JP2022094647A - Hub blade unit, hub blade, and mount flange - Google Patents

Abstract

To provide a new technique for preventing idle running of a hub blade having a cutting blade for cutting a workpiece.SOLUTION: A hub blade unit has a mount flange body 52 having a boss part 53 having a male screw 53a formed on a tip side, and a flange part 53c that projects in a radial direction from a rear end side of the boss part 53, and has a support surface 53b supporting the hub blade 40, and a fixing nut that has a female screw screwed to the male screw 53a of the boss part 53 formed on its inner periphery, and sandwiches and fixes the hub blade 40 together with the flange part 53c, in which the hub blade 40 has a circular base 42 formed with a fitting hole 43 into which the boss part 53 of the mount flange body 52 is inserted, and a cutting blade 44 formed on an outer peripheral edge of the circular base 42, a notch part 45 is formed on an inner peripheral edge 43a of the fitting hole 43 of the circular base, and a projection 55 corresponding to the notch part 45 is formed on an outer periphery of the boss part 53 of the mount flange body 52.SELECTED DRAWING: Figure 3

Description

The present invention relates to a hub blade unit comprising a hub blade having a cutting edge for cutting a workpiece and a mount flange for fixing the hub blade to a spindle.

Conventionally, a dicing device for cutting a workpiece such as a semiconductor wafer with a cutting blade is known. Patent Document 1 discloses a configuration of a hub blade having a cutting blade formed on the outer periphery of a circular base having a circular hub as a cutting blade.

Patent Document 1 discloses a configuration in which an annular groove is formed in a circular base and the innermost peripheral edge of the cutting edge is depressed in the groove as a configuration for suppressing the runout of the blade during cutting.

In this type of hub blade, a mounting hole is formed in the circular base, and the boss portion of the mount flange body is inserted into the mounting hole and fixed by fitting. Further, a female screw is formed at the tip of the boss portion, and by fastening the fixing nut to the female screw, the hub blade is sandwiched and fixed between the flange portion of the mount flange main body and the fixing nut. The mount flange body is fixed to the tip of a spindle that is rotated by a motor drive with screws.

Japanese Unexamined Patent Publication No. 2009-39919

At the time of cutting, the hub blade that rotates at high speed is positioned at a predetermined cutting height, and the workpiece is machined and fed to perform groove-shaped cutting on the workpiece. At this time, the hub blade is machined. It takes a load.

When machining with a large machining load, a force in the direction opposite to the rotation direction of the spindle acts on the hub blade due to the cutting resistance, which may cause a problem that the hub blade slips. Further, if the fixing nut is not fastened to the mount flange body with a predetermined torque and the fastening force is insufficient, the same problem may occur.

Then, when the hub blade slips, accurate machining cannot be performed, and the fixing nut loosens so as to rotate around the spinning hub blade, and the holding force between the fixing nut and the mount flange body decreases, so that the hub It may cause further idling of the blade and further reduce the machining accuracy.

In view of the above problems, the present invention proposes a novel technique for preventing the hub blade from slipping.

The problem to be solved by the present invention is as described above, and next, the means for solving this problem will be described.

According to one aspect of the invention
A hub blade unit including a hub blade having a cutting edge for cutting a workpiece and a mount flange for fixing the hub blade to a spindle.
The mount flange is
A mount flange body having a boss portion having a male screw formed on the tip end side, and a flange portion having a support surface that protrudes radially from the rear end side of the boss portion and supports the hub blade.
A female screw to be screwed with the male screw of the boss portion is formed on the inner circumference, and is provided with a fixing nut for sandwiching and fixing the hub blade together with the flange portion.
The hub blade has a circular base formed with a mounting hole into which the boss portion of the mount flange body is inserted, and a cutting edge formed on the outer peripheral edge of the circular base.
A notch is formed on the inner peripheral edge of the mounting hole of the circular base.
A hub blade unit having a convex portion corresponding to the notch portion formed on the outer periphery of the boss portion of the mount flange main body.

Further, according to one aspect of the present invention.
A hub blade that is sandwiched and fixed by the mount flange body and fixing nuts.
A circular base with a mounting hole into which the boss portion of the mount flange body is inserted, and
With a cutting edge formed on the outer peripheral edge of the circular base,
A hub blade is formed on the inner peripheral edge of the mounting hole of the circular base so that a notch corresponding to a convex portion formed on the peripheral surface of the boss portion and protruding in the radial direction is formed.

Further, according to one aspect of the present invention.
A mount flange for mounting the hub blade,
It has a mount flange body and a fixing nut.
The mount flange body is
It has a boss portion on which a male screw is formed on the tip end side, and a flange portion that protrudes radially from the rear end side of the boss portion and includes a support surface that supports the hub blade.
The fixing nut is
A female screw screwed with the male screw of the boss portion is formed on the inner circumference, and the hub blade is sandwiched and fixed together with the flange portion to form a mount flange.

According to the present invention, since the hub blade and the mount flange body are fitted to each other by the notch and the convex portion, the direction of rotation of the spindle is opposite to the rotation direction due to the cutting resistance when performing machining in which a large machining load is applied to the hub blade. Even when a force in the direction of 1 acts on the hub blade, it is possible to prevent the occurrence of a problem that the hub blade slips. Further, even when the fixing nut is not fastened to the mount flange main body with a predetermined torque and the fastening force is insufficient, it is possible to prevent the hub blade from idling. Further, by preventing the hub blade from idling, it is possible to maintain high machining accuracy, and it is also possible to prevent a decrease in machining accuracy due to loosening of the fixing nut so as to rotate with the idling of the hub blade. can.

It is a figure which shows the outline of the cutting apparatus which includes the hub blade unit. It is a figure explaining the structure of the rotary drive unit and the hub blade unit. It is a figure which shows the hub blade and the mount flange which make up a hub blade unit. It is sectional drawing which shows the state which fixed the hub blade to a mount flange.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings as appropriate.
FIG. 1 is a diagram showing an outline of a cutting device 1 provided with a hub blade unit 30 according to an embodiment of the present invention shown in FIG.

As shown in FIG. 1, the cutting device 1 includes a chuck table 2, a moving mechanism 3, an imaging unit 4, and a cutting unit 5. The workpiece W is not only a semiconductor wafer as shown in FIG. 1, but also various plate-shaped processed materials such as an optical device wafer, a plate-shaped inorganic material substrate, and a plate-shaped ductile material.

The chuck table 2 sucks and holds the workpiece W. The chuck table 2 is formed in a disk shape, and is formed in a plane whose upper surface is parallel in the horizontal direction. The chuck table 2 is made of porous ceramic and is connected to a vacuum suction source (not shown).

The moving mechanism 3 moves the chuck table 2 and the cutting unit 5 relative to each other in the X-axis direction, the Y-axis direction, and the Z-axis direction. The moving mechanism 3 includes an X-axis moving mechanism 3a, a Y-axis moving mechanism 3b, and a Z-axis moving mechanism 3c. The X-axis moving mechanism 3a supports the chuck table 2 so as to be relatively movable in the X-axis direction (machining feed direction) with respect to the base 6. The Y-axis moving mechanism 3b supports the cutting unit 5 so as to be relatively movable in the Y-axis direction (corresponding to the indexing feed direction) with respect to the base 6. The Z-axis moving mechanism 3c supports the cutting unit 5 so as to be relatively movable in the Z-axis direction (corresponding to the cutting feed direction) with respect to the base 6. Each of the moving mechanisms 3a to 3c is composed of, for example, a motor, a ball screw, a nut, or the like.

The image pickup unit 4 takes an image of the street before cutting in order to adjust the alignment of the cutting unit 5 with respect to the planned division line (street) of the workpiece W. The image pickup unit 4 is, for example, a camera using a CCD (Charge Coupled Device) image sensor or the like.

2 to 4 are views showing the configuration of the hub blade unit 30 attached to the rotary drive unit 10.

As shown in FIG. 2, the cutting unit 5 includes a rotary drive unit 10 and a hub blade unit 30 that is rotated at high speed by the rotary drive unit 10.

The rotary drive unit 10 has a spindle 11 that is rotationally driven by a motor provided inside, and a hub blade unit 30 is detachably fixed to the tip of the spindle 11. A screw hole 11a into which a fixing screw 35 is screwed is formed at the tip of the spindle 11, and the mount flange main body 52 of the hub blade unit 30 is fixed to the tip of the spindle 11 by fastening the fixing screw 35.

As shown in FIGS. 2 and 3, the hub blade unit 30 includes a hub blade 40 and a mount flange 50.

The hub blade 40 has a circular base 42 and a cutting blade 44 formed on the outer peripheral edge of the circular base 42, and constitutes a cutting blade that rotates at high speed to cut a workpiece.

The mount flange 50 includes a mount flange main body 52 fixed to the spindle 11 and a fixing nut 56 fixed to the mount flange main body 52.

The mount flange body 52 has a shaft hole 52a corresponding to the tapered shape of the tip of the spindle 11 and a recess formed coaxially with the shaft hole 52a and formed at the end opposite to the side on which the spindle 11 is inserted. 52b and are formed. The tip of the spindle 11 is inserted into the shaft hole 52a, the fixing screw 35 is screwed into the screw hole 11a of the spindle 11, and the screw head 35a of the fixing screw 35 is brought into contact with the recess 52b. As a result, the mount flange main body 52 is fixed to the spindle 11 by the fixing screw 35.

The mount flange main body 52 is formed with a boss portion 53 to be inserted into the mounting hole 43 of the circular base 42 of the hub blade 40. A male screw 53a for fastening the fixing nut 56 is formed on the tip end side of the boss portion 53. A flange portion 53c is formed on the rear end side of the boss portion 53 so as to project radially and have a support surface 53b that supports the circular base 42 of the hub blade 40.

As shown in FIG. 4, the fixing nut 56 has a female screw 56a formed on the inner circumference thereof to be screwed with the male screw 53a of the boss portion 53 of the mount flange main body 52. By fixing the fixing nut 56 to the male screw 53a of the boss portion 53 with the boss portion 53 inserted in the mounting hole 43 of the hub blade 40, the inner side surface 56b of the fixing nut 56 and the support surface 53b of the flange portion 53c can be fixed. The hub blade 40 is sandwiched between them.

As shown in FIGS. 3 and 4, notches 45 and 45 extending in the radial direction are formed on the inner peripheral edge 43a of the mounting hole 43 of the circular base 42 of the hub blade 40. In this embodiment, concave groove-shaped notches 45, 45 extending in the axial direction are formed at four locations at equal intervals in the circumferential direction.

As shown in FIGS. 3 and 4, convex portions 55 and 55 corresponding to the notch portions 45 and 45 are formed on the outer periphery of the boss portion 53 of the mount flange main body 52. In this embodiment, convex strip-shaped protrusions 55 and 55 extending in the axial direction are formed at four locations at equal intervals in the circumferential direction.

The shape and number of the cutout portion 45 and the convex portion 55 may be any shape that fits each other, and are not particularly limited. Further, the fitting intersection at the time of so-called fitting is appropriately set depending on the shape and number.

With the above configuration, the hub blade 40 and the mount flange main body 52 are fitted to each other by the notch portion 45 and the convex portion 55. Therefore, when processing a large processing load is applied to the hub blade 40, the spindle rotates due to cutting resistance. Even when a force in the direction opposite to the direction acts on the hub blade 40, it is possible to prevent the occurrence of a problem that the hub blade 40 slips.

Further, even when the fixing nut 56 is not fastened to the mount flange main body 52 with a predetermined torque and the fastening force is insufficient, it is possible to prevent the hub blade 40 from slipping.

Further, by preventing the hub blade 40 from idling, it is possible to maintain high machining accuracy, and it is also possible to prevent a decrease in machining accuracy due to loosening of the fixing nut 56 so as to rotate with the idling of the hub blade 40. can do.

W Work piece 1 Cutting device 2 Chuck table 3 Moving mechanism 4 Imaging unit 5 Cutting unit 6 Base 6
10 Rotary drive unit 11 Spindle 11a Screw hole 30 Hub blade unit 35 Fixing screw 35a Screw head 40 Hub blade 42 Circular base 43 Mounting hole 43a Inner peripheral edge 44 Cutting blade 45 Notch 50 Mount flange 52 Mount flange body 52a Shaft hole 52b Recessed portion 53 Boss portion 53a Male screw 53b Support surface 53c Flange portion 55 Convex portion 56 Fixed nut 56a Female screw 56b Inner surface

Claims (3)

A hub blade unit including a hub blade having a cutting edge for cutting a workpiece and a mount flange for fixing the hub blade to a spindle.
The mount flange is
A mount flange body having a boss portion having a male screw formed on the tip end side, and a flange portion having a support surface that protrudes radially from the rear end side of the boss portion and supports the hub blade.
A female screw to be screwed with the male screw of the boss portion is formed on the inner circumference, and is provided with a fixing nut for sandwiching and fixing the hub blade together with the flange portion.
The hub blade has a circular base formed with a mounting hole into which the boss portion of the mount flange body is inserted, and a cutting edge formed on the outer peripheral edge of the circular base.
A notch is formed on the inner peripheral edge of the mounting hole of the circular base.
A hub blade unit in which a convex portion corresponding to the notch portion is formed on the outer periphery of the boss portion of the mount flange main body. A hub blade that is sandwiched and fixed by the mount flange body and fixing nuts.
A circular base with a mounting hole into which the boss portion of the mount flange body is inserted, and
With a cutting edge formed on the outer peripheral edge of the circular base,
A hub blade having a notch formed on the inner peripheral edge of the mounting hole of the circular base and corresponding to a convex portion formed on the peripheral surface of the boss portion and protruding in the radial direction. A mount flange for mounting the hub blade,
It has a mount flange body and a fixing nut.
The mount flange body is
It has a boss portion on which a male screw is formed on the tip end side, and a flange portion that protrudes radially from the rear end side of the boss portion and includes a support surface that supports the hub blade.
The fixing nut is
A mount flange in which a female screw screwed with the male screw of the boss portion is formed on the inner circumference, and the hub blade is sandwiched and fixed together with the flange portion.

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