JP7058878B2 - 色素含有アルマイト処理プラズマインジケータ - Google Patents

色素含有アルマイト処理プラズマインジケータ Download PDF

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Publication number
JP7058878B2
JP7058878B2 JP2018560375A JP2018560375A JP7058878B2 JP 7058878 B2 JP7058878 B2 JP 7058878B2 JP 2018560375 A JP2018560375 A JP 2018560375A JP 2018560375 A JP2018560375 A JP 2018560375A JP 7058878 B2 JP7058878 B2 JP 7058878B2
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Prior art keywords
dye
plasma
treatment
indicator
red
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Japanese (ja)
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JPWO2018128123A1 (ja
Inventor
淳 伊藤
昭太 浦谷
武志 作村
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Sakura Color Products Corp
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Sakura Color Products Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

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  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Drying Of Semiconductors (AREA)
JP2018560375A 2017-01-04 2017-12-26 色素含有アルマイト処理プラズマインジケータ Active JP7058878B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2017000272 2017-01-04
JP2017000272 2017-01-04
JP2017108964 2017-06-01
JP2017108964 2017-06-01
PCT/JP2017/046587 WO2018128123A1 (ja) 2017-01-04 2017-12-26 色素含有アルマイト処理プラズマインジケータ

Publications (2)

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JPWO2018128123A1 JPWO2018128123A1 (ja) 2019-11-07
JP7058878B2 true JP7058878B2 (ja) 2022-04-25

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JP2018560375A Active JP7058878B2 (ja) 2017-01-04 2017-12-26 色素含有アルマイト処理プラズマインジケータ

Country Status (6)

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JP (1) JP7058878B2 (ko)
KR (1) KR102489971B1 (ko)
CN (1) CN110114668A (ko)
MY (1) MY193027A (ko)
TW (1) TWI735726B (ko)
WO (1) WO2018128123A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7464219B2 (ja) 2019-04-23 2024-04-09 株式会社サクラクレパス 積層体及びインジケーター
WO2020218078A1 (ja) * 2019-04-23 2020-10-29 株式会社サクラクレパス 積層体及びインジケーター

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010006610A1 (en) 1998-02-03 2001-07-05 Michael J Miller Contained indicators for determining sterilizations
JP2006162504A (ja) 2004-12-09 2006-06-22 Olympus Corp 生体関連物質検出用試験片の製造方法
JP2008127673A (ja) 2006-11-24 2008-06-05 Fujifilm Corp 微細構造体の製造方法および微細構造体
WO2015129660A1 (ja) 2014-02-28 2015-09-03 株式会社サクラクレパス 着色アルミニウム成形体及びその製造方法
JP2015205995A (ja) 2014-04-21 2015-11-19 株式会社サクラクレパス プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ
JP2016065204A (ja) 2014-09-16 2016-04-28 株式会社サクラクレパス プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9002856D0 (en) * 1990-02-08 1990-04-04 Alcan Int Ltd Fluid detection device
US5942438A (en) * 1997-11-07 1999-08-24 Johnson & Johnson Medical, Inc. Chemical indicator for oxidation-type sterilization processes using bleachable dyes
JP5285283B2 (ja) * 2008-01-24 2013-09-11 東京エレクトロン株式会社 プラズマ処理容器の陽極酸化処理方法
DE102009043762A1 (de) * 2009-09-30 2011-03-31 Clariant International Ltd. Verfahren zum Färben von anodisch oxidierten Aluminiumoberflächen
CN102925770B (zh) * 2012-08-27 2014-07-09 安徽家园铝业有限公司 氧化着色电泳涂漆铝合金型材的生产方法
JP6126042B2 (ja) 2013-06-04 2017-05-10 株式会社サクラクレパス プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケーター
TWI624890B (zh) * 2013-08-22 2018-05-21 Sakura Color Prod Corp Indicator for electronic component manufacturing apparatus, and design and/or management method of the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010006610A1 (en) 1998-02-03 2001-07-05 Michael J Miller Contained indicators for determining sterilizations
JP2006162504A (ja) 2004-12-09 2006-06-22 Olympus Corp 生体関連物質検出用試験片の製造方法
JP2008127673A (ja) 2006-11-24 2008-06-05 Fujifilm Corp 微細構造体の製造方法および微細構造体
WO2015129660A1 (ja) 2014-02-28 2015-09-03 株式会社サクラクレパス 着色アルミニウム成形体及びその製造方法
JP2015205995A (ja) 2014-04-21 2015-11-19 株式会社サクラクレパス プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ
JP2016065204A (ja) 2014-09-16 2016-04-28 株式会社サクラクレパス プラズマ処理検知用インキ組成物及びプラズマ処理検知インジケータ

Also Published As

Publication number Publication date
KR20190102185A (ko) 2019-09-03
MY193027A (en) 2022-09-23
CN110114668A (zh) 2019-08-09
TW201833395A (zh) 2018-09-16
JPWO2018128123A1 (ja) 2019-11-07
KR102489971B1 (ko) 2023-01-17
TWI735726B (zh) 2021-08-11
WO2018128123A1 (ja) 2018-07-12

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