JP7062216B2 - 超薄型高感度磁気センサ - Google Patents

超薄型高感度磁気センサ Download PDF

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JP7062216B2
JP7062216B2 JP2018084600A JP2018084600A JP7062216B2 JP 7062216 B2 JP7062216 B2 JP 7062216B2 JP 2018084600 A JP2018084600 A JP 2018084600A JP 2018084600 A JP2018084600 A JP 2018084600A JP 7062216 B2 JP7062216 B2 JP 7062216B2
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magnetic
ultra
coil
asic
sensitivity
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JP2019191016A5 (enExample
JP2019191016A (ja
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義信 本蔵
晋平 本蔵
一恵 工藤
淳一 田辺
永喜 菊池
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magnedesign cooperation
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JP2018084600A 2018-04-25 2018-04-25 超薄型高感度磁気センサ Active JP7062216B2 (ja)

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6924453B1 (ja) * 2020-08-26 2021-08-25 マグネデザイン株式会社 Gsrセンサ素子の製造方法
JP6839399B1 (ja) * 2020-09-29 2021-03-10 マグネデザイン株式会社 磁界検出素子
FR3116896B1 (fr) * 2020-11-27 2022-11-18 Ntn Snr Roulements Capteur apte à détecter le champ magnétique d’un codeur à distance d’entrefer
JP7215702B1 (ja) 2022-06-15 2023-01-31 マグネデザイン株式会社 磁界ベクトルセンサ
WO2024085098A1 (ja) * 2022-10-17 2024-04-25 マグネデザイン株式会社 Gsr素子の製造方法
JP7329782B1 (ja) 2022-12-09 2023-08-21 マグネデザイン株式会社 Gsr素子の製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006013370A (ja) 2004-06-29 2006-01-12 Sanyo Electric Co Ltd 回路装置およびその製造方法
JP2006319094A (ja) 2005-05-12 2006-11-24 Fujikura Ltd 半導体装置およびその製造方法
US20070037406A1 (en) 2005-08-09 2007-02-15 Joo-Sung Park Methods of fabricating a semiconductor device using a photosensitive polyimide layer and semiconductor devices fabricated thereby
JP2007281230A (ja) 2006-04-07 2007-10-25 Fujikura Ltd 半導体装置およびその製造方法
JP2018507559A (ja) 2015-02-18 2018-03-15 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh ホールセンサを製造する方法
JP6302613B1 (ja) 2017-03-01 2018-03-28 ナノコイル株式会社 ナノコイル型gsrセンサ素子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3603406B2 (ja) * 1995-09-11 2004-12-22 株式会社デンソー 磁気検出センサおよびその製造方法
JPH1130657A (ja) * 1997-07-14 1999-02-02 Alps Electric Co Ltd 磁気センサ
JP2000238280A (ja) * 1999-02-25 2000-09-05 Casio Comput Co Ltd インクジェットプリンタの製造方法
JP2005109037A (ja) * 2003-09-29 2005-04-21 Sanyo Electric Co Ltd 半導体装置
US7750627B2 (en) * 2006-10-24 2010-07-06 Headway Technologies, Inc. Magnetic film sensor having a magnetic film for generating a magnetostriction and a depressed insulating layer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006013370A (ja) 2004-06-29 2006-01-12 Sanyo Electric Co Ltd 回路装置およびその製造方法
JP2006319094A (ja) 2005-05-12 2006-11-24 Fujikura Ltd 半導体装置およびその製造方法
US20070037406A1 (en) 2005-08-09 2007-02-15 Joo-Sung Park Methods of fabricating a semiconductor device using a photosensitive polyimide layer and semiconductor devices fabricated thereby
JP2007281230A (ja) 2006-04-07 2007-10-25 Fujikura Ltd 半導体装置およびその製造方法
JP2018507559A (ja) 2015-02-18 2018-03-15 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh ホールセンサを製造する方法
JP6302613B1 (ja) 2017-03-01 2018-03-28 ナノコイル株式会社 ナノコイル型gsrセンサ素子の製造方法

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