MY193027A - Plasma indicator for treated with dye-containing alumite - Google Patents

Plasma indicator for treated with dye-containing alumite

Info

Publication number
MY193027A
MY193027A MYPI2019003362A MYPI2019003362A MY193027A MY 193027 A MY193027 A MY 193027A MY PI2019003362 A MYPI2019003362 A MY PI2019003362A MY PI2019003362 A MYPI2019003362 A MY PI2019003362A MY 193027 A MY193027 A MY 193027A
Authority
MY
Malaysia
Prior art keywords
treated
dye
plasma indicator
alumite
containing alumite
Prior art date
Application number
MYPI2019003362A
Inventor
Atsushi Ito
Shota URATANI
Takeshi Sakumura
Original Assignee
Sakura Color Prod Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sakura Color Prod Corp filed Critical Sakura Color Prod Corp
Publication of MY193027A publication Critical patent/MY193027A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

An object is to avoid contamination derived from an ink composition in a chamber. A colorant-containing alumite-treated plasma indicator comprising a colorant contained within a pore formed by anodization is provided as a solution therefor.
MYPI2019003362A 2017-01-04 2017-12-26 Plasma indicator for treated with dye-containing alumite MY193027A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017000272 2017-01-04
JP2017108964 2017-06-01
PCT/JP2017/046587 WO2018128123A1 (en) 2017-01-04 2017-12-26 Plasma indicator treated with dye-containing alumite

Publications (1)

Publication Number Publication Date
MY193027A true MY193027A (en) 2022-09-23

Family

ID=62790868

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2019003362A MY193027A (en) 2017-01-04 2017-12-26 Plasma indicator for treated with dye-containing alumite

Country Status (6)

Country Link
JP (1) JP7058878B2 (en)
KR (1) KR102489971B1 (en)
CN (1) CN110114668A (en)
MY (1) MY193027A (en)
TW (1) TWI735726B (en)
WO (1) WO2018128123A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7464219B2 (en) 2019-04-23 2024-04-09 株式会社サクラクレパス Laminate and indicator
WO2020218078A1 (en) * 2019-04-23 2020-10-29 株式会社サクラクレパス Layered body and indicator

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9002856D0 (en) * 1990-02-08 1990-04-04 Alcan Int Ltd Fluid detection device
US5942438A (en) * 1997-11-07 1999-08-24 Johnson & Johnson Medical, Inc. Chemical indicator for oxidation-type sterilization processes using bleachable dyes
US20010006610A1 (en) * 1998-02-03 2001-07-05 Michael J Miller Contained indicators for determining sterilizations
JP2006162504A (en) * 2004-12-09 2006-06-22 Olympus Corp Manufacturing method of test piece for detecting living body related substance
JP2008127673A (en) * 2006-11-24 2008-06-05 Fujifilm Corp Method of manufacturing fine structure and fine structure
JP5285283B2 (en) * 2008-01-24 2013-09-11 東京エレクトロン株式会社 Method for anodizing plasma processing vessel
DE102009043762A1 (en) * 2009-09-30 2011-03-31 Clariant International Ltd. Process for dyeing anodized aluminum surfaces
CN102925770B (en) * 2012-08-27 2014-07-09 安徽家园铝业有限公司 Production method of oxidation-colored electrophoresis-painted aluminum alloy section bars
JP6126042B2 (en) 2013-06-04 2017-05-10 株式会社サクラクレパス Ink composition for plasma processing detection and plasma processing detection indicator
TWI624890B (en) * 2013-08-22 2018-05-21 Sakura Color Prod Corp Indicator for electronic component manufacturing apparatus, and design and/or management method of the same
WO2015129660A1 (en) 2014-02-28 2015-09-03 株式会社サクラクレパス Colored formed aluminum article and method for manufacturing same
JP2015205995A (en) * 2014-04-21 2015-11-19 株式会社サクラクレパス Ink composition for plasma treatment detection and plasma treatment detection indicator
JP6567863B2 (en) * 2014-09-16 2019-08-28 株式会社サクラクレパス Ink composition for detecting plasma treatment and indicator for detecting plasma treatment

Also Published As

Publication number Publication date
KR20190102185A (en) 2019-09-03
CN110114668A (en) 2019-08-09
JP7058878B2 (en) 2022-04-25
TW201833395A (en) 2018-09-16
JPWO2018128123A1 (en) 2019-11-07
KR102489971B1 (en) 2023-01-17
TWI735726B (en) 2021-08-11
WO2018128123A1 (en) 2018-07-12

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