, when the rear flange 30 ′ and the flange nut 40 ′ swell in the thrust direction, friction between the rear flange 30 ′ and the cutting blade 20 ′ and between the flange nut 40 ′ and the cutting blade 20 ′ There is a possibility that the frictional force becomes small and the rear flange 30 ′ is loosened, the cutting blade 20 ′ is idle, the cutting blade 20 ′ is dropped, or the flange nut 40 ′ is loosened due to a load during cutting. There is a problem that there is.

The present invention has been made in view of such circumstances, and even when the rear flange and the flange nut are rotated at a high speed, the rear flange and the flange nut hardly swell in the thrust direction, and the clamping force of the cutting blade is almost reduced. An object of the present invention is to provide a cutting blade mounting device and a cutting blade mounting method that do not occur.

The invention according to claim 1 is a cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at a high speed, and a rear flange body that penetrates and is fixed to the rotary shaft; A rear flange provided with a boss portion provided on the rear flange body, a cutting blade into which the boss portion of the rear flange is inserted, and a threaded engagement with the boss portion of the rear flange. A flange nut sandwiching the cutting blade between the rear flange and the rear flange on the surface opposite to the surface facing the flange nut of the rear flange body in the thrust direction of the rear flange. and a groove for preventing an annular shape, and the flange nut and the surface of said rear flange of said flange nut facing the surface opposite, varying the thrust direction of the flange nut A groove for preventing, characterized in that it is formed in an annular shape.

According to the present invention, since the groove is formed in the rear flange, even if the rear flange is rotated at a high speed as compared with the conventional rear flange in which the groove is not formed, the rear flange hardly swells in the thrust direction. The clamping force of the cutting blade hardly decreases. Therefore, even when the rear flange is rotated at a high speed, it is possible to prevent the rear flange from being loosened, the cutting blade from rotating idle, the cutting blade from falling off, and the flange nut from being loosened.

Further , according to the present invention, since the groove is formed on the surface of the rear flange body opposite to the surface on which the flange nut is opposed, the rear flange is faster than the conventional rear flange having no groove. Even if it is rotated, the rear flange hardly swells in the thrust direction, and the clamping force of the cutting blade hardly decreases. Therefore, even when the rear flange is rotated at a high speed, it is possible to prevent the rear flange from being loosened, the cutting blade from rotating idle, the cutting blade from falling off, and the flange nut from being loosened.

Further , according to the present invention, since the annular groove is formed on the surface of the rear flange body opposite to the surface facing the flange nut, the rear flange is compared with the conventional rear flange in which no groove is formed. Is rotated at high speed, the rear flange hardly swells in the thrust direction, and the clamping force of the cutting blade hardly decreases. Therefore, even when the rear flange is rotated at a high speed, it is possible to prevent the rear flange from being loosened, the cutting blade from rotating idle, the cutting blade from falling off, and the flange nut from being loosened.

Further , according to the present invention, since the groove is formed in the flange nut, the flange nut almost swells in the thrust direction even when the flange nut is rotated at a high speed as compared with the conventional flange nut in which the groove is not formed. In addition, the clamping force of the cutting blade hardly decreases. Therefore, even when the flange nut is rotated at a high speed, it is possible to prevent the rear flange from being loosened, the cutting blade from rotating idle, the cutting blade from falling off, and the flange nut from being loosened.

Further , according to the present invention, since the groove is formed on the surface opposite to the surface on which the rear flange body of the flange nut is opposed, the flange nut is made faster than the conventional flange nut in which the groove is not formed. Even if it is rotated, the flange nut hardly swells in the thrust direction, and the clamping force of the cutting blade hardly decreases. Therefore, even when the flange nut is rotated at a high speed, it is possible to prevent the rear flange from being loosened, the cutting blade from rotating idle, the cutting blade from falling off, and the flange nut from being loosened.

In addition, according to the present invention, since the annular groove is formed in the flange nut, even if the flange nut is rotated at a high speed as compared with the conventional flange nut in which the groove is not formed, the flange nut is in the thrust direction. Almost does not swell and the clamping force of the cutting blade hardly decreases. Therefore, even when the flange nut is rotated at a high speed, it is possible to prevent the rear flange from being loosened, the cutting blade from rotating idle, the cutting blade from falling off, and the flange nut from being loosened.
According to a second aspect of the present invention, in the first aspect of the invention, the groove formed in the rear flange has a predetermined amount of deformation in the thrust direction of the rear flange when rotated at a high speed. As described above, the depth of the groove formed in the flange nut is adjusted so that the amount of deformation in the thrust direction of the flange nut when rotating at a high speed becomes a predetermined amount of deformation. It is characterized by that.
The invention according to claim 3 is a cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at high speed, a rear flange body that penetrates and is fixed to the rotary shaft, A rear flange provided with a boss portion provided on the rear flange body, a cutting blade into which the boss portion of the rear flange is inserted, and a threaded engagement with the boss portion of the rear flange. In a cutting blade mounting method of a cutting blade mounting device comprising a flange nut for sandwiching the cutting blade between the grooves, an annular groove is formed on the surface of the rear flange body opposite to the surface facing the flange nut. By forming and adjusting the depth of the groove, the amount of deformation of the rear flange when rotating at high speed is adjusted, and the clamping force of the cutting blade is adjusted.
The invention according to claim 4 is a cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at a high speed, the rear flange body that penetrates and is fixed to the rotary shaft, A rear flange provided with a boss portion provided on the rear flange body, a cutting blade into which the boss portion of the rear flange is inserted, and a threaded engagement with the boss portion of the rear flange. In a cutting blade mounting method of a cutting blade mounting device comprising a flange nut for sandwiching the cutting blade between them, a groove is formed in an annular shape on the surface of the flange nut opposite to the surface facing the rear flange Then, by adjusting the depth of the groove, the amount of deformation of the flange nut when rotated at high speed is adjusted, and the clamping force of the cutting blade is adjusted.
The invention according to claim 5 is a cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at a high speed, the rear flange body being penetrated and fixed to the rotary shaft, A rear flange provided with a boss portion provided on the rear flange body, a cutting blade into which the boss portion of the rear flange is inserted, and a threaded engagement with the boss portion of the rear flange. In a cutting blade mounting method of a cutting blade mounting device comprising a flange nut for sandwiching the cutting blade between the grooves, an annular groove is formed on the surface of the rear flange body opposite to the surface facing the flange nut. Forming and adjusting the depth of the groove to adjust the amount of deformation of the rear flange when rotated at high speed to adjust the clamping force of the cutting blade, and the rear flange of the flange nut Opposite A groove is formed in an annular shape on the surface opposite to the surface, and the depth of the groove is adjusted to adjust the amount of deformation of the flange nut when rotated at a high speed, so that the holding force of the cutting blade It is characterized by adjusting.

According to the present invention, even if the rear flange or the flange nut is rotated at a high speed, the rear flange or the flange nut hardly swells in the thrust direction, and the cutting blade mounting device in which the clamping force of the cutting blade hardly decreases , And it becomes possible to provide the cutting blade mounting method .

Hereinafter, a cutting blade mounting apparatus and a cutting blade mounting method according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram for explaining an overall configuration of a cutting blade mounting apparatus according to an embodiment of the present invention. FIG. 2 is a view for explaining the configuration of the rear flange.

  As shown in FIG. 1, the cutting blade mounting device 10 includes a cutting blade 20 (a hub blade is illustrated in FIG. 1) for cutting a workpiece (such as a semiconductor wafer) (not shown), and a workpiece cutting portion of a dicing device (not shown). This is for mounting on the rotating shaft S of the spindle motor M to be configured.

  As shown in FIG. 1, the cutting blade mounting apparatus 10 includes a rear flange body 33 having a substantially cylindrical small diameter portion 31 and a large diameter portion 32, a rear flange 30 including a substantially cylindrical boss portion 34, and the like, a hub. The cutting blade 20 having a cutting edge 22 formed around the portion 21 and the hub portion 21 and the boss portion 34 of the rear flange 30 penetrating therethrough, and being screwed and tightened to the tip of the boss portion 34 of the rear flange 30, the self and the rear flange And a fixing nut 50 for fixing the flange 30 to the rotating shaft S of the spindle motor after the rotating shaft S of the spindle motor M is inserted. . As shown in FIG. 2, an annular surface 32a for holding the cutting blade 20 on the outer peripheral side is formed on the surface of the rear flange 30 (large diameter portion 32) on the side facing the flange nut 40. A non-contact surface 32b that is one step lower than the annular surface 32a is formed on the circumferential side.

  A rotation shaft S of the spindle motor M is inserted into the rear flange 30 and fixed to the rotation shaft S. That is, the rear flange 30 is formed with a through-hole 35 that is tapered (inclined so as to have a smaller diameter toward the right in FIGS. 1 and 2). As shown, the rotation axis S of the spindle motor M (inclined so as to decrease in diameter toward the right in FIG. 1) is inserted. After the penetration, when a fixing nut 50 is screwed and tightened to the tip of the rotation shaft S of the spindle motor M, a force is applied to the rear flange 30 to move leftward in FIG. Thereby, the inner peripheral surface of the through-hole 35 of the rear flange 30 and the outer peripheral surface of the rotation shaft S of the spindle motor M are brought into close contact with each other, and both are firmly fixed (wedge effect). As described above, the rear flange 30 is fixed to the rotating shaft S of the spindle motor M.

  An annular groove 32c centering on the rotation center of the rotation shaft S of the spindle motor M is formed on the surface of the rear flange body 33 (large diameter portion 32) opposite to the surface facing the flange nut 40. . Similarly, an annular groove 41 centering on the rotation center of the rotation shaft S of the spindle motor M is formed on the surface opposite to the surface on which the rear flange 30 faces the flange nut 40.

  By forming the groove 32c (and the groove 41) in this way, even if the rear flange 30 (and the flange nut 40) is rotated at a high speed (for example, 100,000 rotations per minute), the thrust of the rear flange 30 is increased. Bulge (and bulge in the thrust direction of the flange nut 40) is smaller than in the prior art. Table 2 shows the measurement results of the amount of deformation in the thrust direction of the rear flange 30 '(and the flange nut 40' in which the groove 41 is formed) after the groove 32c is formed.

この表２及び表１から明らかなように、溝３２ｃが形成された後フランジ３０（及び、溝４１が形成されたフランジナット４０）の変形量は、溝が形成されていない従来の後フランジ３０´（及び、フランジナット４０´）と比較して、極めて小さくなっている。すなわち、後フランジ３０（及び、フランジナット４０）を高速回転させたとしても、後フランジ３０（大径部３２）及びフランジナット４０はスラスト方向に殆ど膨らまず、切断刃２０の挟持力が殆ど低下しない。なお、各溝３２ｃ、４１の深さを変えることで、後フランジ３０（及び、フランジナット４０）の変形量を調整可能である。

As apparent from Table 2 and Table 1, the deformation amount of the rear flange 30 (and the flange nut 40 formed with the groove 41) formed with the groove 32c is the same as that of the conventional rear flange 30 where no groove is formed. '(And flange nut 40') is extremely small. That is, even if the rear flange 30 (and the flange nut 40) is rotated at a high speed, the rear flange 30 (large diameter portion 32) and the flange nut 40 hardly swell in the thrust direction, and the clamping force of the cutting blade 20 is almost reduced. do not do. Note that the amount of deformation of the rear flange 30 (and the flange nut 40) can be adjusted by changing the depth of each of the grooves 32c and 41.

  As described above, according to the cutting blade mounting apparatus 10 of the present embodiment, the grooves 32c (and the grooves 41) are formed in the rear flange 30 (and the flange nut 40), and thus no conventional groove is formed. Even when the rear flange 30 (and the flange nut 40) is rotated at a high speed as compared with the rear flange 30 ′ (and the flange nut 40 ′), the rear flange 30 (large diameter portion 32) and the flange nut 40 are It hardly swells in the thrust direction, and the clamping force of the cutting blade 20 hardly decreases. Therefore, even if the rear flange 30 (and the flange nut 40) is rotated at a high speed, the rear flange 30 is loosened, the cutting blade 20 is idled, the cutting blade 20 is dropped, or the flange nut 40 is loosened. Can be prevented.

  Next, a modified example will be described.

  In the above embodiment, each of the grooves 32c and 41 has been described as an annular groove centered on the rotation center of the rotation shaft S of the spindle motor M, but the present invention is not limited to this.

  For example, the grooves 32c and 41 may be grooves (non-continuous grooves) formed at predetermined intervals on a circumference centered on the rotation center of the rotation shaft S of the spindle motor M.

  Moreover, although the said embodiment demonstrated that the cutting blade 20 was clamped between the rear flange 30 and the flange nut 40, this invention is not limited to this.

  For example, a front flange through which the boss portion 34 of the rear flange 30 is inserted may be provided, and the cutting blade 20 may be sandwiched between the rear flange 30 and the front flange by tightening the flange nut 40. In this case, it is possible to prevent expansion of the front flange in the thrust direction by forming a groove similar to the groove 41 in the front flange.

  The above embodiment is merely an example in all respects. The present invention is not construed as being limited to these descriptions. The present invention can be implemented in various other forms without departing from the spirit or main features thereof.

It is a figure for demonstrating the whole structure of the cutting blade mounting apparatus which is one Embodiment of this invention. It is a figure for demonstrating the structure of a rear flange. It is a figure for demonstrating the whole structure of the conventional cutting blade mounting apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Cutting blade mounting apparatus, 20 ... Cutting blade, 21 ... Hub part, 22 ... Cutting edge, 30 ... Rear flange, 31 ... Small diameter part, 32 ... Large diameter part, 32a ... Annular surface, 32b Non-contact surface, 32c ... Groove 33 ... Rear flange main body, 34 ... Boss portion, 35 ... Through hole, 40 ... Flange nut, 41 ... Groove, 50 ... Fixed nut, M ... Spindle motor, S ... Rotating shaft

Claims (5)

A cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at high speed,
A rear flange provided with a rear flange body that is penetrated and fixed to the rotary shaft, and a boss provided on the rear flange body;
A cutting blade into which the boss of the rear flange penetrates;
A flange nut for clamping the cutting blade between the rear flange and the self by screwing into a boss portion of the rear flange;
With
In the rear flange, a groove for preventing deformation in the thrust direction of the rear flange is formed in an annular shape on the surface of the rear flange body opposite to the surface facing the flange nut ,
In the flange nut, a groove for preventing deformation in the thrust direction of the flange nut is formed in an annular shape on a surface of the flange nut opposite to a surface facing the rear flange. Cutting blade mounting device. The groove formed in the rear flange is adjusted in depth so that the amount of deformation in the thrust direction of the rear flange when rotating at a high speed becomes a predetermined amount of deformation, and the groove formed in the flange nut is 2. The cutting blade mounting device according to claim 1, wherein the depth is adjusted so that the amount of deformation in the thrust direction of the flange nut when rotating at a high speed becomes a predetermined amount of deformation. A cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at high speed,
A rear flange provided with a rear flange body that is penetrated and fixed to the rotary shaft, and a boss provided on the rear flange body;
A cutting blade into which the boss of the rear flange penetrates;
A flange nut for clamping the cutting blade between the rear flange and the self by screwing into a boss portion of the rear flange;
In the cutting blade mounting method of the cutting blade mounting device provided with,
A groove is annularly formed on the surface of the rear flange body opposite to the surface facing the flange nut, and the depth of the rear flange is adjusted by adjusting the depth of the groove to reduce the amount of deformation of the rear flange. A cutting blade mounting method for a cutting blade mounting device, characterized by adjusting the clamping force of the cutting blade. A cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at high speed,
A rear flange provided with a rear flange body that is penetrated and fixed to the rotary shaft, and a boss provided on the rear flange body;
A cutting blade into which the boss of the rear flange penetrates;
A flange nut for clamping the cutting blade between the rear flange and the self by screwing into a boss portion of the rear flange;
In the cutting blade mounting method of the cutting blade mounting device provided with,
By adjusting the depth of the groove, the amount of deformation of the flange nut when rotating at high speed is adjusted by forming a groove on the surface of the flange nut opposite to the surface facing the rear flange. Then, the cutting blade mounting method of the cutting blade mounting device, wherein the clamping force of the cutting blade is adjusted. A cutting blade mounting device for mounting a cutting blade on a rotary shaft that can be rotated at high speed,
A rear flange provided with a rear flange body that is penetrated and fixed to the rotary shaft, and a boss provided on the rear flange body;
A cutting blade into which the boss of the rear flange penetrates;
A flange nut for clamping the cutting blade between the rear flange and the self by screwing into a boss portion of the rear flange;
In the cutting blade mounting method of the cutting blade mounting device provided with,
A groove is annularly formed on the surface of the rear flange body opposite to the surface facing the flange nut, and the depth of the rear flange is adjusted by adjusting the depth of the groove to reduce the amount of deformation of the rear flange. Adjust and adjust the clamping force of the cutting blade,
By adjusting the depth of the groove, the amount of deformation of the flange nut when rotating at high speed is adjusted by forming a groove on the surface of the flange nut opposite to the surface facing the rear flange. Then, the cutting blade mounting method of the cutting blade mounting device, wherein the clamping force of the cutting blade is adjusted.

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