KR100582636B1 - Hub blade - Google Patents

Abstract

In the case where the hub blade is attached to the blade support portion formed at the distal end of the rotating spindle disposed in the cutting device, the hub can be easily mounted and the hub can be prevented from occurring when the rotating spindle is rotated. The cutting precision is improved by preventing the blades from vibrating.

The insertion hole 17 formed in the hub blade 10 is formed in a taper shape corresponding to the taper shape of the blade mount part 14 formed in the blade support part 12 so that the tapered surfaces are fixed in close contact with each other.

Hub blade, insertion hole, blade support, blade mount, taper shape.

Description

Hub Blade {HUB BLADE}

BRIEF DESCRIPTION OF THE DRAWINGS Sectional drawing which shows the hub blade, the spindle to which this hub blade is mounted, and a mounting nut in 1st Embodiment of this invention.

2 is a cross-sectional view of the hub blade, blade mount, spindle and mounting nut.

3 is a perspective view showing a hub blade, a spindle, and a mounting nut in a second embodiment of the present invention.

4 is a cross-sectional view of the hub blade, spindle and mounting nut.

Fig. 5 is a front view showing a state in which the hub blade and the mounting nut are assembled to the spindle.

Fig. 6 is a cross-sectional view showing the outer diameter, thickness, and inclination angle of the insertion hole of the hub blade as symbols.

7 is a perspective view illustrating an example of a cutting device in which a hub blade is mounted.

8 is a perspective view showing the configuration of a cutting means provided with a conventional hub blade.

9 is a cross-sectional view of a conventional hub blade, spindle and mounting nut.

<Explanation of symbols for the main parts of the drawings>

10: hub blade, 10a: circular base, 10b: cutting edge, 11: spindle, 12: blade support, 13: stopper portion, 14: blade mount portion, 15: mounting nut, 16: blood Screw fitting, 17: insertion hole, 18: insertion hole, 20: spindle, 21: blade mounter, 22: mounter insertion hole, 22a: blood fitting part, 23: blade mounter mounting nut, 24: first blood Screwing portion, 25: stopper portion, 26: blade mount portion, 27: second threading portion, 28: screwing portion, 29: insertion hole, 30: hub blade, 31: round base, 32: cutting edge, 33 : Flange, 34: insertion hole, 35: insertion hole, 40: spindle, 41: blade support portion, 42: blade mount portion, 43: pinion fitting portion, 50: cutting device, 51: chuck table, 52: alignment means, 53 : Cutting means.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a blade mounted on a cutting device for cutting a workpiece, and more particularly, to a hub blade of a type in which a cutting edge is integrally formed with a hub.

This kind of hub blade is mounted in the cutting device 50 shown in FIG. 11, for example. In the cutting device 50, for example, when cutting the wafer W, the wafer W is supported by the frame F through the support tape T, and suction-supported by the chuck table 51 which is the support means for supporting the wafer W. Then, the chuck table 51 moves in the X-axis direction and is positioned directly below the alignment means 52. The cutting area is detected by a process such as pattern matching, thereby forming the cutting area and the cutting means 53. Positioning of the blade in the Y-axis direction is performed. When alignment is made in this way, the chuck table 51 moves again in the X-axis direction, and cutting is performed under the action of rotation of about 20000 RPM of the hub blade 56 constituting the cutting means 53.

12 shows the cutting means 53 with the front cover removed, a blade for cutting the workpiece at the tip of the spindle 55 rotatably supported by the spindle housing 54, for example a circular base. The hub blade 56 which consists of 56a and the cutting edge 56b is attached, and it is set as the structure fixed by the mounting nut 57. As shown in FIG. Moreover, the blade cover 58 is attached to the front end of the spindle housing 54, whereby the hub blade 56 is covered, and the blade cover 58 is cut to supply cutting water during cutting. The water supply nozzle 59 is also arranged.

As shown in FIG. 13, the blade support part 60 is formed in the front-end | tip part of the spindle 35, and this blade support part 60 has the stopper part 61 which has a diameter larger than the shaft diameter of the spindle 55. As shown in FIG. ), A to-be-mounted portion 63 to which the hub blade 56 is mounted, and a to-be-threaded portion 63 formed of a male screw formed at the distal end of the blade support portion 60 and to which the mounting nut 57 is screwed. It is.

The mounting hole 64 is formed in the hub blade 56, and the mounting hole 64 is inserted into the mounting portion 62, and the mounting nut 57 is screwed onto the threaded fitting portion 63. As a result, the hub blade 56 is pinched by the stopper portion 61 and the mounting nut 57 to be fixed to the spindle 55, and is rotatable with the rotation of the spindle 55.

However, since the inner diameter of the mounting hole 64 is almost the same as the shaft diameter of the mounted portion 62, and further has a constant inner diameter, it is difficult to mount the hub blade 56 to the blade support portion 60. There is a problem.

On the other hand, in order to enable the insertion of the mounting hole 64 into the mounting portion 62, the inner diameter of the mounting hole 64 is slightly larger (for example, about several tens of micrometers) than the shaft diameter of the mounting portion 62. As a result, some gaps are generated between the two when they are attached, and this may cause an eccentricity at the time of rotation of the spindle 55. When the eccentricity is generated in this way, vibration occurs in the hub blade 56, deteriorating cutting accuracy, and there is a problem that chipping (cutting rice) easily occurs on the wafer. In particular, this problem is remarkable when the number of revolutions of the spindle 55 is increased to 30000 RPM to 60000 RPM to increase cutting efficiency.

As described above, in the case of mounting the hub blade to the blade support portion formed at the distal end of the rotating spindle, the hub blade is vibrated by preventing the eccentricity from occurring during the rotation of the rotating spindle while enabling the mounting to be easily performed. There is a problem to be solved in order not to generate, and to raise cutting precision.

As a specific means for solving the above problems, the present invention includes at least a cutting means having a support means for supporting the workpiece, a blade for cutting the workpiece supported by the support means, and a spindle on which the blade is mounted. A cutting device comprising: a hub blade mounted to a blade support portion formed at a tip end portion of the spindle, the blade blade comprising a circular base and a cutting edge protruding from an outer circumference of the circular base. According to the tapered shape of the blade mount portion constituting the present invention provides a hub blade is formed with a tapered insertion hole is enlarged toward the insertion port side.

In addition, the hub blade is formed such that the tapered surface of the insertion hole is formed at an angle of 5 ° to 20 ° with respect to the center of rotation of the spindle, and the thickness of the circular base is 10mm to 20mm as an additional factor. do.

Since the inner diameter of the insertion hole of the insertion hole is sufficiently larger than the shaft diameter of the tip of the blade support portion, the hub blade configured in this way does not require precise positioning during mounting on the blade mount portion, and smoothly according to the tapered surface of the blade mount portion. Since it can be attached | attached easily, mounting can be performed very easily.

In addition, since the tapered surface of the insertion hole is fixed in a state in which the tapered surface of the insertion hole is in close contact with the tapered surface, there is little eccentricity in the hub blade during rotation of the spindle, and vibration is very small.

In addition, in the case where the tapered surface constituting the insertion hole is formed to form an angle of 5 ° to 20 ° with respect to the rotation axis center of the spindle, the eccentricity of the hub blade becomes small especially when the thickness of the circular base is 10mm to 20mm. In addition, vibration can be minimized and material waste can be eliminated.

As 1st Embodiment of this invention, the hub blade 10 attached to the spindle mounted in the cutting device shown in FIG. 11 is demonstrated with reference to FIG.

In the example shown in FIG. 1, the blade support part 12 is formed in the front-end | tip of the spindle 11, This blade support part 12 has the stopper part 13 which has a diameter larger than the shaft diameter of the spindle 11, and a hub. Although the blade mount 14 is composed of a blade mount 14 on which the blade 10 is mounted, and a pinion fitting portion 16 on which the mounting nut 15 is screwed, the blade mount portion 14 is formed in a tapered shape. 12 and 13 are different from the conventional examples shown in FIG.

The hub blade 10 is composed of a circular base 10a and a cutting edge 10b protruding from the circular base 10a to the outer circumferential side, and corresponds to the shape of the blade mount portion 14 formed in a tapered shape in the axial direction. A tapered insertion hole 17 is formed. The insertion hole 17 is formed in a tapered shape in which the diameter is expanded toward the insertion hole 18 side, and the insertion hole 18 has an inner diameter sufficiently larger than the shaft diameter of the tip of the blade support portion 12.

When the hub blade 10 configured as described above is mounted to the blade mount portion 14, the insertion hole 18 is positioned at the tip of the blade support portion 12, and the blade mount portion 14 is inserted into the insertion hole 17. The hub blade 10 is inserted until one side of the hub blade 10 abuts against the stopper portion 13 so as to be engaged. Then, when the mounting nut 15 is screwed into the thread-fitting portion 16, the tapered surface of the blade mount portion 14 and the tapered surface of the insertion hole 17 are fixed in a state of being in close contact with each other without a gap.

In this way, in the mounting of the hub blade 10, it is not necessary to precisely align the blade mount portion 14 and the insertion hole 17 as in the prior art, and the blade support portion 12 inside the insertion hole 18. Since the hub blade 10 is simply pushed in after roughly positioning the distal end portion so as to be accommodated, it can be easily mounted.

In addition, when the mounting nut 15 is screwed onto the to-be-threaded portion 16, the tapered surface of the blade mount portion 14 and the tapered surface of the insertion hole 17 are fixed in a state of being in close contact with each other without a gap. Therefore, the eccentricity does not occur in the hub blade 10 at the time of rotation of the spindle 11. Therefore, since the vibration does not occur in the hub blade 10, the cutting precision is high, and chipping is also less likely to occur.

Next, as shown in FIG. 2, the case where the blade mounter 21 is attached as a blade support part separately to the front-end | tip of the spindle 20, and the hub blade 10 is attached to this blade mounter 21 is demonstrated. do. Also in this case, the hub blade 10 may be mounted with the same one as in the case of FIG. 1.

2, the mounter insertion hole 29 is positioned at the tip of the spindle 20, the blade mounter 21 is inserted, and the mounter insertion hole 22 formed in the spindle 20 and the blade mounter 21 is formed. ) And the blade mounter mounting nut 23 is screwed into the first threaded fitting 24, thereby fixing the blade mounter 21 to the spindle 20. And as shown, the tapered-shaped engagement part 22a is formed in all or one part of the mounter insertion hole 22, and the engagement part 28 corresponding to the taper shape is also provided in the spindle 20, too. By forming, the mounting of the blade mounter 21 to the spindle 20 can be easily performed, and vibration can be prevented from occurring in the blade mounter 21.

The blade mounter 21 is composed of a stopper portion 25, a tapered blade mount portion 26, and a second threaded portion 27 formed with a male screw. Then, the hub blade 10 is inserted into the tapered surface of the blade mount portion 26 so that the tapered surfaces of the insertion hole 17 are brought into close contact with each other, and the mounting nut 15 is attached to the second threaded portion 27. When screwed together, the stopper portion 25 and the mounting nut 15 are sandwiched to fix the hub blade 10 to the blade mounter 21.

In this way, even when the hub blade 10 is mounted on the blade mounter 21, the blade mount portion 26 and the insertion hole 17 need not be precisely aligned as in the case of FIG. Since the tip blade portion of the blade mounter 21 is roughly positioned so that the tip portion of the blade mounter 21 is accommodated in the interior of the cylinder 18, the hub blade 10 can be pushed in easily.

In addition, since the tapered surfaces of the insertion hole 17 and the blade mount portion 26 are fixed in a state in which the insertion surfaces 17 are in close contact with each other, no eccentricity occurs in the hub blade 10 during the rotation of the spindle 20. Therefore, since the vibration does not occur in the hub blade 10, the cutting precision becomes high, and chipping of the workpiece becomes difficult to occur.

Next, as a second embodiment of the present invention, the hub blade 30 shown in FIGS. 3 to 5 will be described. The hub blade 30 is composed of a circular base 31, a cutting edge 32 protruding outward from the circular base 31, and a flange 33, and the insertion hole 34 penetrates them in the axial direction. It becomes the structure to say. As shown in FIG. 4, this insertion hole 34 is formed in the taper shape by which the diameter expands toward the insertion opening 35 side.

In the example shown in FIG. 3 and FIG. 4, the blade support part 41 is formed in the front-end | tip of the spindle 40, This blade support part 41 is a blade mount part 42 in which the hub blade 30 is mounted, The mounting nut 15 is constituted by a threaded fitting portion 43 into which the mounting nut 15 is screwed.

When the hub blade 30 is mounted to the blade mount portion 42, the insertion hole 35 of the hub blade 30 is positioned at the tip of the blade support portion 41, and the blade mount portion 42 is inserted into the insertion hole 34. Insert the hub blades 30 so that they fit. Then, when the mounting nut 15 is screwed into the threaded fitting portion 43, the tapered surface of the blade mount portion 42 and the tapered surface of the insertion hole 34 are fixed in a state of being in close contact with each other without a gap. The state at this time is shown in FIG.

In this manner, since the tapered surface of the blade mount portion 42 and the tapered surface of the insertion hole 34 are fixed in close contact with no gap, no eccentricity occurs in the hub blade 30 during the rotation of the spindle 40. . Therefore, since the vibration does not occur in the hub blade 30, the cutting precision is increased, and chipping in the workpiece becomes difficult to occur.

Incidentally, the spindle 40 does not correspond to the stopper portion 13 in the example of FIG. 1 and the stopper portion 25 in the example of FIG. 2, but the tapered surface and the insertion hole 17 of the blade mount portion 14 are provided. ), The tapered surface is fixed in a state of being in close contact with no gap, and the blade mount portion 14 plays a role as a stopper, so that the stopper portion is not necessarily required.

Here, the results when the spindle 40 was actually rotated in the state of FIG. 5 and the unbalance amount and the vibration amplitude value of the hub blade 30 at that time were measured are shown in Tables 1-4. In addition, the unbalance amount measurement device (DBM-EAB-3T) made from Shimadzu Seisakusho is used for the measurement of the unbalance amount, and the vibration displacement amount measurement device made by Shinkensha Co., Ltd. is used for the measurement of the vibration amplitude value. (V-1107M) and the acceleration sensor 213E made by Endebu Co., Ltd. were used. In addition, when performing an experiment, as shown in FIG. 6, the inclination angle with respect to the axial center of the spindle 40 of the taper surface which comprises the outer diameter D, the thickness T, and the insertion hole 34 of the hub blade 30 is shown. When θ was θ, the outer diameter D was 52 mm in all the experiments, but the thickness T and the inclination angle θ were measured for various types of things.

First, Table 1 shows the hub blade 30 having an outer diameter D = 52 mm, a thickness T = 10 mm, an inclination angle θ = 5 °, and the inclination angle θ = 0 ° having the same outer diameter and thickness as shown in FIGS. 12 and 13. It shows the result when the spindle 40 was rotated at 50000 RPM using both the conventional hub blades 56, and the unbalance amount at this time was measured as the moment (unit: mg * cm). Here, since the unbalance amount may vary depending on the mounting angle of the hub blade 30 with respect to the spindle 40, the hub blade 30 is rotated by 90 degrees with respect to the spindle 40, and a certain fixed position is mounted. The mounting angle was divided into four cases of 0 degrees, 90 degrees, 180 degrees, and 270 degrees on the basis of the reference, and measured for each case.

As can be seen from FIG. 7, in the case of the conventional hub blade, the unbalance amount is 30 mg · cm or more at any angle. In the hub blade of the present invention, the unbalance amount is all 5 mg · cm or less. It can be seen that it is greatly reduced.

Next, Tables 2 (A) to (D) use the same two hub blades as in the case of FIG. 7 to set the rotation speed of the spindle 40 to 30000 RPM, 40000 RPM, 50000 RPM, 60000 RPM, and the vibration in each case. The result when the amplitude value (unit is micrometer) was measured.

As can be seen from Figs. 2A to 2D, in any case, it was confirmed that the hub blade of the present invention had a smaller vibration amplitude than the conventional hub blade.

From the measurement result of Table 1 and Table 2, it turns out that the hub blade of this invention is significantly reduced compared with the conventional hub blade 56 in the spindle 40. As shown in FIG.

Table 3 below shows the results of measuring various types of the hub blade 30 of the present invention in which the thickness T and the inclination angle θ are varied and measuring the unbalance amount for each. In this measurement, as in the case of the measurement in Table 1, the attachment of the hub blade 30 to the spindle 40 is performed by rotating at 0 °, 90 °, 180 °, and 270 °, in each case. Although the measurement was made in Fig. 9, the average values of these four cases were shown.

As can be seen from Table 3, when the thickness T is 5mm, the amount of unbalance becomes relatively large when the inclination angle θ is 2 °, but the amount of unbalance is small when the thickness T is 10 mm or more and the inclination angle θ is 5 ° or more. ought.

Tables 4 (A) to (B) show values when the vibration amplitude values of the hub blades 30 are measured under the same conditions as in the case of the measurement in Table 3, and (A) shows the spindle 40. When it rotates at 30000 RPM, (B) shows the measurement result at the time of rotating the spindle 40 at 60000 RPM.

In any of Table 4 (A) and (B), when the thickness T is 5 mm, when the inclination angle θ is 2 ° or 25 ° or more, the amplitude of vibration is relatively large, but the thickness T is 10 mm or more and the inclination angle θ is 5 mm. When it is -20 degrees, the vibration amplitude value becomes small. When considering the result of these Table 3 and Table 4 collectively, in order to reduce the eccentricity of the hub blade 30, it is thought that it is necessary that thickness T is 10 mm or more and inclination-angle (theta) exists in the range of 5-20 degrees. Even if the thickness exceeds 20 mm, since the vibration amplitude value is almost constant, the thickness is preferably 10 mm to 20 mm in order to eliminate waste of materials.

In addition, although not shown about the case where the spindle 40 rotates at 40000 RPM, and the case where it rotated at 50000 RPM, in either case, similarly to the above, when the thickness T is 10 mm or more and the inclination-angle (theta) is 5-20 degrees, a vibration amplitude is shown. It was confirmed that the value decreased.

As described above, the hub blade according to the present invention has a larger inner diameter at the insertion hole side of the insertion hole than the shaft diameter at the tip of the blade support portion, and thus does not require precise positioning during mounting to the blade support portion, and the blade mount portion Since mounting can be performed smoothly along a taper surface, mounting can be performed very easily. Therefore, maintenance, such as replacement of a hub blade, can be performed efficiently.

In addition, since the tapered surface of the insertion hole is fixed in a state where the tapered surface of the insertion hole is in close contact with the tapered surface, no eccentricity occurs in the hub blade when the spindle rotates. Therefore, since the vibration does not occur in the hub blade, the cutting precision is high, and chipping is less likely to occur in the workpiece, so that a high quality product can be provided.

In addition, when the tapered surface constituting the insertion hole is formed to form an angle of 5 ° to 20 ° with respect to the axis of rotation of the spindle, when the thickness of the circular base is 10mm to 20mm, the eccentricity of the hub blade becomes small especially. Since the vibration can be minimized and the waste of material can be eliminated, the generation of chipping can be prevented very effectively, and the quality of the product can be further improved.

Claims (3)

A cutting device comprising at least a cutting means having a support means for supporting a workpiece, a blade for cutting the workpiece supported by the support means, and a spindle on which the blade is mounted, wherein the blade support portion is formed at the tip of the spindle. Hub blades mounted on It is composed of a circular base and a cutting edge protruding from the outer circumference of the circular base, and a taper having an enlarged diameter toward the insertion opening side in the center of the circular base in correspondence with the taper shape of the blade mount portion constituting the blade support. Hub blades are formed with the insertion hole of the shape. The method of claim 1, The tapered surface constituting the insertion hole is a hub blade formed to form an angle of 5 ° to 20 ° with respect to the axis of rotation of the spindle. The method according to claim 1 or 2, Hub blades with a thickness of 10 mm to 20 mm.

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