JP7050756B2 - 銅粒子及びその製造方法 - Google Patents
銅粒子及びその製造方法 Download PDFInfo
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- JP7050756B2 JP7050756B2 JP2019509979A JP2019509979A JP7050756B2 JP 7050756 B2 JP7050756 B2 JP 7050756B2 JP 2019509979 A JP2019509979 A JP 2019509979A JP 2019509979 A JP2019509979 A JP 2019509979A JP 7050756 B2 JP7050756 B2 JP 7050756B2
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- Prior art keywords
- copper
- copper particles
- particles
- oxygen
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010949 copper Substances 0.000 title claims description 291
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 245
- 229910052802 copper Inorganic materials 0.000 title claims description 243
- 239000002245 particle Substances 0.000 title claims description 225
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 229910052760 oxygen Inorganic materials 0.000 claims description 68
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 67
- 239000001301 oxygen Substances 0.000 claims description 67
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 58
- 239000005751 Copper oxide Substances 0.000 claims description 42
- 229910000431 copper oxide Inorganic materials 0.000 claims description 42
- 239000012298 atmosphere Substances 0.000 claims description 25
- 239000002994 raw material Substances 0.000 claims description 22
- 239000000843 powder Substances 0.000 claims description 20
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 claims description 13
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 claims description 13
- 230000001186 cumulative effect Effects 0.000 claims description 12
- 239000012808 vapor phase Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 4
- 238000000691 measurement method Methods 0.000 claims description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 44
- 238000000034 method Methods 0.000 description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 19
- OLBVUFHMDRJKTK-UHFFFAOYSA-N [N].[O] Chemical compound [N].[O] OLBVUFHMDRJKTK-UHFFFAOYSA-N 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 238000005259 measurement Methods 0.000 description 13
- 238000005240 physical vapour deposition Methods 0.000 description 12
- 238000011084 recovery Methods 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 238000004381 surface treatment Methods 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- 239000012756 surface treatment agent Substances 0.000 description 6
- 238000010947 wet-dispersion method Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 150000004665 fatty acids Chemical class 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000000634 powder X-ray diffraction Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 239000011362 coarse particle Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000005639 Lauric acid Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229920003086 cellulose ether Polymers 0.000 description 1
- 230000005591 charge neutralization Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- DTPCFIHYWYONMD-UHFFFAOYSA-N decaethylene glycol Polymers OCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO DTPCFIHYWYONMD-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- ZPIRTVJRHUMMOI-UHFFFAOYSA-N octoxybenzene Chemical compound CCCCCCCCOC1=CC=CC=C1 ZPIRTVJRHUMMOI-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000006228 supernatant Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000004841 transmission electron microscopy energy-dispersive X-ray spectroscopy Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/16—Metallic particles coated with a non-metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2201/00—Treatment under specific atmosphere
- B22F2201/03—Oxygen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/10—Copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2302/00—Metal Compound, non-Metallic compound or non-metal composition of the powder or its coating
- B22F2302/25—Oxide
Landscapes
- Powder Metallurgy (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Conductive Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017072054 | 2017-03-31 | ||
| JP2017072054 | 2017-03-31 | ||
| PCT/JP2018/012780 WO2018181482A1 (ja) | 2017-03-31 | 2018-03-28 | 銅粒子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2018181482A1 JPWO2018181482A1 (ja) | 2020-02-06 |
| JP7050756B2 true JP7050756B2 (ja) | 2022-04-08 |
Family
ID=63676352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019509979A Active JP7050756B2 (ja) | 2017-03-31 | 2018-03-28 | 銅粒子及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7050756B2 (ko) |
| KR (1) | KR102403998B1 (ko) |
| CN (1) | CN110325303B (ko) |
| TW (1) | TWI803486B (ko) |
| WO (1) | WO2018181482A1 (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6721934B2 (ja) * | 2018-12-04 | 2020-07-15 | メック株式会社 | 積層造形用銅粉末、積層造形用銅粉末の製造方法、積層造形物の製造方法及び積層造形物 |
| JP6956766B2 (ja) * | 2019-08-07 | 2021-11-02 | Ｊｘ金属株式会社 | 銅粉ペーストを用いた接合方法 |
| JP6956765B2 (ja) * | 2019-08-07 | 2021-11-02 | Ｊｘ金属株式会社 | 銅粉ペーストを用いた接合方法 |
| JP6704083B1 (ja) * | 2019-11-22 | 2020-06-03 | 東邦チタニウム株式会社 | 銅粉体とその製造方法 |
| JP7490528B2 (ja) | 2020-01-10 | 2024-05-27 | 東邦チタニウム株式会社 | 銅粉体 |
| CN113019468A (zh) * | 2021-03-05 | 2021-06-25 | 昆明理工大学 | 一种铜基Cu-Cu2O-CuO三元复合核壳材料的制备方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002169273A (ja) | 2000-11-30 | 2002-06-14 | Murata Mfg Co Ltd | 感光性銅ペースト及びそれを用いた回路基板 |
| JP2003530679A (ja) | 2000-04-10 | 2003-10-14 | テトロニクス リミテッド | ツイン・プラズマ・トーチ装置 |
| WO2016052373A1 (ja) | 2014-10-03 | 2016-04-07 | 三井金属鉱業株式会社 | 銅粉 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6280641B1 (en) * | 1998-06-02 | 2001-08-28 | Mitsubishi Gas Chemical Company, Inc. | Printed wiring board having highly reliably via hole and process for forming via hole |
| TWI359708B (en) * | 2007-03-14 | 2012-03-11 | Phibro Tech Inc | Method of producing fine particle copper powders |
| CN102784643B (zh) * | 2011-05-19 | 2014-09-24 | 中国科学院过程工程研究所 | 一种利用有机硅废触体回收的铜粉制备的三元铜催化剂及制备方法 |
| CN102350499B (zh) * | 2011-09-28 | 2013-05-08 | 河北工业大学 | 一种Cu/Cu2O核壳复合微球的制备方法 |
| KR101353149B1 (ko) * | 2011-12-27 | 2014-01-27 | 삼성전기주식회사 | 구리분말 제조방법 |
| CN203495238U (zh) * | 2013-10-08 | 2014-03-26 | 江苏泰禾金属工业有限公司 | 一种铜粉粉碎装置 |
| WO2015122251A1 (ja) | 2014-02-14 | 2015-08-20 | 三井金属鉱業株式会社 | 銅粉 |
-
2018
- 2018-03-28 CN CN201880012738.6A patent/CN110325303B/zh active Active
- 2018-03-28 KR KR1020197024034A patent/KR102403998B1/ko active IP Right Grant
- 2018-03-28 WO PCT/JP2018/012780 patent/WO2018181482A1/ja active Application Filing
- 2018-03-28 JP JP2019509979A patent/JP7050756B2/ja active Active
- 2018-03-29 TW TW107110963A patent/TWI803486B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003530679A (ja) | 2000-04-10 | 2003-10-14 | テトロニクス リミテッド | ツイン・プラズマ・トーチ装置 |
| JP2002169273A (ja) | 2000-11-30 | 2002-06-14 | Murata Mfg Co Ltd | 感光性銅ペースト及びそれを用いた回路基板 |
| WO2016052373A1 (ja) | 2014-10-03 | 2016-04-07 | 三井金属鉱業株式会社 | 銅粉 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI803486B (zh) | 2023-06-01 |
| KR20190132351A (ko) | 2019-11-27 |
| TW201841702A (zh) | 2018-12-01 |
| JPWO2018181482A1 (ja) | 2020-02-06 |
| CN110325303B (zh) | 2022-01-11 |
| KR102403998B1 (ko) | 2022-05-31 |
| WO2018181482A1 (ja) | 2018-10-04 |
| CN110325303A (zh) | 2019-10-11 |
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