JP7077223B2 - 精密なナノスケール製造のための汎用性のある方法 - Google Patents

精密なナノスケール製造のための汎用性のある方法 Download PDF

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Publication number
JP7077223B2
JP7077223B2 JP2018519399A JP2018519399A JP7077223B2 JP 7077223 B2 JP7077223 B2 JP 7077223B2 JP 2018519399 A JP2018519399 A JP 2018519399A JP 2018519399 A JP2018519399 A JP 2018519399A JP 7077223 B2 JP7077223 B2 JP 7077223B2
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Prior art keywords
substrate
super straight
droplets
inkjet
chuck
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Japanese (ja)
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JP2018531786A (ja
Inventor
ヴイ． スリニーヴァッサン，シトルガタ
シンハル，シュラワン
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University of Texas System
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University of Texas System
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • B05D1/42—Distributing applied liquids or other fluent materials by members moving relatively to surface by non-rotary members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0291—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work the material being discharged on the work through discrete orifices as discrete droplets, beads or strips that coalesce on the work or are spread on the work so as to form a continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/0038—Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B05C11/028—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface with a body having a large flat spreading or distributing surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/067—Curing or cross-linking the coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
JP2018519399A 2015-10-15 2016-10-14 精密なナノスケール製造のための汎用性のある方法 Active JP7077223B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562242147P 2015-10-15 2015-10-15
US62/242,147 2015-10-15
PCT/US2016/057008 WO2017066546A1 (fr) 2015-10-15 2016-10-14 Procédé polyvalent pour la fabrication nanométrique de précision

Publications (2)

Publication Number Publication Date
JP2018531786A JP2018531786A (ja) 2018-11-01
JP7077223B2 true JP7077223B2 (ja) 2022-05-30

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JP2018519399A Active JP7077223B2 (ja) 2015-10-15 2016-10-14 精密なナノスケール製造のための汎用性のある方法

Country Status (10)

Country Link
US (1) US9987653B2 (fr)
EP (1) EP3362189A4 (fr)
JP (1) JP7077223B2 (fr)
KR (1) KR102207781B1 (fr)
CN (1) CN108348951A (fr)
AU (1) AU2016340065B2 (fr)
CA (1) CA3001848C (fr)
IL (1) IL258703B2 (fr)
SG (1) SG11201803014WA (fr)
WO (1) WO2017066546A1 (fr)

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US11141919B2 (en) 2015-12-09 2021-10-12 Holo, Inc. Multi-material stereolithographic three dimensional printing
WO2017201431A1 (fr) * 2016-05-20 2017-11-23 Board Of Regents, The University Texas System Alignement de précision du système de coordonnées de substrat par rapport au système de coordonnées de jet d'encre
US10935891B2 (en) 2017-03-13 2021-03-02 Holo, Inc. Multi wavelength stereolithography hardware configurations
GB2564956B (en) 2017-05-15 2020-04-29 Holo Inc Viscous film three-dimensional printing systems and methods
US10245785B2 (en) 2017-06-16 2019-04-02 Holo, Inc. Methods for stereolithography three-dimensional printing
EP3427948B1 (fr) * 2017-07-10 2023-06-07 Meta Platforms Technologies, LLC Methode d'impression d'une structure tridimensionnelle et imprimante 3d pour une telle méthode
US10580659B2 (en) * 2017-09-14 2020-03-03 Canon Kabushiki Kaisha Planarization process and apparatus
US11448958B2 (en) * 2017-09-21 2022-09-20 Canon Kabushiki Kaisha System and method for controlling the placement of fluid resist droplets
CN107833649B (zh) * 2017-10-16 2019-10-11 中国科学院电工研究所 一种x射线波带片的制备方法
CN108162595B (zh) * 2018-01-05 2023-07-25 嘉兴学院 一种柔性介质基板的电流体动力喷印设备及控制方法
US11126083B2 (en) * 2018-01-24 2021-09-21 Canon Kabushiki Kaisha Superstrate and a method of using the same
US10606171B2 (en) * 2018-02-14 2020-03-31 Canon Kabushiki Kaisha Superstrate and a method of using the same
JP7301508B2 (ja) 2018-08-08 2023-07-03 キヤノン株式会社 接合レンズ、およびそれを有する光学系、および光学機器、および接合レンズの製造方法
US20220013417A1 (en) * 2018-12-13 2022-01-13 Board Of Regents, The University Of Texas System System and method for modification of substrates
EP3902659A4 (fr) 2018-12-26 2022-09-07 Holo, Inc. Capteurs pour systèmes et méthodes d'impression tridimensionnelle
US10892167B2 (en) * 2019-03-05 2021-01-12 Canon Kabushiki Kaisha Gas permeable superstrate and methods of using the same
US11550216B2 (en) * 2019-11-25 2023-01-10 Canon Kabushiki Kaisha Systems and methods for curing a shaped film
US11567401B2 (en) 2019-12-20 2023-01-31 Canon Kabushiki Kaisha Nanofabrication method with correction of distortion within an imprint system
US11562924B2 (en) * 2020-01-31 2023-01-24 Canon Kabushiki Kaisha Planarization apparatus, planarization process, and method of manufacturing an article
EP4110532A4 (fr) * 2020-02-25 2024-04-10 Univ Texas Systèmes nanométriques de dépôt de film mince
US11787117B2 (en) 2020-04-23 2023-10-17 Rtx Corporation Fabricating ceramic structures
CN111554812B (zh) * 2020-05-14 2022-04-22 苏州大学 图案化有机晶体阵列的制备方法及有机场效应晶体管
IL298377A (en) * 2020-05-18 2023-01-01 Sds Nano Inc High precision production processes of nanometer layers
EP4162303A1 (fr) * 2020-06-08 2023-04-12 Board of Regents, The University of Texas System Fabrication d'éléments optiques
CN114563312B (zh) * 2022-01-27 2022-12-06 苏州大学 一种薄膜力学性能的测量方法及测量装置

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JP2009517882A (ja) 2005-12-01 2009-04-30 モレキュラー・インプリンツ・インコーポレーテッド 固化したインプリンティング材料からモールドを分離する方法
JP2011520641A (ja) 2008-04-01 2011-07-21 モレキュラー・インプリンツ・インコーポレーテッド 大面積ロールツーロール・インプリント・リソグラフィ
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Also Published As

Publication number Publication date
WO2017066546A1 (fr) 2017-04-20
EP3362189A4 (fr) 2019-06-26
KR20180083332A (ko) 2018-07-20
CA3001848C (fr) 2023-09-19
IL258703A (en) 2018-06-28
EP3362189A1 (fr) 2018-08-22
US9987653B2 (en) 2018-06-05
SG11201803014WA (en) 2018-05-30
JP2018531786A (ja) 2018-11-01
KR102207781B1 (ko) 2021-01-26
IL258703B2 (en) 2023-11-01
IL258703B1 (en) 2023-07-01
CN108348951A (zh) 2018-07-31
CA3001848A1 (fr) 2017-04-20
US20170106399A1 (en) 2017-04-20
AU2016340065B2 (en) 2020-05-14
AU2016340065A1 (en) 2018-05-31

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