JP7042587B2 - 化学気相成長装置 - Google Patents
化学気相成長装置 Download PDFInfo
- Publication number
- JP7042587B2 JP7042587B2 JP2017218061A JP2017218061A JP7042587B2 JP 7042587 B2 JP7042587 B2 JP 7042587B2 JP 2017218061 A JP2017218061 A JP 2017218061A JP 2017218061 A JP2017218061 A JP 2017218061A JP 7042587 B2 JP7042587 B2 JP 7042587B2
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- JP
- Japan
- Prior art keywords
- gas
- bent portion
- pipe
- chemical vapor
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005229 chemical vapour deposition Methods 0.000 title claims description 40
- 238000003860 storage Methods 0.000 claims description 12
- 239000013049 sediment Substances 0.000 claims description 10
- 238000005452 bending Methods 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 83
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 11
- 229910010271 silicon carbide Inorganic materials 0.000 description 10
- 239000006227 byproduct Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 3
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 3
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 3
- 239000005052 trichlorosilane Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Description
すなわち、本発明は、上記課題を解決するため、以下の手段を提供する。
20 排気配管
22 第1屈曲部
22A 第1配管
22B 第2配管
24 第2屈曲部
26 第1配管延長部
26A 第1貯留空間
27 第2配管延長部
27A 第2貯留空間
28 第3配管延長部
28A 第3貯留空間
30 フィルタ
40 排気ポンプ
100 化学気相成長装置
Claims (5)
- 内部で気相成長を行う反応炉と、
前記反応炉からガスを排気する排気配管と、を備え、
前記排気配管は複数の屈曲部を有し、
前記複数の屈曲部のうち第1屈曲部と第2屈曲部とは、前記第1屈曲部及び第2屈曲部からそれぞれ延出し内部に堆積物の貯留空間を有する配管延長部をそれぞれ備え、
前記第1屈曲部に備えられた前記配管延長部は、前記第1屈曲部に流入するガスの流れ方向の延長線に位置し、
前記第2屈曲部は、前記配管延長部を複数有し、
前記第2屈曲部に備えられた複数の前記配管延長部は、前記第2屈曲部に流入するガスの流れ方向の延長線と、前記第2屈曲部から流出するガスの流れ方向と反対側と、に位置し、
前記第2屈曲部は、前記第1屈曲部より前記反応炉から排気されるガスの流れ方向後方に位置する、化学気相成長装置。 - 前記配管延長部の長さが5cm以上30cm以下である、請求項1に記載の化学気相成長装置。
- 前記反応炉で行う気相成長がSiCのエピタキシャル成長である、請求項1又は2に記載の化学気相成長装置。
- 前記SiCのエピタキシャル成長がCl系ガスを用いたエピタキシャル成長である、請求項3に記載の化学気相成長装置。
- 使用時の前記反応炉内の圧力が、2kPa以上50kPa以下である、請求項3に記載の化学気相成長装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017218061A JP7042587B2 (ja) | 2017-11-13 | 2017-11-13 | 化学気相成長装置 |
DE102018126654.5A DE102018126654A1 (de) | 2017-11-13 | 2018-10-25 | Vorrichtung zur chemischen dampfphasenabscheidung |
US16/175,936 US20190144995A1 (en) | 2017-11-13 | 2018-10-31 | Chemical vapor deposition apparatus |
CN201811323045.7A CN109778144B (zh) | 2017-11-13 | 2018-11-08 | 化学气相沉积装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017218061A JP7042587B2 (ja) | 2017-11-13 | 2017-11-13 | 化学気相成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019091751A JP2019091751A (ja) | 2019-06-13 |
JP7042587B2 true JP7042587B2 (ja) | 2022-03-28 |
Family
ID=66335459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017218061A Active JP7042587B2 (ja) | 2017-11-13 | 2017-11-13 | 化学気相成長装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20190144995A1 (ja) |
JP (1) | JP7042587B2 (ja) |
CN (1) | CN109778144B (ja) |
DE (1) | DE102018126654A1 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000070664A (ja) | 1998-06-18 | 2000-03-07 | Kokusai Electric Co Ltd | 加熱型トラップ装置および成膜装置 |
JP2001035795A (ja) | 1999-07-22 | 2001-02-09 | Sony Corp | 気相成長装置 |
US20040045889A1 (en) | 2002-09-11 | 2004-03-11 | Planar Systems, Inc. | High conductivity particle filter |
JP2007201147A (ja) | 2006-01-26 | 2007-08-09 | Furukawa Co Ltd | ハイドライド気相成長装置 |
CN201321490Y (zh) | 2008-12-10 | 2009-10-07 | 中芯国际集成电路制造(上海)有限公司 | 低压化学气相淀积系统 |
JP2015214746A (ja) | 2014-04-21 | 2015-12-03 | 東京エレクトロン株式会社 | 排気システム |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1064829A (ja) * | 1996-08-16 | 1998-03-06 | Nec Corp | 常圧cvd装置及びその清掃方法 |
US8858709B1 (en) * | 2006-04-11 | 2014-10-14 | Ii-Vi Incorporated | Silicon carbide with low nitrogen content and method for preparation |
JP2008153564A (ja) * | 2006-12-20 | 2008-07-03 | Matsushita Electric Ind Co Ltd | Cvd装置 |
US9057388B2 (en) * | 2012-03-21 | 2015-06-16 | International Business Machines Corporation | Vacuum trap |
JP6007715B2 (ja) * | 2012-03-29 | 2016-10-12 | 東京エレクトロン株式会社 | トラップ機構、排気系及び成膜装置 |
US8999028B2 (en) * | 2013-03-15 | 2015-04-07 | Macronix International Co., Ltd. | Apparatus and method for collecting powder generated during film deposition process |
JP6371738B2 (ja) * | 2015-05-28 | 2018-08-08 | 株式会社東芝 | 成膜装置 |
JP6342370B2 (ja) * | 2015-09-07 | 2018-06-13 | 株式会社東芝 | 半導体製造装置及び半導体製造装置用除去装置 |
JP2017218061A (ja) | 2016-06-09 | 2017-12-14 | 公立大学法人大阪市立大学 | 飛行体システムおよび飛行体制御方法 |
-
2017
- 2017-11-13 JP JP2017218061A patent/JP7042587B2/ja active Active
-
2018
- 2018-10-25 DE DE102018126654.5A patent/DE102018126654A1/de active Granted
- 2018-10-31 US US16/175,936 patent/US20190144995A1/en not_active Abandoned
- 2018-11-08 CN CN201811323045.7A patent/CN109778144B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000070664A (ja) | 1998-06-18 | 2000-03-07 | Kokusai Electric Co Ltd | 加熱型トラップ装置および成膜装置 |
JP2001035795A (ja) | 1999-07-22 | 2001-02-09 | Sony Corp | 気相成長装置 |
US20040045889A1 (en) | 2002-09-11 | 2004-03-11 | Planar Systems, Inc. | High conductivity particle filter |
JP2007201147A (ja) | 2006-01-26 | 2007-08-09 | Furukawa Co Ltd | ハイドライド気相成長装置 |
CN201321490Y (zh) | 2008-12-10 | 2009-10-07 | 中芯国际集成电路制造(上海)有限公司 | 低压化学气相淀积系统 |
JP2015214746A (ja) | 2014-04-21 | 2015-12-03 | 東京エレクトロン株式会社 | 排気システム |
Also Published As
Publication number | Publication date |
---|---|
DE102018126654A1 (de) | 2019-05-16 |
JP2019091751A (ja) | 2019-06-13 |
US20190144995A1 (en) | 2019-05-16 |
CN109778144A (zh) | 2019-05-21 |
CN109778144B (zh) | 2021-03-23 |
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